JPS62168638U - - Google Patents
Info
- Publication number
- JPS62168638U JPS62168638U JP5776386U JP5776386U JPS62168638U JP S62168638 U JPS62168638 U JP S62168638U JP 5776386 U JP5776386 U JP 5776386U JP 5776386 U JP5776386 U JP 5776386U JP S62168638 U JPS62168638 U JP S62168638U
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- growth apparatus
- susceptor
- cylindrical joint
- gas pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims 4
- 239000007789 gas Substances 0.000 claims 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5776386U JPS62168638U (enExample) | 1986-04-17 | 1986-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5776386U JPS62168638U (enExample) | 1986-04-17 | 1986-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168638U true JPS62168638U (enExample) | 1987-10-26 |
Family
ID=30887754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5776386U Pending JPS62168638U (enExample) | 1986-04-17 | 1986-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168638U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02156630A (ja) * | 1988-12-09 | 1990-06-15 | Nec Corp | 気相成長装置 |
| JPH044736U (enExample) * | 1990-04-26 | 1992-01-16 |
-
1986
- 1986-04-17 JP JP5776386U patent/JPS62168638U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02156630A (ja) * | 1988-12-09 | 1990-06-15 | Nec Corp | 気相成長装置 |
| JPH044736U (enExample) * | 1990-04-26 | 1992-01-16 |