JPH0287322A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0287322A JPH0287322A JP63237958A JP23795888A JPH0287322A JP H0287322 A JPH0287322 A JP H0287322A JP 63237958 A JP63237958 A JP 63237958A JP 23795888 A JP23795888 A JP 23795888A JP H0287322 A JPH0287322 A JP H0287322A
- Authority
- JP
- Japan
- Prior art keywords
- film
- lubricant
- protective film
- carbon
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 23
- 239000000314 lubricant Substances 0.000 claims abstract description 23
- 230000001681 protective effect Effects 0.000 claims abstract description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000001257 hydrogen Substances 0.000 claims abstract description 14
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 150000001721 carbon Chemical class 0.000 abstract description 15
- 229910052751 metal Inorganic materials 0.000 abstract description 9
- 239000002184 metal Substances 0.000 abstract description 9
- 239000011651 chromium Substances 0.000 abstract description 6
- 238000010521 absorption reaction Methods 0.000 abstract description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052804 chromium Inorganic materials 0.000 abstract description 3
- 230000007423 decrease Effects 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 2
- 239000011241 protective layer Substances 0.000 abstract description 2
- 230000001050 lubricating effect Effects 0.000 abstract 1
- 238000006748 scratching Methods 0.000 abstract 1
- 230000002393 scratching effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 43
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 239000010687 lubricating oil Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 2
- 229920000570 polyether Polymers 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000005345 chemically strengthened glass Substances 0.000 description 1
- SZMZREIADCOWQA-UHFFFAOYSA-N chromium cobalt nickel Chemical compound [Cr].[Co].[Ni] SZMZREIADCOWQA-UHFFFAOYSA-N 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
- Carbon And Carbon Compounds (AREA)
- Paints Or Removers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、磁気ディスク装置などの磁気記録装置に用い
られる磁気記録媒体に間し、特に耐久性が向上された磁
気記録媒体に間する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a magnetic recording medium used in a magnetic recording device such as a magnetic disk device, and particularly to a magnetic recording medium with improved durability.
［従来の技術］
ハード磁気ディスク等の高密度記録を行う磁気記録媒体
に於ては、従来の磁性粉とバインダを含む塗布型の磁性
膜を用いた塗布型媒体に変わって、めっき、スパッタ、
蒸着等の方法により形成される金属磁性薄膜媒体が使用
されてきている。[Prior Art] In magnetic recording media that perform high-density recording such as hard magnetic disks, plating, sputtering,
Metal magnetic thin film media formed by methods such as vapor deposition have been used.
ハード磁気ディスクに対して、記録再生を行う場合には
、ディスクに所定の回転を与えることによって磁気ヘッ
ドと磁気ディスクとの間に微少な空気層を形成し、この
状態で記録再生を行うＣ８Ｓ方式（コンタクト・スター
ト・ストップ方式）を用０るのが一般的である。When recording and reproducing data on a hard magnetic disk, the C8S method creates a minute air layer between the magnetic head and the magnetic disk by applying a predetermined rotation to the disk, and performs recording and reproducing in this state. (contact start-stop method) is generally used.
Ｃ８Ｓ方式では、停止状態ではヘットと磁気ディスク面
とは物理的に接触しており、回転開始時や回転終了時に
おけるヘッドと磁気ディスクは接触摩凛状態で相対運動
をする。このときの摩擦力によりヘッド及び磁気ディス
ク面の摩耗が進行〜する。また、記録再生中に微少な塵
なとの存在によりヘッドが高速で磁気ディスク面と接触
しヘットと磁気ディスク面との間に大きな摩擦力が働い
てヘッドや磁性膜が破壊されることがある。In the C8S system, the head and the magnetic disk surface are in physical contact in the stopped state, and the head and the magnetic disk move relative to each other in a state of contact at the start and end of rotation. The frictional force at this time progresses wear on the head and magnetic disk surface. Additionally, the presence of minute dust during recording and playback may cause the head to come into contact with the magnetic disk surface at high speed, creating a large frictional force between the head and the magnetic disk surface, which may destroy the head and magnetic film. .
特に金属磁性薄膜媒体においては、金属磁性膜のＲ擦係
数が大きく、膜厚も小さいために上記の問題が顕著であ
る。そこで従来金属磁性膜の上部に耐腐食性と潤滑性を
持たせるため炭素保護膜を形成したり、炭素保護膜の上
部に液体の潤滑剤を塗布した磁気記録媒体が用いられて
いたく例えば特開昭６ｌ−２０８６２０）、 またこ
の液体潤滑剤として官能基を有するものを用いることに
より炭素膜との結合力を上げることが試みられている（
特開昭６２−６６４１７）。Particularly in metal magnetic thin film media, the above-mentioned problem is noticeable because the metal magnetic film has a large R friction coefficient and a small film thickness. Conventionally, magnetic recording media have been used in which a carbon protective film is formed on top of a metal magnetic film to provide corrosion resistance and lubricity, or a liquid lubricant is applied on top of the carbon protective film. 1986-208620), attempts have also been made to increase the bonding strength with the carbon film by using a liquid lubricant with functional groups (
Japanese Patent Publication No. 62-66417).
［発明が解決しようとする課題］
しかしながら従来の磁気記録媒体においては、炭素膜と
潤滑剤の結合が弱いためにＣ８Ｓを繰り返すと次第に潤
滑剤の効果が低減しＲＷＩ力が増加して、十分な耐摩耗
性、耐損傷性は得られていなかった。さらに官能基を有
する潤滑剤を塗布した場合には潤滑オイル間の結合も増
すためヘッドの走行性が悪化すると言う問題点があった
。[Problems to be Solved by the Invention] However, in conventional magnetic recording media, the bond between the carbon film and the lubricant is weak, so when C8S is repeated, the effect of the lubricant gradually decreases and the RWI force increases, making it impossible to obtain sufficient Abrasion resistance and damage resistance were not obtained. Furthermore, when a lubricant having a functional group is applied, the bonding between the lubricating oils increases, resulting in a problem in that the runnability of the head deteriorates.
［課題を解決するための手段］
上記従来の問題点を解決するために、本発明は基板上に
形成された磁気記録層の表面に耐久性を向上させるため
の炭素保！Ｊ！膜が形成され、該炭素保護膜上に潤滑剤
が塗布されている磁気記録媒体において、該炭素保護膜
に水素を含ませている。[Means for Solving the Problems] In order to solve the above-mentioned conventional problems, the present invention provides a carbon-retaining film for improving durability on the surface of a magnetic recording layer formed on a substrate. J! In a magnetic recording medium in which a film is formed and a lubricant is applied on the carbon protective film, the carbon protective film contains hydrogen.
該炭素保護膜の水素は、あまり少ないと本発明の効果が
あられれにくく、またあまり多いと製造しにくくなる。If the carbon protective film contains too little hydrogen, the effect of the present invention will not be achieved, and if it contains too much hydrogen, it will be difficult to manufacture.
水素化炭素膜中の水素量は、被膜の、波数２９００ｃ＋
ｗ−’付近（Ｃ−Ｈ結合の伸縮振動）の吸収を測定した
際、１００〜ｌｏｏＯｃｍ−’の吸収係数となるものが
好ましい。The amount of hydrogen in the hydrogenated carbon film is the wave number 2900c+ of the film.
When absorption near w-' (stretching vibration of C-H bond) is measured, it is preferable to have an absorption coefficient of 100 to looOcm-'.
本発明においては、炭素膜中に水素が含まれていること
によって潤滑剤との界面エネルギーが減少し潤滑剤と炭
素膜の付着力が増加し、長期間にわたって潤滑剤の効力
が持続すると考えられる。In the present invention, it is believed that the inclusion of hydrogen in the carbon film reduces the interfacial energy with the lubricant and increases the adhesion between the lubricant and the carbon film, thereby maintaining the effectiveness of the lubricant over a long period of time. .
該水素化炭素膜は、例えばアルゴンガスに水素ガスを０
．５Ｖｏ１％〜５０Ｖｏ１％混入した雰囲気中で炭素を
マグネトロンスパッタし、飛散する炭素を基板上に析出
させる方法（マグネトロンスパッタ法）により形成でき
る。マグネトロンスパッタリング法を用いることにより
ガスのイオン化率を高め、効率よく炭素膜中に水素を取
り込むことが出来る。The hydrogenated carbon film is made by adding zero hydrogen gas to argon gas, for example.
