JPS6228427U - - Google Patents
Info
- Publication number
- JPS6228427U JPS6228427U JP1985118766U JP11876685U JPS6228427U JP S6228427 U JPS6228427 U JP S6228427U JP 1985118766 U JP1985118766 U JP 1985118766U JP 11876685 U JP11876685 U JP 11876685U JP S6228427 U JPS6228427 U JP S6228427U
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- susceptor
- base
- inlet pipe
- reactant gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985118766U JPS6228427U (enExample) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985118766U JPS6228427U (enExample) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228427U true JPS6228427U (enExample) | 1987-02-20 |
Family
ID=31005531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985118766U Pending JPS6228427U (enExample) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228427U (enExample) |
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1985
- 1985-07-31 JP JP1985118766U patent/JPS6228427U/ja active Pending