JPH0296725U - - Google Patents

Info

Publication number
JPH0296725U
JPH0296725U JP534789U JP534789U JPH0296725U JP H0296725 U JPH0296725 U JP H0296725U JP 534789 U JP534789 U JP 534789U JP 534789 U JP534789 U JP 534789U JP H0296725 U JPH0296725 U JP H0296725U
Authority
JP
Japan
Prior art keywords
vapor phase
reactor
phase growth
rotor
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP534789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0715131Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989005347U priority Critical patent/JPH0715131Y2/ja
Publication of JPH0296725U publication Critical patent/JPH0296725U/ja
Application granted granted Critical
Publication of JPH0715131Y2 publication Critical patent/JPH0715131Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989005347U 1989-01-20 1989-01-20 有機金属気相成長装置 Expired - Lifetime JPH0715131Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989005347U JPH0715131Y2 (ja) 1989-01-20 1989-01-20 有機金属気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989005347U JPH0715131Y2 (ja) 1989-01-20 1989-01-20 有機金属気相成長装置

Publications (2)

Publication Number Publication Date
JPH0296725U true JPH0296725U (enExample) 1990-08-01
JPH0715131Y2 JPH0715131Y2 (ja) 1995-04-10

Family

ID=31208645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989005347U Expired - Lifetime JPH0715131Y2 (ja) 1989-01-20 1989-01-20 有機金属気相成長装置

Country Status (1)

Country Link
JP (1) JPH0715131Y2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534158A (en) * 1978-09-01 1980-03-10 Sony Corp Vacuum reaction apparatus
JPS63285924A (ja) * 1987-05-19 1988-11-22 Hitachi Ltd 半導体製造装置
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534158A (en) * 1978-09-01 1980-03-10 Sony Corp Vacuum reaction apparatus
JPS63285924A (ja) * 1987-05-19 1988-11-22 Hitachi Ltd 半導体製造装置
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法

Also Published As

Publication number Publication date
JPH0715131Y2 (ja) 1995-04-10

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