．． It can be formed by magnetron sputtering carbon in an atmosphere containing 1% 5Vo to 1% 50Vo, and depositing the scattered carbon on the substrate (magnetron sputtering method). By using the magnetron sputtering method, it is possible to increase the ionization rate of the gas and efficiently incorporate hydrogen into the carbon film.
このとき０゜５ｖ０１％以下の水素ガス濃度では十分な
潤滑剤との付着力は得られない、また、５０Ｖｏ１％以
上の水素ガス濃度では水素化炭素膜の硬度が減少し保護
膜として十分な耐久性を示さない。また水素と炭素の十
分な反応性と、硬度を確保するためにスパッタリング時
の全圧力は３Ｐａ以下にすることが必要であり、特にｌ
Ｐａ以下が望ましい。At this time, if the hydrogen gas concentration is less than 0°5V01%, sufficient adhesion with the lubricant cannot be obtained, and if the hydrogen gas concentration is more than 50Vo1%, the hardness of the hydrogenated carbon film decreases and it cannot be sufficiently durable as a protective film. Does not show gender. In addition, in order to ensure sufficient reactivity between hydrogen and carbon and hardness, the total pressure during sputtering must be 3 Pa or less, especially l
Desirably, it is less than Pa.
潤滑剤としてはパーフルオロアルキルポリエーテルが好
ましく用いられ、良好なヘッドの走行性と水素化炭素膜
への強い結合力を示し優れた潤滑性と耐久性を発現する
。Perfluoroalkyl polyether is preferably used as the lubricant, and exhibits good head running properties and strong bonding strength to the hydrogenated carbon film, resulting in excellent lubricity and durability.
この潤滑剤は、例えば溶剤等で希釈され、塗布法、スピ
ンコード法、ディッピング法などの方法で水素化炭素保
護膜まで形成した磁気ディスクにコートされる。This lubricant is diluted with a solvent, for example, and coated on a magnetic disk on which a hydrogenated carbon protective film is formed by a coating method, a spin-coating method, a dipping method, or the like.
この潤滑剤を塗布した磁気記録媒体は、６０℃〜２００
℃の温度範囲に一旦保持されることが好ましい。Magnetic recording media coated with this lubricant can be heated at temperatures between 60°C and 200°C.
It is preferable that the temperature is once maintained in the temperature range of .degree.
この６０℃〜２００℃の範囲での熱処理は、潤滑剤の水
素化炭素膜への付着力の増加の効果を著しく促進する。This heat treatment in the range of 60° C. to 200° C. significantly promotes the effect of increasing the adhesion of the lubricant to the hydrogenated carbon film.
［作用］
本発明によれば、金属磁性薄膜上に形成されている炭素
保護膜中に水素が含まれているため、炭素保護膜と潤滑
剤との界面エネルギーが減少し、結果として炭素保護膜
と潤滑剤との結合が強くなど考えられる。[Function] According to the present invention, since hydrogen is contained in the carbon protective film formed on the metal magnetic thin film, the interfacial energy between the carbon protective film and the lubricant is reduced, and as a result, the carbon protective film It is thought that the bond between the lubricant and the lubricant is strong.
［実施例］ 以下、実施例により本発明の詳細な説明する。[Example] Hereinafter, the present invention will be explained in detail with reference to Examples.
第１図は本発明の磁気記録媒体の構成を示す断面図であ
る。化学強化が施されたガラス円！！、’ｌ ｌ上に下
地層としてクロム（Ｃｒ）膜２を成膜し、この上に金属
磁性層としてコバルト−ニッケルークロム（Ｃｏ−Ｎｉ
−Ｃｒ）合金［ＩＩ３を約５０ ｎ ｒｎの厚さに成膜
する。この場合該下地膜、金属磁性膜はスパッタリング
法を用いて該ガラス基板上に成膜される。更にその上に
保護層として水素化炭素膜４を約４０ｎｍ成股する０本
実施例ではマグネトロンスパッタリング法により、ガス
圧ｌＰａ５ 電力密瓜１．５Ｗ／ｃｍ２の条件で成膜
されており、このときアルゴン雰囲気ガス中には１ＯＶ
ｏ１％の水素ガスが混入されている。FIG. 1 is a sectional view showing the structure of the magnetic recording medium of the present invention. A chemically strengthened glass circle! ! A chromium (Cr) film 2 is formed as a base layer on the chromium (Cr) film 2, and a cobalt-nickel-chromium (Co-Ni) film is formed on this as a metal magnetic layer.
