JPH03117537U - - Google Patents
Info
- Publication number
- JPH03117537U JPH03117537U JP2559490U JP2559490U JPH03117537U JP H03117537 U JPH03117537 U JP H03117537U JP 2559490 U JP2559490 U JP 2559490U JP 2559490 U JP2559490 U JP 2559490U JP H03117537 U JPH03117537 U JP H03117537U
- Authority
- JP
- Japan
- Prior art keywords
- movable
- platen
- drive
- fixed
- drive devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008602 contraction Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990025594U JP2515316Y2 (ja) | 1990-03-13 | 1990-03-13 | 移動テーブル |
US07/667,893 US5163651A (en) | 1990-03-13 | 1991-03-12 | Movable table |
DE4107881A DE4107881C2 (de) | 1990-03-13 | 1991-03-12 | Verstellbarer Tisch |
GB9105256A GB2243075B (en) | 1990-03-13 | 1991-03-13 | Movable table |
FR9103036A FR2659537A1 (fr) | 1990-03-13 | 1991-03-13 | Table mobile a plateaux respectivement fixe et mobile. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990025594U JP2515316Y2 (ja) | 1990-03-13 | 1990-03-13 | 移動テーブル |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03117537U true JPH03117537U (zh) | 1991-12-04 |
JP2515316Y2 JP2515316Y2 (ja) | 1996-10-30 |
Family
ID=31528526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990025594U Expired - Fee Related JP2515316Y2 (ja) | 1990-03-13 | 1990-03-13 | 移動テーブル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2515316Y2 (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09155666A (ja) * | 1995-12-01 | 1997-06-17 | Kazuya Hirose | ステージの縦横移動旋回支持機構 |
JPH1170430A (ja) * | 1997-08-28 | 1999-03-16 | Ntn Corp | 移動テーブル |
JP2005351917A (ja) * | 2004-06-08 | 2005-12-22 | Pentax Corp | 像ブレ補正装置 |
JP2006094185A (ja) * | 2004-09-24 | 2006-04-06 | Pentax Corp | ステージ駆動機構 |
JP2009061512A (ja) * | 2007-09-04 | 2009-03-26 | Hiihaisuto Seiko Kk | テーブル装置 |
WO2021161872A1 (ja) * | 2020-02-13 | 2021-08-19 | Thk株式会社 | アライメント装置、アクチュエータ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61230836A (ja) * | 1985-03-29 | 1986-10-15 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | 位置決め装置 |
JPS62123882U (zh) * | 1986-01-31 | 1987-08-06 |
-
1990
- 1990-03-13 JP JP1990025594U patent/JP2515316Y2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61230836A (ja) * | 1985-03-29 | 1986-10-15 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | 位置決め装置 |
JPS62123882U (zh) * | 1986-01-31 | 1987-08-06 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09155666A (ja) * | 1995-12-01 | 1997-06-17 | Kazuya Hirose | ステージの縦横移動旋回支持機構 |
JPH1170430A (ja) * | 1997-08-28 | 1999-03-16 | Ntn Corp | 移動テーブル |
JP2005351917A (ja) * | 2004-06-08 | 2005-12-22 | Pentax Corp | 像ブレ補正装置 |
JP4691326B2 (ja) * | 2004-06-08 | 2011-06-01 | Hoya株式会社 | 像ブレ補正装置 |
JP2006094185A (ja) * | 2004-09-24 | 2006-04-06 | Pentax Corp | ステージ駆動機構 |
JP4647273B2 (ja) * | 2004-09-24 | 2011-03-09 | Hoya株式会社 | ステージ駆動機構 |
JP2009061512A (ja) * | 2007-09-04 | 2009-03-26 | Hiihaisuto Seiko Kk | テーブル装置 |
WO2021161872A1 (ja) * | 2020-02-13 | 2021-08-19 | Thk株式会社 | アライメント装置、アクチュエータ |
Also Published As
Publication number | Publication date |
---|---|
JP2515316Y2 (ja) | 1996-10-30 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |