JPS61199037U - - Google Patents
Info
- Publication number
- JPS61199037U JPS61199037U JP8311485U JP8311485U JPS61199037U JP S61199037 U JPS61199037 U JP S61199037U JP 8311485 U JP8311485 U JP 8311485U JP 8311485 U JP8311485 U JP 8311485U JP S61199037 U JPS61199037 U JP S61199037U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- cylindrical
- cylindrical boat
- heat
- resistant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8311485U JPS61199037U (pt) | 1985-05-31 | 1985-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8311485U JPS61199037U (pt) | 1985-05-31 | 1985-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199037U true JPS61199037U (pt) | 1986-12-12 |
Family
ID=30631446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8311485U Pending JPS61199037U (pt) | 1985-05-31 | 1985-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199037U (pt) |
-
1985
- 1985-05-31 JP JP8311485U patent/JPS61199037U/ja active Pending