JPH03120032U - - Google Patents
Info
- Publication number
- JPH03120032U JPH03120032U JP2872990U JP2872990U JPH03120032U JP H03120032 U JPH03120032 U JP H03120032U JP 2872990 U JP2872990 U JP 2872990U JP 2872990 U JP2872990 U JP 2872990U JP H03120032 U JPH03120032 U JP H03120032U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- end point
- detection mechanism
- point detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2872990U JPH03120032U (enExample) | 1990-03-20 | 1990-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2872990U JPH03120032U (enExample) | 1990-03-20 | 1990-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120032U true JPH03120032U (enExample) | 1991-12-10 |
Family
ID=31531518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2872990U Pending JPH03120032U (enExample) | 1990-03-20 | 1990-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120032U (enExample) |
-
1990
- 1990-03-20 JP JP2872990U patent/JPH03120032U/ja active Pending
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