JPH0265335U - - Google Patents
Info
- Publication number
- JPH0265335U JPH0265335U JP14549388U JP14549388U JPH0265335U JP H0265335 U JPH0265335 U JP H0265335U JP 14549388 U JP14549388 U JP 14549388U JP 14549388 U JP14549388 U JP 14549388U JP H0265335 U JPH0265335 U JP H0265335U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- tapered
- reaction tube
- wafer
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第1図は本考案の一実施例を示す断面図、第2
図は従来の横型化学気相成長装置を示す断面図で
ある。
1……テーパ反応管、2,22……反応用ガス
導入口、3,23……排気口、4,24……キヤ
ツプ、5,10,25,30……Oリング、6,
26……サセプタ、7,27……ウエハー、8,
28……ベース、9,29……サセプタ支持棒。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a sectional view showing a conventional horizontal chemical vapor deposition apparatus. 1... Tapered reaction tube, 2, 22... Reaction gas inlet, 3, 23... Exhaust port, 4, 24... Cap, 5, 10, 25, 30... O ring, 6,
26...Susceptor, 7, 27...Wafer, 8,
28... Base, 9, 29... Susceptor support rod.
Claims (1)
プタとのすき間が常に一定となる様に該サセプタ
の先端の位置でテーパ状に管径が変化しているテ
ーパ反応管と、該テーパ反応管の上流側に設けら
れた反応用ガス導入口と、前記テーパ反応管の下
流側に設けられた排気口とを含むことを特徴とす
る横型化学気相成長装置。 A table-shaped susceptor on which a wafer is placed, a tapered reaction tube whose diameter changes in a tapered manner at the tip of the susceptor so that the gap between the susceptor and the susceptor is always constant, and the tapered reaction tube. A horizontal chemical vapor deposition apparatus comprising a reaction gas inlet provided on the upstream side and an exhaust port provided on the downstream side of the tapered reaction tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14549388U JPH0265335U (en) | 1988-11-07 | 1988-11-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14549388U JPH0265335U (en) | 1988-11-07 | 1988-11-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0265335U true JPH0265335U (en) | 1990-05-16 |
Family
ID=31414134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14549388U Pending JPH0265335U (en) | 1988-11-07 | 1988-11-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0265335U (en) |
-
1988
- 1988-11-07 JP JP14549388U patent/JPH0265335U/ja active Pending