JPH0289413U - - Google Patents

Info

Publication number
JPH0289413U
JPH0289413U JP16918088U JP16918088U JPH0289413U JP H0289413 U JPH0289413 U JP H0289413U JP 16918088 U JP16918088 U JP 16918088U JP 16918088 U JP16918088 U JP 16918088U JP H0289413 U JPH0289413 U JP H0289413U
Authority
JP
Japan
Prior art keywords
sample surface
objective lens
control signal
control
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16918088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16918088U priority Critical patent/JPH0289413U/ja
Publication of JPH0289413U publication Critical patent/JPH0289413U/ja
Pending legal-status Critical Current

Links

JP16918088U 1988-12-28 1988-12-28 Pending JPH0289413U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16918088U JPH0289413U (ko) 1988-12-28 1988-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16918088U JPH0289413U (ko) 1988-12-28 1988-12-28

Publications (1)

Publication Number Publication Date
JPH0289413U true JPH0289413U (ko) 1990-07-16

Family

ID=31459007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16918088U Pending JPH0289413U (ko) 1988-12-28 1988-12-28

Country Status (1)

Country Link
JP (1) JPH0289413U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009086641A (ja) * 2007-07-18 2009-04-23 Asml Netherlands Bv 検査方法および装置、リソグラフィ装置、リソグラフィ処理セル、デバイス製造方法および距離測定システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009086641A (ja) * 2007-07-18 2009-04-23 Asml Netherlands Bv 検査方法および装置、リソグラフィ装置、リソグラフィ処理セル、デバイス製造方法および距離測定システム
JP4611407B2 (ja) * 2007-07-18 2011-01-12 エーエスエムエル ネザーランズ ビー．ブイ． 検査装置および方法、リソグラフィ装置、リソグラフィ処理セル、並びにデバイス製造方法

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