JPH0311056U - - Google Patents
Info
- Publication number
- JPH0311056U JPH0311056U JP7094389U JP7094389U JPH0311056U JP H0311056 U JPH0311056 U JP H0311056U JP 7094389 U JP7094389 U JP 7094389U JP 7094389 U JP7094389 U JP 7094389U JP H0311056 U JPH0311056 U JP H0311056U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- movable frame
- adjustment
- rotating
- rotation angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図ないし第６図はこの考案の実施例を示し
、第１図はこの考案の要部構造を示す原理説明図
、第２図は真空蒸着装置の概略構造を示す内部正
面図、第３図はホルダ駆動装置の一部破断平面図
、第４図は自転角度調節機構を示す側面図、第５
図は自転角度調節機構及び自転機構の要部破断平
面図、第６図は第５図におけるＡ−Ａ線断面図で
ある。第７図は従来装置における自転角度調節機
構を示す内部正面図である。
５……基板ホルダ、６……レール、７……自転
機構、８……自転角度調節機構、９……公転枠、
１９……自転回転輪、２７……可動枠、２８……
調節フレーム、２９……ガイド手段、３０……締
結手段、３２……円弧溝、３４……スライドブロ
ツク、Ｐ……俯仰中心、Ｑ……円弧中心。
1 to 6 show embodiments of this invention, FIG. 1 is a principle explanatory diagram showing the main structure of this invention, FIG. 2 is an internal front view showing a schematic structure of a vacuum evaporation apparatus, and FIG. The figure is a partially cutaway plan view of the holder drive device, Figure 4 is a side view showing the rotation angle adjustment mechanism, and Figure 5 is a side view showing the rotation angle adjustment mechanism.
The figure is a cutaway plan view of essential parts of the rotation angle adjusting mechanism and the rotation mechanism, and FIG. 6 is a sectional view taken along the line A-A in FIG. 5. FIG. 7 is an internal front view showing the rotation angle adjustment mechanism in the conventional device. 5... Board holder, 6... Rail, 7... Autorotation mechanism, 8... Autorotation angle adjustment mechanism, 9... Revolution frame,
19... Rotating wheel, 27... Movable frame, 28...
Adjustment frame, 29... Guide means, 30... Fastening means, 32... Arc groove, 34... Slide block, P... Elevation center, Q... Arc center.
Claims (1)
、自転機構に自転角度調節機構を介して支持され
る公転枠と、自転回転輪を走行案内する円環状の
レールとを備えており、 自転角度調節機構は、公転枠に固定される調節
フレームと、自転機構に固定される可動枠とを有
し、 調節フレームと可動枠との間に、可動枠を揺動
変位自在に案内支持するガイド手段と、任意の揺
動位置で可動枠を調節フレームに固定する締結手
段とをそれぞれ設け、 ガイド手段が、面接触状態で相対移動する円弧
溝とスライドブロツクとを含んで構成されており
、 円弧溝の円弧中心が、自転回転輪のレールに対
する俯仰中心と一致させてあることを特徴とする
真空蒸着装置。[Claims for Utility Model Registration] A rotating mechanism including a substrate holder and a rotating ring, a revolving frame supported by the rotating mechanism via a rotation angle adjusting mechanism, and an annular rail that guides the rotating ring. The rotation angle adjustment mechanism has an adjustment frame fixed to the revolving frame and a movable frame fixed to the rotation mechanism, and the movable frame is disposed between the adjustment frame and the movable frame to perform rocking displacement. A guide means for freely guiding and supporting the movable frame and a fastening means for fixing the movable frame to the adjustment frame at an arbitrary swing position are provided, and the guide means includes an arcuate groove and a slide block that move relative to each other in a state of surface contact. A vacuum evaporation apparatus comprising: a center of the arc of the arc groove is aligned with a center of elevation of the rotating wheel relative to the rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094389U JPH0718758Y2 (en) | 1989-06-16 | 1989-06-16 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094389U JPH0718758Y2 (en) | 1989-06-16 | 1989-06-16 | Vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0311056U true JPH0311056U (en) | 1991-02-01 |
| JPH0718758Y2 JPH0718758Y2 (en) | 1995-05-01 |
Family
ID=31607543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7094389U Expired - Lifetime JPH0718758Y2 (en) | 1989-06-16 | 1989-06-16 | Vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0718758Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007039881A (en) * | 2005-07-29 | 2007-02-15 | Wood One:Kk | Storage device |
| JP2007117232A (en) * | 2005-10-26 | 2007-05-17 | Noda Corp | Knockdown cabinet |
| JP2008012327A (en) * | 2007-08-29 | 2008-01-24 | Wood One:Kk | Storing apparatus |
| JP5793737B1 (en) * | 2014-07-10 | 2015-10-14 | ナルックス株式会社 | Vapor deposition equipment |
-
1989
- 1989-06-16 JP JP7094389U patent/JPH0718758Y2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007039881A (en) * | 2005-07-29 | 2007-02-15 | Wood One:Kk | Storage device |
| JP2007117232A (en) * | 2005-10-26 | 2007-05-17 | Noda Corp | Knockdown cabinet |
| JP2008012327A (en) * | 2007-08-29 | 2008-01-24 | Wood One:Kk | Storing apparatus |
| JP5793737B1 (en) * | 2014-07-10 | 2015-10-14 | ナルックス株式会社 | Vapor deposition equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0718758Y2 (en) | 1995-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |