JPH023465U - - Google Patents
Info
- Publication number
- JPH023465U JPH023465U JP8075888U JP8075888U JPH023465U JP H023465 U JPH023465 U JP H023465U JP 8075888 U JP8075888 U JP 8075888U JP 8075888 U JP8075888 U JP 8075888U JP H023465 U JPH023465 U JP H023465U
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- parallel link
- holder
- vertical movement
- rotary drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の第１の実施例に係る薄膜形成
用基台装置の縦断面図、第２図は第１図のＡ―Ａ
線に沿つた平面断面図、第３図ａ〜ｄは基板ホル
ダーの動作を示す概略的な平面図、第４図は従来
の薄膜作成装置の概略図、第５図は本考案の第２
の実施例の縦断面図である。
１……基板、２……基板ホルダー、４……羽根
車、６……リンク機構、８……ガイドローラ、９
……ガイド部材、９Ａ……筒体、１０……エアシ
リンダー、１１……支持軸、１１ａ……ねじ部、
１３，１６……モータ、１４……回転駆動軸、１
７……旋回ホルダー、２２……上下調整板、２５
，２５Ａ……駆動リンク、２６……長孔、３１…
…すべりキー。
FIG. 1 is a longitudinal cross-sectional view of a thin film forming base device according to the first embodiment of the present invention, and FIG. 2 is an A-A in FIG. 1.
3A to 3D are schematic plan views showing the operation of the substrate holder, FIG. 4 is a schematic diagram of a conventional thin film forming apparatus, and FIG. 5 is a schematic diagram of a conventional thin film forming apparatus.
FIG. 1... Board, 2... Board holder, 4... Impeller, 6... Link mechanism, 8... Guide roller, 9
... Guide member, 9A ... Cylindrical body, 10 ... Air cylinder, 11 ... Support shaft, 11a ... Threaded part,
13, 16...Motor, 14...Rotation drive shaft, 1
7...Swivel holder, 22...Vertical adjustment plate, 25
, 25A... Drive link, 26... Long hole, 31...
...sliding key.
Claims (1)
ーと、前記旋回ホルダーに保持されかつ前記基板
ホルダーをその軸線のまわりに回転させる自転駆
動機構と、前記基板ホルダーの自転中心から半径
方向にずれた位置に配置された回転駆動軸と、前
記旋回ホルダーと前記回転駆動軸とを連結する平
行リンク機構と、前記回転駆動軸を上下動可能に
支持する上下動機構と、前記上下動機構上に設け
られかつ前記平行リンク機構を傾斜状態に保持す
るとともに傾動させる平行リンク駆動機構とを有
し、前記旋回ホルダーは、前記平行リンク機構に
よつて前記回転駆動軸のまわりの旋回半径が変化
することを特徴とする薄膜形成用基台装置。 a rotating holder that rotatably supports a substrate holder; a rotation drive mechanism that is held by the rotating holder and rotates the substrate holder around its axis; a parallel link mechanism that connects the rotary drive shaft with the rotary drive shaft; a vertical movement mechanism that supports the rotary drive shaft in a vertically movable manner; and a vertical movement mechanism provided on the vertical movement mechanism. and a parallel link drive mechanism for holding and tilting the parallel link mechanism in an inclined state, and the turning holder is characterized in that a turning radius around the rotational drive shaft is changed by the parallel link mechanism. A base device for thin film formation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8075888U JPH023465U (en) | 1988-06-18 | 1988-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8075888U JPH023465U (en) | 1988-06-18 | 1988-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH023465U true JPH023465U (en) | 1990-01-10 |
Family
ID=31305574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8075888U Pending JPH023465U (en) | 1988-06-18 | 1988-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023465U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019218621A (en) * | 2018-06-22 | 2019-12-26 | 東京エレクトロン株式会社 | Substrate placing base and film deposition device |
-
1988
- 1988-06-18 JP JP8075888U patent/JPH023465U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019218621A (en) * | 2018-06-22 | 2019-12-26 | 東京エレクトロン株式会社 | Substrate placing base and film deposition device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH023465U (en) | ||
| JPH0311056U (en) | ||
| JPH0227836U (en) | ||
| JPH0433415U (en) | ||
| JPS61203359U (en) | ||
| JPH02127332U (en) | ||
| JPH01164054U (en) | ||
| JPS58196313U (en) | positioning device | |
| JPS6154432U (en) | ||
| JPH0420240U (en) | ||
| JPH0165824U (en) | ||
| JPS63127847U (en) | ||
| JPS63195567U (en) | ||
| JPS59146641U (en) | swivel device | |
| JPH028435U (en) | ||
| JPH0272084U (en) | ||
| JPS6171388U (en) | ||
| JPS6241504U (en) | ||
| JPS6223223U (en) | ||
| JPS6434503U (en) | ||
| JPS648211U (en) | ||
| JPH01159657U (en) | ||
| JPH0280622U (en) | ||
| JPS59143109U (en) | radar device | |
| JPH0389551U (en) |