JPH0291993U - - Google Patents
Info
- Publication number
- JPH0291993U JPH0291993U JP17094488U JP17094488U JPH0291993U JP H0291993 U JPH0291993 U JP H0291993U JP 17094488 U JP17094488 U JP 17094488U JP 17094488 U JP17094488 U JP 17094488U JP H0291993 U JPH0291993 U JP H0291993U
- Authority
- JP
- Japan
- Prior art keywords
- moving
- piezoelectric element
- lifting table
- clamper
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008602 contraction Effects 0.000 claims 1
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17094488U JPH0291993U (enExample) | 1988-12-29 | 1988-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17094488U JPH0291993U (enExample) | 1988-12-29 | 1988-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0291993U true JPH0291993U (enExample) | 1990-07-20 |
Family
ID=31462330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17094488U Pending JPH0291993U (enExample) | 1988-12-29 | 1988-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0291993U (enExample) |
-
1988
- 1988-12-29 JP JP17094488U patent/JPH0291993U/ja active Pending
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