JPH03116041U - - Google Patents
Info
- Publication number
- JPH03116041U JPH03116041U JP2588990U JP2588990U JPH03116041U JP H03116041 U JPH03116041 U JP H03116041U JP 2588990 U JP2588990 U JP 2588990U JP 2588990 U JP2588990 U JP 2588990U JP H03116041 U JPH03116041 U JP H03116041U
- Authority
- JP
- Japan
- Prior art keywords
- identification mark
- wafer
- basket
- base material
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990025889U JPH0735398Y2 (ja) | 1990-03-14 | 1990-03-14 | ウエハ用バスケット |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990025889U JPH0735398Y2 (ja) | 1990-03-14 | 1990-03-14 | ウエハ用バスケット |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03116041U true JPH03116041U (bg) | 1991-12-02 |
JPH0735398Y2 JPH0735398Y2 (ja) | 1995-08-09 |
Family
ID=31528807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990025889U Expired - Lifetime JPH0735398Y2 (ja) | 1990-03-14 | 1990-03-14 | ウエハ用バスケット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0735398Y2 (bg) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11255242A (ja) * | 1998-03-11 | 1999-09-21 | Nippon Grease Nipple Kk | 板状物品の収納凹部への密閉溶着方法及びそれを利用して溶着した樹脂製品 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62123735A (ja) * | 1985-11-22 | 1987-06-05 | Mitsubishi Electric Corp | ウエ−ハカセツト |
JPH01316957A (ja) * | 1988-06-15 | 1989-12-21 | Nec Corp | 枚葉式処理装置 |
JPH0284319U (bg) * | 1988-12-20 | 1990-06-29 |
-
1990
- 1990-03-14 JP JP1990025889U patent/JPH0735398Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62123735A (ja) * | 1985-11-22 | 1987-06-05 | Mitsubishi Electric Corp | ウエ−ハカセツト |
JPH01316957A (ja) * | 1988-06-15 | 1989-12-21 | Nec Corp | 枚葉式処理装置 |
JPH0284319U (bg) * | 1988-12-20 | 1990-06-29 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11255242A (ja) * | 1998-03-11 | 1999-09-21 | Nippon Grease Nipple Kk | 板状物品の収納凹部への密閉溶着方法及びそれを利用して溶着した樹脂製品 |
Also Published As
Publication number | Publication date |
---|---|
JPH0735398Y2 (ja) | 1995-08-09 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |