JPH01156541U - - Google Patents

Info

Publication number
JPH01156541U
JPH01156541U JP5498588U JP5498588U JPH01156541U JP H01156541 U JPH01156541 U JP H01156541U JP 5498588 U JP5498588 U JP 5498588U JP 5498588 U JP5498588 U JP 5498588U JP H01156541 U JPH01156541 U JP H01156541U
Authority
JP
Japan
Prior art keywords
organic film
gas
chemical solution
substrate
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5498588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5498588U priority Critical patent/JPH01156541U/ja
Publication of JPH01156541U publication Critical patent/JPH01156541U/ja
Pending legal-status Critical Current

Links

JP5498588U 1988-04-21 1988-04-21 Pending JPH01156541U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5498588U JPH01156541U (enrdf_load_stackoverflow) 1988-04-21 1988-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5498588U JPH01156541U (enrdf_load_stackoverflow) 1988-04-21 1988-04-21

Publications (1)

Publication Number Publication Date
JPH01156541U true JPH01156541U (enrdf_load_stackoverflow) 1989-10-27

Family

ID=31280893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5498588U Pending JPH01156541U (enrdf_load_stackoverflow) 1988-04-21 1988-04-21

Country Status (1)

Country Link
JP (1) JPH01156541U (enrdf_load_stackoverflow)

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