JPH029426U - - Google Patents
Info
- Publication number
- JPH029426U JPH029426U JP8706688U JP8706688U JPH029426U JP H029426 U JPH029426 U JP H029426U JP 8706688 U JP8706688 U JP 8706688U JP 8706688 U JP8706688 U JP 8706688U JP H029426 U JPH029426 U JP H029426U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- wafers
- grooves
- holes
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 claims description 11
- 239000012779 reinforcing material Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000003466 welding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8706688U JPH029426U (pt) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8706688U JPH029426U (pt) | 1988-06-30 | 1988-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029426U true JPH029426U (pt) | 1990-01-22 |
Family
ID=31311700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8706688U Pending JPH029426U (pt) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029426U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970030251A (ko) * | 1995-11-30 | 1997-06-26 | 김광호 | 반도체장치 제조용 확산로의 배플 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS60189930A (ja) * | 1984-03-12 | 1985-09-27 | Toshiba Ceramics Co Ltd | ウエハ−保持装置 |
| JPS6245826B2 (pt) * | 1979-04-17 | 1987-09-29 | Seikoo Epuson Kk |
-
1988
- 1988-06-30 JP JP8706688U patent/JPH029426U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS6245826B2 (pt) * | 1979-04-17 | 1987-09-29 | Seikoo Epuson Kk | |
| JPS60189930A (ja) * | 1984-03-12 | 1985-09-27 | Toshiba Ceramics Co Ltd | ウエハ−保持装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970030251A (ko) * | 1995-11-30 | 1997-06-26 | 김광호 | 반도체장치 제조용 확산로의 배플 |