JPH027647Y2 - - Google Patents
Info
- Publication number
- JPH027647Y2 JPH027647Y2 JP11215484U JP11215484U JPH027647Y2 JP H027647 Y2 JPH027647 Y2 JP H027647Y2 JP 11215484 U JP11215484 U JP 11215484U JP 11215484 U JP11215484 U JP 11215484U JP H027647 Y2 JPH027647 Y2 JP H027647Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- plasma
- workpiece
- processing apparatus
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002347 injection Methods 0.000 claims description 10
- 239000007924 injection Substances 0.000 claims description 10
- 238000009832 plasma treatment Methods 0.000 claims description 9
- 229920003002 synthetic resin Polymers 0.000 claims description 4
- 239000000057 synthetic resin Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11215484U JPS6125974U (ja) | 1984-07-23 | 1984-07-23 | プラズマ処理装置 |
| DE19853520924 DE3520924A1 (de) | 1984-06-12 | 1985-06-11 | Plasmaverfahrensanlage |
| CA000483614A CA1249926A (en) | 1984-06-12 | 1985-06-11 | Plasma processing apparatus |
| US06/744,061 US4668479A (en) | 1984-06-12 | 1985-06-12 | Plasma processing apparatus |
| AU43492/85A AU565026B2 (en) | 1984-06-12 | 1985-06-12 | Plasma processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11215484U JPS6125974U (ja) | 1984-07-23 | 1984-07-23 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6125974U JPS6125974U (ja) | 1986-02-15 |
| JPH027647Y2 true JPH027647Y2 (sv) | 1990-02-23 |
Family
ID=30671221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11215484U Granted JPS6125974U (ja) | 1984-06-12 | 1984-07-23 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6125974U (sv) |
-
1984
- 1984-07-23 JP JP11215484U patent/JPS6125974U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6125974U (ja) | 1986-02-15 |
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