JPH03113787U - - Google Patents

Info

Publication number
JPH03113787U
JPH03113787U JP2125490U JP2125490U JPH03113787U JP H03113787 U JPH03113787 U JP H03113787U JP 2125490 U JP2125490 U JP 2125490U JP 2125490 U JP2125490 U JP 2125490U JP H03113787 U JPH03113787 U JP H03113787U
Authority
JP
Japan
Prior art keywords
robot
guide rail
arm
traveling device
centering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2125490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2125490U priority Critical patent/JPH03113787U/ja
Publication of JPH03113787U publication Critical patent/JPH03113787U/ja
Pending legal-status Critical Current

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  • Numerical Control (AREA)
JP2125490U 1990-03-02 1990-03-02 Pending JPH03113787U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2125490U JPH03113787U (US20080293856A1-20081127-C00150.png) 1990-03-02 1990-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2125490U JPH03113787U (US20080293856A1-20081127-C00150.png) 1990-03-02 1990-03-02

Publications (1)

Publication Number Publication Date
JPH03113787U true JPH03113787U (US20080293856A1-20081127-C00150.png) 1991-11-21

Family

ID=31524305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2125490U Pending JPH03113787U (US20080293856A1-20081127-C00150.png) 1990-03-02 1990-03-02

Country Status (1)

Country Link
JP (1) JPH03113787U (US20080293856A1-20081127-C00150.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011077245A (ja) * 2009-09-30 2011-04-14 Dainippon Screen Mfg Co Ltd 基板処理装置およびティーチング方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS609680A (ja) * 1983-06-30 1985-01-18 トヨタ自動車株式会社 産業用ロボツトの制御基準位置設定方法
JPS62218808A (ja) * 1986-03-20 1987-09-26 Tokyo Boeki Kk 三次元計測ロボットの計測精度補正方法
JPS62272111A (ja) * 1986-05-21 1987-11-26 Hitachi Ltd ロボツトハンドの位置・姿勢検出方法
JPH01246090A (ja) * 1988-03-29 1989-10-02 Amada Co Ltd スイング式機械の初期位置設定方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS609680A (ja) * 1983-06-30 1985-01-18 トヨタ自動車株式会社 産業用ロボツトの制御基準位置設定方法
JPS62218808A (ja) * 1986-03-20 1987-09-26 Tokyo Boeki Kk 三次元計測ロボットの計測精度補正方法
JPS62272111A (ja) * 1986-05-21 1987-11-26 Hitachi Ltd ロボツトハンドの位置・姿勢検出方法
JPH01246090A (ja) * 1988-03-29 1989-10-02 Amada Co Ltd スイング式機械の初期位置設定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011077245A (ja) * 2009-09-30 2011-04-14 Dainippon Screen Mfg Co Ltd 基板処理装置およびティーチング方法

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