JPH0267644U - - Google Patents
Info
- Publication number
- JPH0267644U JPH0267644U JP14678188U JP14678188U JPH0267644U JP H0267644 U JPH0267644 U JP H0267644U JP 14678188 U JP14678188 U JP 14678188U JP 14678188 U JP14678188 U JP 14678188U JP H0267644 U JPH0267644 U JP H0267644U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- support
- support columns
- pedestal
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 239000012050 conventional carrier Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14678188U JPH0648850Y2 (ja) | 1988-11-09 | 1988-11-09 | キャリヤピッチ変換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14678188U JPH0648850Y2 (ja) | 1988-11-09 | 1988-11-09 | キャリヤピッチ変換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0267644U true JPH0267644U (pt) | 1990-05-22 |
| JPH0648850Y2 JPH0648850Y2 (ja) | 1994-12-12 |
Family
ID=31416589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14678188U Expired - Lifetime JPH0648850Y2 (ja) | 1988-11-09 | 1988-11-09 | キャリヤピッチ変換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648850Y2 (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0528041U (ja) * | 1991-09-20 | 1993-04-09 | 東京応化工業株式会社 | 縦型ウエハー処理装置のウエハー移載機構 |
| JPH0634251U (ja) * | 1992-10-13 | 1994-05-06 | 株式会社ディスコエンジニアリングサービス | フレーム挿入補助治具 |
-
1988
- 1988-11-09 JP JP14678188U patent/JPH0648850Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0528041U (ja) * | 1991-09-20 | 1993-04-09 | 東京応化工業株式会社 | 縦型ウエハー処理装置のウエハー移載機構 |
| JPH0634251U (ja) * | 1992-10-13 | 1994-05-06 | 株式会社ディスコエンジニアリングサービス | フレーム挿入補助治具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648850Y2 (ja) | 1994-12-12 |