JPH0296722U - - Google Patents

Info

Publication number
JPH0296722U
JPH0296722U JP482389U JP482389U JPH0296722U JP H0296722 U JPH0296722 U JP H0296722U JP 482389 U JP482389 U JP 482389U JP 482389 U JP482389 U JP 482389U JP H0296722 U JPH0296722 U JP H0296722U
Authority
JP
Japan
Prior art keywords
inner tube
tube
outer tube
gas
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP482389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP482389U priority Critical patent/JPH0296722U/ja
Publication of JPH0296722U publication Critical patent/JPH0296722U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP482389U 1989-01-19 1989-01-19 Pending JPH0296722U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP482389U JPH0296722U (enrdf_load_stackoverflow) 1989-01-19 1989-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP482389U JPH0296722U (enrdf_load_stackoverflow) 1989-01-19 1989-01-19

Publications (1)

Publication Number Publication Date
JPH0296722U true JPH0296722U (enrdf_load_stackoverflow) 1990-08-01

Family

ID=31207677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP482389U Pending JPH0296722U (enrdf_load_stackoverflow) 1989-01-19 1989-01-19

Country Status (1)

Country Link
JP (1) JPH0296722U (enrdf_load_stackoverflow)

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