-Cr) alloy [II3 is deposited to a thickness of about 50 nm. In this case, the base film and the metal magnetic film are formed on the glass substrate using a sputtering method. Furthermore, a hydrogenated carbon film 4 of approximately 40 nm is deposited as a protective layer on top of it. In this example, the film is formed by magnetron sputtering under the conditions of gas pressure 1Pa5 and electric power 1.5W/cm2. 1OV in argon atmosphere gas
o1% hydrogen gas is mixed.
この様に作製された水素化炭素膜の赤外吸収スペクトル
を第２図に示す、波数２９００ｃ’ｍ−’付近に４６２
ｃｍ−’の吸収係数のＣ−Ｈ結合の伸縮振動がみられ、
膜中に水素が存在していることが分かる。Figure 2 shows the infrared absorption spectrum of the hydrogenated carbon film prepared in this way.
A stretching vibration of the C-H bond with an absorption coefficient of cm-' is observed,
It can be seen that hydrogen exists in the film.
次に、この上に潤滑剤としてパーフロロアルキルポリエ
ーテル（Ｆｏｍｂ ｌ ｉ ｎ ＡＭ２００１）を溶
媒トリクロロトリフロロエタンで０．５％に希釈したも
のをディッピング法により塗布し１１０℃で５分間放置
した。Next, as a lubricant, perfluoroalkyl polyether (Fomblin AM2001) diluted to 0.5% with the solvent trichlorotrifluoroethane was applied by dipping and left at 110° C. for 5 minutes.
ここで潤滑剤塗布後に加える熱処理は、水素化炭素保護
膜と潤滑剤の反応性を高めるためのものである。The heat treatment applied after applying the lubricant is intended to increase the reactivity between the hydrogenated carbon protective film and the lubricant.
またディスクを３６００ｒｐｍの速度で高速回転させヘ
ッドの離発着を繰り返す試験（Ｃ８Ｓ試験）にかけた結
果を第３図に示す０通常の炭素保護膜上に潤滑剤を塗布
したディスクでは２０００回でディスク表面に摩耗痕の
発生がみられ、Ｕ摩擦係数値も増大したが、本発明のデ
ィスクでは２００００回の試験後もディスク表面に何等
以上はみられず、動摩擦系数値の増加もわずかであった
。Figure 3 shows the results of a test (C8S test) in which the disk was rotated at a high speed of 3,600 rpm and the head was repeatedly taken off and landed. Although wear marks were observed and the U friction coefficient value increased, in the case of the disk of the present invention, no such marks were observed on the disk surface even after 20,000 tests, and the dynamic friction value increased only slightly.
上記実施例においては、炭素保護膜をすべて水素化炭素
としているが、本発明は上記に限らず表面が水素化炭素
となっていれば、通常の炭素保護膜表面を水素化炭素と
する構造等、任意の形状で実施できる。In the above embodiments, all the carbon protective films are made of hydrogenated carbon, but the present invention is not limited to the above, and as long as the surface is made of hydrogenated carbon, the present invention can be applied to a structure in which the surface of a normal carbon protective film is made of hydrogenated carbon, etc. , can be implemented in any shape.
［発明の効果コ
この様に本発明においては金属磁性体上に形成された炭
素保護膜に水素が含まれていることにより潤滑剤の付着
力が大幅に向上し、潤滑性、耐摩耗性に優れた磁気記録
媒体が得られる。[Effects of the invention] In this way, in the present invention, the adhesion of the lubricant is greatly improved due to the hydrogen contained in the carbon protective film formed on the metal magnetic material, resulting in improved lubricity and wear resistance. An excellent magnetic recording medium can be obtained.
