JPH0262309B2 - - Google Patents
Info
- Publication number
- JPH0262309B2 JPH0262309B2 JP12958982A JP12958982A JPH0262309B2 JP H0262309 B2 JPH0262309 B2 JP H0262309B2 JP 12958982 A JP12958982 A JP 12958982A JP 12958982 A JP12958982 A JP 12958982A JP H0262309 B2 JPH0262309 B2 JP H0262309B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode group
- electric field
- dielectric layer
- exposed
- buried
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005684 electric field Effects 0.000 claims description 23
- 239000012212 insulator Substances 0.000 claims description 7
- 150000002500 ions Chemical class 0.000 description 5
- 229920002379 silicone rubber Polymers 0.000 description 3
- 239000004945 silicone rubber Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000016507 interphase Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
- Elimination Of Static Electricity (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12958982A JPS5920998A (ja) | 1982-07-27 | 1982-07-27 | 電界カ−テン装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12958982A JPS5920998A (ja) | 1982-07-27 | 1982-07-27 | 電界カ−テン装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5920998A JPS5920998A (ja) | 1984-02-02 |
| JPH0262309B2 true JPH0262309B2 (en:Method) | 1990-12-25 |
Family
ID=15013176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12958982A Granted JPS5920998A (ja) | 1982-07-27 | 1982-07-27 | 電界カ−テン装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5920998A (en:Method) |
-
1982
- 1982-07-27 JP JP12958982A patent/JPS5920998A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5920998A (ja) | 1984-02-02 |
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