JPH03104842U - - Google Patents

Info

Publication number
JPH03104842U
JPH03104842U JP1990010777U JP1077790U JPH03104842U JP H03104842 U JPH03104842 U JP H03104842U JP 1990010777 U JP1990010777 U JP 1990010777U JP 1077790 U JP1077790 U JP 1077790U JP H03104842 U JPH03104842 U JP H03104842U
Authority
JP
Japan
Prior art keywords
displacement
measured
light wave
physical quantity
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1990010777U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990010777U priority Critical patent/JPH03104842U/ja
Priority to US07/648,057 priority patent/US5170219A/en
Publication of JPH03104842U publication Critical patent/JPH03104842U/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の構成を説明するブ
ロツク線図である。第２図は第１図の実施例の作
動を説明するフローチヤートである。第３図は第
２図のステツプＳ５乃至Ｓ８が繰り返し実行され
る結果得られる変位量データ列をグラフ化して示
す図である。第４図は第２図のステツプＳ１０乃
至Ｓ１３が繰り返し実行される結果得られる変位
量データ列をグラフ化して示す図である。第５図
は第２図のフローチヤートに示す作動が実行され
る結果得られるヒステリシスを示す図である。第
６図、第７図、第８図は、本考案の他の実施例に
おいて得られる変位特性をそれぞれ示す図であつ
て、第６図は印加電圧を加えてからの変位量の過
渡特性、第７図は印加電圧信号の周波数に対する
変位量の最大値の変化特性、第８図は印加温度に
対する変位量の変化特性を示している。 １８……圧電素子（被測定素材）、２０……光
波干渉式変位計（光波干渉式変位検出手段）、２
４……電子制御装置（演算制御手段）、３２……
可変電圧回路（変位発生手段）。

Claims (1)

  1. 【実用新案登録請求の範囲】 被測定素材の変位特性を測定するための装置で
    あつて、 前記被測定素材の変位部位に変位を生じさせる
    ための物理量を該被測定素材に付与することによ
    り、該被測定素材に変位を生じさせる変位発生手
    段と、 前記被測定素材の変位部位の微小変位を、該変
    位部位からの反射光の周波数または位相のずれに
    基づいて検出する光波干渉式変位検出手段と、 前記変位発生手段から前記被測定素材に付与し
    た物理量と、前記光波干渉式変位検手段により検
    出された実際の変位量とから、該物理量に対する
    該被測定素材の変位特性を測定する演算制御手段
    と、 を含むことを特徴とする光波干渉式変位特性測
    定装置。
JP1990010777U 1990-02-06 1990-02-06 Pending JPH03104842U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1990010777U JPH03104842U (ja) 1990-02-06 1990-02-06
US07/648,057 US5170219A (en) 1990-02-06 1991-01-30 Optical heterodyne interference detecting apparatus for measuring displacement characteristic of workpiece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990010777U JPH03104842U (ja) 1990-02-06 1990-02-06

Publications (1)

Publication Number Publication Date
JPH03104842U true JPH03104842U (ja) 1991-10-30

Family

ID=11759766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990010777U Pending JPH03104842U (ja) 1990-02-06 1990-02-06

Country Status (2)

Country Link
US (1) US5170219A (ja)
JP (1) JPH03104842U (ja)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4412172A (en) * 1981-10-28 1983-10-25 The United States Of America As Represented By The Secretary Of The Army Method of measuring the thermal properties of a resonator
US4432239A (en) * 1981-12-08 1984-02-21 Bykov Anatoly P Apparatus for measuring deformation
JPS606860A (ja) * 1983-06-15 1985-01-14 Hitachi Ltd 非接触式超音波探傷方法およびその装置
US4577131A (en) * 1983-12-29 1986-03-18 Zygo Corporation Piezoelectric micromotion actuator
US4905519A (en) * 1987-03-02 1990-03-06 Hughes Aircraft Company Interferometric vibration sensor
US4823601A (en) * 1987-07-07 1989-04-25 The United States Of America As Represented By The United States Department Of Energy Vibration sensing method and apparatus
US4892406A (en) * 1988-01-11 1990-01-09 United Technologies Corporation Method of and arrangement for measuring vibrations
US4928527A (en) * 1988-04-29 1990-05-29 At&T Bell Laboratories Method and device for nondestructive evaluation

Also Published As

Publication number Publication date
US5170219A (en) 1992-12-08

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