第１図は本発明の磁気記録媒体の概略を示す断面図、第
２図は本発明の水素化炭素膜の赤外吸収スペクトルを示
す図、第３図はＣ８Ｓ試験回数に対する動摩擦係数の変
化を示す図で、実線は本発明のディスクに対する結果で
あり、鎖線は保護膜に従来の炭素膜を用いたディスクの
試験結果である。
波 数（ｃｍ−１）
第２図
第１図
Ｃ５Ｓ回数（ａｒｂ、ｕｎｉｔ）
第３図Figure 1 is a cross-sectional view schematically showing the magnetic recording medium of the present invention, Figure 2 is a diagram showing the infrared absorption spectrum of the hydrogenated carbon film of the present invention, and Figure 3 is a diagram showing the change in the coefficient of kinetic friction with respect to the number of C8S tests. In the figure, the solid line is the test result for the disk of the present invention, and the chain line is the test result for the disk using the conventional carbon film as the protective film. Wave number (cm-1) Fig. 2 Fig. 1 C5S number (arb, unit) Fig. 3
Claims (1)
向上させるための炭素保護膜が形成され、該炭素保護膜
上に潤滑剤が塗布されている磁気記録媒体において、該
炭素保護膜に水素を含ませることを特徴とする磁気記録
媒体。(1) A magnetic recording medium in which a carbon protective film is formed on the surface of a magnetic recording layer formed on a substrate to improve durability, and a lubricant is coated on the carbon protective film. A magnetic recording medium characterized by a film containing hydrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63237958A JP2712373B2 (en) | 1988-09-22 | 1988-09-22 | Magnetic recording medium and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63237958A JP2712373B2 (en) | 1988-09-22 | 1988-09-22 | Magnetic recording medium and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0287322A true JPH0287322A (en) | 1990-03-28 |
| JP2712373B2 JP2712373B2 (en) | 1998-02-10 |
Family
ID=17022987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63237958A Expired - Lifetime JP2712373B2 (en) | 1988-09-22 | 1988-09-22 | Magnetic recording medium and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2712373B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4956032A (en) * | 1988-04-28 | 1990-09-11 | Keller Industries Ltd. | Method of grouting using a vacuum |
| EP0643385A2 (en) * | 1993-09-12 | 1995-03-15 | Fujitsu Limited | Magnetic recording medium, magnetic head and magnetic recording apparatus |
| US5607783A (en) * | 1993-06-08 | 1997-03-04 | Fuji Electric Co., Ltd. | Magnetic recording medium and method for fabricating the same |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63136316A (en) * | 1986-11-28 | 1988-06-08 | Hitachi Ltd | Magnetic recording body |
| JPS63205813A (en) * | 1987-02-23 | 1988-08-25 | Hitachi Ltd | Magnetic recording medium |
| JPS63251920A (en) * | 1987-04-08 | 1988-10-19 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
| JPH01245416A (en) * | 1988-03-28 | 1989-09-29 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
-
1988
- 1988-09-22 JP JP63237958A patent/JP2712373B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63136316A (en) * | 1986-11-28 | 1988-06-08 | Hitachi Ltd | Magnetic recording body |
| JPS63205813A (en) * | 1987-02-23 | 1988-08-25 | Hitachi Ltd | Magnetic recording medium |
| JPS63251920A (en) * | 1987-04-08 | 1988-10-19 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
| JPH01245416A (en) * | 1988-03-28 | 1989-09-29 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4956032A (en) * | 1988-04-28 | 1990-09-11 | Keller Industries Ltd. | Method of grouting using a vacuum |
| US5607783A (en) * | 1993-06-08 | 1997-03-04 | Fuji Electric Co., Ltd. | Magnetic recording medium and method for fabricating the same |
| EP0643385A2 (en) * | 1993-09-12 | 1995-03-15 | Fujitsu Limited | Magnetic recording medium, magnetic head and magnetic recording apparatus |
| EP0643385A3 (en) * | 1993-09-12 | 1996-01-17 | Fujitsu Ltd | Magnetic recording medium, magnetic head and magnetic recording apparatus. |
| US6132875A (en) * | 1993-09-12 | 2000-10-17 | Fujitsu Limited | Magnetic recording medium and magnetic head having carbon protective layers |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2712373B2 (en) | 1998-02-10 |
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