JPS6448136U - - Google Patents
Info
- Publication number
- JPS6448136U JPS6448136U JP14341587U JP14341587U JPS6448136U JP S6448136 U JPS6448136 U JP S6448136U JP 14341587 U JP14341587 U JP 14341587U JP 14341587 U JP14341587 U JP 14341587U JP S6448136 U JPS6448136 U JP S6448136U
- Authority
- JP
- Japan
- Prior art keywords
- container
- introduction tubes
- gas
- raw material
- bubbler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14341587U JPS6448136U (enExample) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14341587U JPS6448136U (enExample) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448136U true JPS6448136U (enExample) | 1989-03-24 |
Family
ID=31410220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14341587U Pending JPS6448136U (enExample) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448136U (enExample) |
-
1987
- 1987-09-18 JP JP14341587U patent/JPS6448136U/ja active Pending