JPH03110831U - - Google Patents

Info

Publication number
JPH03110831U
JPH03110831U JP1912890U JP1912890U JPH03110831U JP H03110831 U JPH03110831 U JP H03110831U JP 1912890 U JP1912890 U JP 1912890U JP 1912890 U JP1912890 U JP 1912890U JP H03110831 U JPH03110831 U JP H03110831U
Authority
JP
Japan
Prior art keywords
gas supply
gas
reaction tube
supply pipe
gas inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1912890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1912890U priority Critical patent/JPH03110831U/ja
Publication of JPH03110831U publication Critical patent/JPH03110831U/ja
Pending legal-status Critical Current

Links

JP1912890U 1990-02-27 1990-02-27 Pending JPH03110831U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1912890U JPH03110831U (enExample) 1990-02-27 1990-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1912890U JPH03110831U (enExample) 1990-02-27 1990-02-27

Publications (1)

Publication Number Publication Date
JPH03110831U true JPH03110831U (enExample) 1991-11-13

Family

ID=31522266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1912890U Pending JPH03110831U (enExample) 1990-02-27 1990-02-27

Country Status (1)

Country Link
JP (1) JPH03110831U (enExample)

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