JPH03116041U - - Google Patents

Info

Publication number
JPH03116041U
JPH03116041U JP2588990U JP2588990U JPH03116041U JP H03116041 U JPH03116041 U JP H03116041U JP 2588990 U JP2588990 U JP 2588990U JP 2588990 U JP2588990 U JP 2588990U JP H03116041 U JPH03116041 U JP H03116041U
Authority
JP
Japan
Prior art keywords
identification mark
wafer
basket
base material
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2588990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0735398Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990025889U priority Critical patent/JPH0735398Y2/ja
Publication of JPH03116041U publication Critical patent/JPH03116041U/ja
Application granted granted Critical
Publication of JPH0735398Y2 publication Critical patent/JPH0735398Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP1990025889U 1990-03-14 1990-03-14 ウエハ用バスケット Expired - Lifetime JPH0735398Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990025889U JPH0735398Y2 (ja) 1990-03-14 1990-03-14 ウエハ用バスケット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990025889U JPH0735398Y2 (ja) 1990-03-14 1990-03-14 ウエハ用バスケット

Publications (2)

Publication Number Publication Date
JPH03116041U true JPH03116041U (fr) 1991-12-02
JPH0735398Y2 JPH0735398Y2 (ja) 1995-08-09

Family

ID=31528807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990025889U Expired - Lifetime JPH0735398Y2 (ja) 1990-03-14 1990-03-14 ウエハ用バスケット

Country Status (1)

Country Link
JP (1) JPH0735398Y2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11255242A (ja) * 1998-03-11 1999-09-21 Nippon Grease Nipple Kk 板状物品の収納凹部への密閉溶着方法及びそれを利用して溶着した樹脂製品

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62123735A (ja) * 1985-11-22 1987-06-05 Mitsubishi Electric Corp ウエ−ハカセツト
JPH01316957A (ja) * 1988-06-15 1989-12-21 Nec Corp 枚葉式処理装置
JPH0284319U (fr) * 1988-12-20 1990-06-29

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62123735A (ja) * 1985-11-22 1987-06-05 Mitsubishi Electric Corp ウエ−ハカセツト
JPH01316957A (ja) * 1988-06-15 1989-12-21 Nec Corp 枚葉式処理装置
JPH0284319U (fr) * 1988-12-20 1990-06-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11255242A (ja) * 1998-03-11 1999-09-21 Nippon Grease Nipple Kk 板状物品の収納凹部への密閉溶着方法及びそれを利用して溶着した樹脂製品

Also Published As

Publication number Publication date
JPH0735398Y2 (ja) 1995-08-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term