JPH0378061U - - Google Patents
Info
- Publication number
- JPH0378061U JPH0378061U JP13976389U JP13976389U JPH0378061U JP H0378061 U JPH0378061 U JP H0378061U JP 13976389 U JP13976389 U JP 13976389U JP 13976389 U JP13976389 U JP 13976389U JP H0378061 U JPH0378061 U JP H0378061U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- gas
- vapor phase
- chamber
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13976389U JPH0378061U (enExample) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13976389U JPH0378061U (enExample) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378061U true JPH0378061U (enExample) | 1991-08-07 |
Family
ID=31686789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13976389U Pending JPH0378061U (enExample) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378061U (enExample) |
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1989
- 1989-11-30 JP JP13976389U patent/JPH0378061U/ja active Pending