JPH0266019U - - Google Patents
Info
- Publication number
- JPH0266019U JPH0266019U JP14524588U JP14524588U JPH0266019U JP H0266019 U JPH0266019 U JP H0266019U JP 14524588 U JP14524588 U JP 14524588U JP 14524588 U JP14524588 U JP 14524588U JP H0266019 U JPH0266019 U JP H0266019U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric resonator
- disc
- spacer portion
- etching
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000004439 roughness measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Description
第１図は本考案に係わる圧電共振器の一実施例
を示す構成図で、イ図は断面構成図、ロ図はイ図
に用いられる外部プレートの平面図、第２図は本
考案の外部プレートの概略加工工程を示す図、第
３図は本考案により製作されたスペーサ部のあら
さ測定図、第４図イ〜ハは従来例を示す図、第５
図は従来の外部プレートの概略加工工程を示す図
、第６図は従来のスペーサ部のあらさ測定図であ
る。
２０……円板状振動子、２１，２２……外部プ
レート、２３，２４……薄膜電極、２５，２６…
…スペーサ部、２７……連結梁、２８……貫通孔
。
Fig. 1 is a configuration diagram showing an embodiment of the piezoelectric resonator according to the present invention, Fig. A is a cross-sectional configuration diagram, Fig. B is a plan view of the external plate used in Fig. A, and Fig. 2 is an external view of the piezoelectric resonator of the present invention. Figure 3 is a roughness measurement diagram of the spacer part manufactured according to the present invention; Figures 4A to 4C are diagrams showing the conventional example; Figure 5
The figure shows a schematic processing process for a conventional external plate, and FIG. 6 is a roughness measurement diagram of a conventional spacer part. 20... Disc-shaped vibrator, 21, 22... External plate, 23, 24... Thin film electrode, 25, 26...
...Spacer portion, 27...Connection beam, 28...Through hole.
Claims (1)
なる外部プレートの周縁のスペーサ部分を水晶の
エツチング加工により形成したことを特徴とする
圧電共振器。 A piezoelectric resonator characterized in that a spacer portion at the periphery of an outer plate made of a quartz substrate that holds a disc-shaped vibrator from both sides is formed by etching a quartz crystal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14524588U JPH0266019U (en) | 1988-11-07 | 1988-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14524588U JPH0266019U (en) | 1988-11-07 | 1988-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0266019U true JPH0266019U (en) | 1990-05-18 |
Family
ID=31413669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14524588U Pending JPH0266019U (en) | 1988-11-07 | 1988-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0266019U (en) |
-
1988
- 1988-11-07 JP JP14524588U patent/JPH0266019U/ja active Pending