JPS61142876U - - Google Patents
Info
- Publication number
- JPS61142876U JPS61142876U JP2797985U JP2797985U JPS61142876U JP S61142876 U JPS61142876 U JP S61142876U JP 2797985 U JP2797985 U JP 2797985U JP 2797985 U JP2797985 U JP 2797985U JP S61142876 U JPS61142876 U JP S61142876U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- airtight packing
- metal wall
- reaction tube
- predetermined temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012856 packing Methods 0.000 claims description 5
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 3
- 239000012495 reaction gas Substances 0.000 claims 2
- 238000002425 crystallisation Methods 0.000 claims 1
- 230000008025 crystallization Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2797985U JPH0217019Y2 (enExample) | 1985-02-26 | 1985-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2797985U JPH0217019Y2 (enExample) | 1985-02-26 | 1985-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61142876U true JPS61142876U (enExample) | 1986-09-03 |
| JPH0217019Y2 JPH0217019Y2 (enExample) | 1990-05-11 |
Family
ID=30525431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2797985U Expired JPH0217019Y2 (enExample) | 1985-02-26 | 1985-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217019Y2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01122064U (enExample) * | 1988-02-08 | 1989-08-18 | ||
| JPH03295224A (ja) * | 1990-04-12 | 1991-12-26 | Matsushita Electron Corp | 薄膜形成装置 |
-
1985
- 1985-02-26 JP JP2797985U patent/JPH0217019Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01122064U (enExample) * | 1988-02-08 | 1989-08-18 | ||
| JPH03295224A (ja) * | 1990-04-12 | 1991-12-26 | Matsushita Electron Corp | 薄膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0217019Y2 (enExample) | 1990-05-11 |