JPH02146423U - - Google Patents

Info

Publication number
JPH02146423U
JPH02146423U JP5620889U JP5620889U JPH02146423U JP H02146423 U JPH02146423 U JP H02146423U JP 5620889 U JP5620889 U JP 5620889U JP 5620889 U JP5620889 U JP 5620889U JP H02146423 U JPH02146423 U JP H02146423U
Authority
JP
Japan
Prior art keywords
reaction tube
susceptor
flow
vapor phase
inner diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5620889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5620889U priority Critical patent/JPH02146423U/ja
Publication of JPH02146423U publication Critical patent/JPH02146423U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5620889U 1989-05-16 1989-05-16 Pending JPH02146423U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5620889U JPH02146423U (enExample) 1989-05-16 1989-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5620889U JPH02146423U (enExample) 1989-05-16 1989-05-16

Publications (1)

Publication Number Publication Date
JPH02146423U true JPH02146423U (enExample) 1990-12-12

Family

ID=31579831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5620889U Pending JPH02146423U (enExample) 1989-05-16 1989-05-16

Country Status (1)

Country Link
JP (1) JPH02146423U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003048413A1 (en) * 2001-12-03 2003-06-12 Ulvac, Inc. Mixer, and device and method for manufacturing thin-film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63192228A (ja) * 1987-02-04 1988-08-09 Mitsubishi Electric Corp 半導体薄膜形成装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63192228A (ja) * 1987-02-04 1988-08-09 Mitsubishi Electric Corp 半導体薄膜形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003048413A1 (en) * 2001-12-03 2003-06-12 Ulvac, Inc. Mixer, and device and method for manufacturing thin-film

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