JPH027506B2 - - Google Patents

Info

Publication number
JPH027506B2
JPH027506B2 JP59007016A JP701684A JPH027506B2 JP H027506 B2 JPH027506 B2 JP H027506B2 JP 59007016 A JP59007016 A JP 59007016A JP 701684 A JP701684 A JP 701684A JP H027506 B2 JPH027506 B2 JP H027506B2
Authority
JP
Japan
Prior art keywords
scanning
electron beam
objective lens
coil
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59007016A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60151946A (ja
Inventor
Shigetomo Yamazaki
Takashi Kimura
Junichi Tsukajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP59007016A priority Critical patent/JPS60151946A/ja
Publication of JPS60151946A publication Critical patent/JPS60151946A/ja
Publication of JPH027506B2 publication Critical patent/JPH027506B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59007016A 1984-01-20 1984-01-20 走査型電子線装置 Granted JPS60151946A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59007016A JPS60151946A (ja) 1984-01-20 1984-01-20 走査型電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59007016A JPS60151946A (ja) 1984-01-20 1984-01-20 走査型電子線装置

Publications (2)

Publication Number Publication Date
JPS60151946A JPS60151946A (ja) 1985-08-10
JPH027506B2 true JPH027506B2 (pm) 1990-02-19

Family

ID=11654239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59007016A Granted JPS60151946A (ja) 1984-01-20 1984-01-20 走査型電子線装置

Country Status (1)

Country Link
JP (1) JPS60151946A (pm)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2647949B2 (ja) * 1989-02-17 1997-08-27 日本電子株式会社 走査型電子顕微鏡のアライメント装置
JPH11250850A (ja) 1998-03-02 1999-09-17 Hitachi Ltd 走査電子顕微鏡及び顕微方法並びに対話型入力装置

Also Published As

Publication number Publication date
JPS60151946A (ja) 1985-08-10

Similar Documents

Publication Publication Date Title
US4983832A (en) Scanning electron microscope
JP3932894B2 (ja) 電子線装置
JPH027506B2 (pm)
US7060985B2 (en) Multipole field-producing apparatus in charged-particle optical system and aberration corrector
JP3400608B2 (ja) 走査電子顕微鏡
US5258617A (en) Method and apparatus for correcting axial coma in electron microscopy
JP2000251823A (ja) 走査型荷電粒子ビーム装置における試料傾斜観察方法
JP2946857B2 (ja) 荷電粒子線装置
JP4221817B2 (ja) 投射型イオンビーム加工装置
JP2726538B2 (ja) 電子顕微鏡
JPH0479101B2 (pm)
JP3678910B2 (ja) 走査電子顕微鏡
JP2000077018A (ja) 走査電子顕微鏡の焦点合わせ装置
JPH03138841A (ja) 走査形電子顕微鏡
JPS5858779B2 (ja) 電子顕微鏡等用視野移動装置
JPS5914222B2 (ja) 走査電子顕微鏡等用倍率制御装置
JP3112541B2 (ja) 電子ビーム装置における非点補正方法
JPH0395841A (ja) 電子顕微鏡
JPS60243951A (ja) 電子線装置における軸合せ方法
JPS614146A (ja) 電子線装置
JP3453247B2 (ja) 走査電子顕微鏡およびその制御方法
JPH01189844A (ja) 荷電粒子線装置におけるビーム補正方式
JPS6329378B2 (pm)
JPH0320942A (ja) 走査電子顕微鏡
JPS6329379B2 (pm)