JPS63114025U - - Google Patents

Info

Publication number
JPS63114025U
JPS63114025U JP491287U JP491287U JPS63114025U JP S63114025 U JPS63114025 U JP S63114025U JP 491287 U JP491287 U JP 491287U JP 491287 U JP491287 U JP 491287U JP S63114025 U JPS63114025 U JP S63114025U
Authority
JP
Japan
Prior art keywords
diffusion material
liquid diffusion
bubbling
inert gas
trumpet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP491287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP491287U priority Critical patent/JPS63114025U/ja
Publication of JPS63114025U publication Critical patent/JPS63114025U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP491287U 1987-01-19 1987-01-19 Pending JPS63114025U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP491287U JPS63114025U (enrdf_load_stackoverflow) 1987-01-19 1987-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP491287U JPS63114025U (enrdf_load_stackoverflow) 1987-01-19 1987-01-19

Publications (1)

Publication Number Publication Date
JPS63114025U true JPS63114025U (enrdf_load_stackoverflow) 1988-07-22

Family

ID=30786015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP491287U Pending JPS63114025U (enrdf_load_stackoverflow) 1987-01-19 1987-01-19

Country Status (1)

Country Link
JP (1) JPS63114025U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0878351A (ja) * 1994-08-31 1996-03-22 Nec Kyushu Ltd ガス供給装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0878351A (ja) * 1994-08-31 1996-03-22 Nec Kyushu Ltd ガス供給装置

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