JPH0265135U - - Google Patents
Info
- Publication number
- JPH0265135U JPH0265135U JP14526188U JP14526188U JPH0265135U JP H0265135 U JPH0265135 U JP H0265135U JP 14526188 U JP14526188 U JP 14526188U JP 14526188 U JP14526188 U JP 14526188U JP H0265135 U JPH0265135 U JP H0265135U
- Authority
- JP
- Japan
- Prior art keywords
- wheatstone bridge
- pressure sensor
- diaphragm membrane
- gauge resistors
- bridge circuits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は、本考案に係る圧力センサの一実施例
におけるホイートストンブリツジの実装構造を示
す平面図である。第２図は、同ホイートストンブ
リツジの回路を示す回路構成図である。第３図は
、同実施例における信号処理回路を示すブロツク
図である。第４図Ａ，Ｂは、従来の半導体圧力セ
ンサの一例を示す平面図および縦断面図である。
１…（１１０）面型半導体基板、２…ダイヤフ
ラム膜、３…第１のホイートストンブリツジ、４
…第２のホイートストンブリツジ、５，６…差動
増幅器、７…加算器、Ｌ…膜面境界線、ａ，ｂ，
ｃ，ｄ…第１のホイートストンブリツジのゲージ
抵抗、ａ′，ｂ′，ｃ′，ｄ′…第２のホイート
ストンブリツジのゲージ抵抗、Ｖ０１，Ｖ０２…
不平衡電圧。
FIG. 1 is a plan view showing a mounting structure of a Wheatstone bridge in an embodiment of a pressure sensor according to the present invention. FIG. 2 is a circuit configuration diagram showing the circuit of the same Wheatstone bridge. FIG. 3 is a block diagram showing a signal processing circuit in the same embodiment. FIGS. 4A and 4B are a plan view and a longitudinal sectional view showing an example of a conventional semiconductor pressure sensor. DESCRIPTION OF SYMBOLS 1... (110) plane semiconductor substrate, 2... Diaphragm film, 3... First Wheatstone bridge, 4
...Second Wheatstone bridge, 5, 6...Differential amplifier, 7...Adder, L...Membrane surface boundary line, a, b,
c, d... Gauge resistance of the first Wheatstone bridge, a', b', c', d'... Gauge resistance of the second Wheatstone bridge, V 01 , V 02 ...
Unbalanced voltage.
Claims (1)
た複数のホイートストンブリツジ回路を有する圧
力センサであつて、複数のホイートストンブリツ
ジ回路の相対応する各ゲージ抵抗は該ダイヤフラ
ム膜上に近接配置されており、各ホイートストン
ブリツジ回路の不平衡電圧を加算する加算器を備
えることを特徴とする圧力センサ。 The pressure sensor has a plurality of Wheatstone bridge circuits configured with gauge resistors on a diaphragm membrane, wherein each of the corresponding gauge resistors of the plurality of Wheatstone bridge circuits is arranged close to each other on the diaphragm membrane, and each A pressure sensor comprising an adder that adds unbalanced voltages of a Wheatstone bridge circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14526188U JPH0265135U (en) | 1988-11-07 | 1988-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14526188U JPH0265135U (en) | 1988-11-07 | 1988-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0265135U true JPH0265135U (en) | 1990-05-16 |
Family
ID=31413694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14526188U Pending JPH0265135U (en) | 1988-11-07 | 1988-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0265135U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002243567A (en) * | 2001-02-22 | 2002-08-28 | Minebea Co Ltd | Semiconductor type pressure sensor |
-
1988
- 1988-11-07 JP JP14526188U patent/JPH0265135U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002243567A (en) * | 2001-02-22 | 2002-08-28 | Minebea Co Ltd | Semiconductor type pressure sensor |
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