JPH0276835U - - Google Patents

Info

Publication number
JPH0276835U
JPH0276835U JP1988156678U JP15667888U JPH0276835U JP H0276835 U JPH0276835 U JP H0276835U JP 1988156678 U JP1988156678 U JP 1988156678U JP 15667888 U JP15667888 U JP 15667888U JP H0276835 U JPH0276835 U JP H0276835U
Authority
JP
Japan
Prior art keywords
susceptor
transparent quartz
quartz tube
semiconductor wafer
radiation thermometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988156678U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0739228Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988156678U priority Critical patent/JPH0739228Y2/ja
Publication of JPH0276835U publication Critical patent/JPH0276835U/ja
Application granted granted Critical
Publication of JPH0739228Y2 publication Critical patent/JPH0739228Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Radiation Pyrometers (AREA)
JP1988156678U 1988-12-02 1988-12-02 光加熱処理装置 Expired - Lifetime JPH0739228Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988156678U JPH0739228Y2 (ja) 1988-12-02 1988-12-02 光加熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988156678U JPH0739228Y2 (ja) 1988-12-02 1988-12-02 光加熱処理装置

Publications (2)

Publication Number Publication Date
JPH0276835U true JPH0276835U (enExample) 1990-06-13
JPH0739228Y2 JPH0739228Y2 (ja) 1995-09-06

Family

ID=31435431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988156678U Expired - Lifetime JPH0739228Y2 (ja) 1988-12-02 1988-12-02 光加熱処理装置

Country Status (1)

Country Link
JP (1) JPH0739228Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014220331A (ja) * 2013-05-07 2014-11-20 株式会社リコー 電磁波照射装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211947A (ja) * 1984-04-06 1985-10-24 Hitachi Ltd 瞬間アニ−ル装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211947A (ja) * 1984-04-06 1985-10-24 Hitachi Ltd 瞬間アニ−ル装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014220331A (ja) * 2013-05-07 2014-11-20 株式会社リコー 電磁波照射装置

Also Published As

Publication number Publication date
JPH0739228Y2 (ja) 1995-09-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term