JPH03110438U - - Google Patents
Info
- Publication number
- JPH03110438U JPH03110438U JP1884390U JP1884390U JPH03110438U JP H03110438 U JPH03110438 U JP H03110438U JP 1884390 U JP1884390 U JP 1884390U JP 1884390 U JP1884390 U JP 1884390U JP H03110438 U JPH03110438 U JP H03110438U
- Authority
- JP
- Japan
- Prior art keywords
- light
- inclined surface
- view
- shielding film
- transmitting substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1884390U JPH03110438U (US20110009641A1-20110113-C00185.png) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1884390U JPH03110438U (US20110009641A1-20110113-C00185.png) | 1990-02-28 | 1990-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110438U true JPH03110438U (US20110009641A1-20110113-C00185.png) | 1991-11-13 |
Family
ID=31521986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1884390U Pending JPH03110438U (US20110009641A1-20110113-C00185.png) | 1990-02-28 | 1990-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110438U (US20110009641A1-20110113-C00185.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004051369A1 (ja) * | 2002-12-03 | 2004-06-17 | Hoya Corporation | フォトマスクブランク、及びフォトマスク |
| JP2008257131A (ja) * | 2007-04-09 | 2008-10-23 | Hoya Corp | フォトマスクブランク用基板及びその製造方法、フォトマスクブランク、並びにフォトマスク |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5759543A (en) * | 1980-09-26 | 1982-04-09 | Terumo Corp | Body liquid purifying apparatus |
| JPS593437A (ja) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | 半導体装置製造用基板 |
| JPS6039047B2 (ja) * | 1976-05-22 | 1985-09-04 | 電気化学工業株式会社 | クロロプレンの製造方法 |
| JPS60195546A (ja) * | 1984-03-19 | 1985-10-04 | Hitachi Ltd | マスク用基板 |
-
1990
- 1990-02-28 JP JP1884390U patent/JPH03110438U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6039047B2 (ja) * | 1976-05-22 | 1985-09-04 | 電気化学工業株式会社 | クロロプレンの製造方法 |
| JPS5759543A (en) * | 1980-09-26 | 1982-04-09 | Terumo Corp | Body liquid purifying apparatus |
| JPS593437A (ja) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | 半導体装置製造用基板 |
| JPS60195546A (ja) * | 1984-03-19 | 1985-10-04 | Hitachi Ltd | マスク用基板 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004051369A1 (ja) * | 2002-12-03 | 2004-06-17 | Hoya Corporation | フォトマスクブランク、及びフォトマスク |
| JP2008257131A (ja) * | 2007-04-09 | 2008-10-23 | Hoya Corp | フォトマスクブランク用基板及びその製造方法、フォトマスクブランク、並びにフォトマスク |
