JPH0261629B2 - - Google Patents

Info

Publication number
JPH0261629B2
JPH0261629B2 JP59077897A JP7789784A JPH0261629B2 JP H0261629 B2 JPH0261629 B2 JP H0261629B2 JP 59077897 A JP59077897 A JP 59077897A JP 7789784 A JP7789784 A JP 7789784A JP H0261629 B2 JPH0261629 B2 JP H0261629B2
Authority
JP
Japan
Prior art keywords
cryopanel
exhaust
cryopump
condensing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59077897A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60222572A (ja
Inventor
Katsunao Morimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP7789784A priority Critical patent/JPS60222572A/ja
Publication of JPS60222572A publication Critical patent/JPS60222572A/ja
Publication of JPH0261629B2 publication Critical patent/JPH0261629B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP7789784A 1984-04-18 1984-04-18 クライオポンプ Granted JPS60222572A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7789784A JPS60222572A (ja) 1984-04-18 1984-04-18 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7789784A JPS60222572A (ja) 1984-04-18 1984-04-18 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS60222572A JPS60222572A (ja) 1985-11-07
JPH0261629B2 true JPH0261629B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-20

Family

ID=13646864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7789784A Granted JPS60222572A (ja) 1984-04-18 1984-04-18 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS60222572A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04103885A (ja) * 1990-08-24 1992-04-06 Daikin Ind Ltd クライオポンプにおけるクライオパネル
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
JPH08203830A (ja) * 1994-07-20 1996-08-09 Applied Materials Inc 高温超高真空用真空処理チャンバ
US6361618B1 (en) 1994-07-20 2002-03-26 Applied Materials, Inc. Methods and apparatus for forming and maintaining high vacuum environments
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US6077404A (en) * 1998-02-17 2000-06-20 Applied Material, Inc. Reflow chamber and process
CN1882779A (zh) 2003-11-20 2006-12-20 住友重机械工业株式会社 低温泵
US8197222B2 (en) 2006-07-05 2012-06-12 Von Ardenne Anlagentechnik Gmbh Getter pump and vacuum coating installation comprising a getter pump
GB2596832A (en) * 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump
GB2596831A (en) 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178982A (ja) * 1984-02-27 1985-09-12 Toshiba Corp クライオポンプ

Also Published As

Publication number Publication date
JPS60222572A (ja) 1985-11-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees