JPH02815B2 - - Google Patents
Info
- Publication number
- JPH02815B2 JPH02815B2 JP60254763A JP25476385A JPH02815B2 JP H02815 B2 JPH02815 B2 JP H02815B2 JP 60254763 A JP60254763 A JP 60254763A JP 25476385 A JP25476385 A JP 25476385A JP H02815 B2 JPH02815 B2 JP H02815B2
- Authority
- JP
- Japan
- Prior art keywords
- ionized
- ion source
- anode
- needle
- liquid metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 claims description 23
- 239000000126 substance Substances 0.000 claims description 17
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 1
- 239000000284 extract Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 6
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- -1 gold ions Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60254763A JPS61116733A (ja) | 1985-11-15 | 1985-11-15 | 液体金属イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60254763A JPS61116733A (ja) | 1985-11-15 | 1985-11-15 | 液体金属イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116733A JPS61116733A (ja) | 1986-06-04 |
| JPH02815B2 true JPH02815B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-01-09 |
Family
ID=17269541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60254763A Granted JPS61116733A (ja) | 1985-11-15 | 1985-11-15 | 液体金属イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61116733A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1985
- 1985-11-15 JP JP60254763A patent/JPS61116733A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61116733A (ja) | 1986-06-04 |