JPH0260754B2 - - Google Patents

Info

Publication number
JPH0260754B2
JPH0260754B2 JP15424182A JP15424182A JPH0260754B2 JP H0260754 B2 JPH0260754 B2 JP H0260754B2 JP 15424182 A JP15424182 A JP 15424182A JP 15424182 A JP15424182 A JP 15424182A JP H0260754 B2 JPH0260754 B2 JP H0260754B2
Authority
JP
Japan
Prior art keywords
evaporation
temperature
source
evaporated
evaporation material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15424182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5943875A (ja
Inventor
Hiroyuki Moriguchi
Masanori Matsumoto
Akira Nishiwaki
Yasuo Morohoshi
Hiroyuki Nomori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP15424182A priority Critical patent/JPS5943875A/ja
Priority to US06/528,215 priority patent/US4551303A/en
Publication of JPS5943875A publication Critical patent/JPS5943875A/ja
Publication of JPH0260754B2 publication Critical patent/JPH0260754B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
JP15424182A 1982-09-04 1982-09-04 蒸発源及びその使用方法 Granted JPS5943875A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15424182A JPS5943875A (ja) 1982-09-04 1982-09-04 蒸発源及びその使用方法
US06/528,215 US4551303A (en) 1982-09-04 1983-08-31 Method of using an evaporation source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15424182A JPS5943875A (ja) 1982-09-04 1982-09-04 蒸発源及びその使用方法

Publications (2)

Publication Number Publication Date
JPS5943875A JPS5943875A (ja) 1984-03-12
JPH0260754B2 true JPH0260754B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-18

Family

ID=15579918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15424182A Granted JPS5943875A (ja) 1982-09-04 1982-09-04 蒸発源及びその使用方法

Country Status (1)

Country Link
JP (1) JPS5943875A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6115970A (ja) * 1984-07-02 1986-01-24 Matsushita Electric Ind Co Ltd 蒸着装置
JP2582095B2 (ja) * 1987-11-16 1997-02-19 住友電気工業株式会社 ダイヤモンドヒートシンクの製造法
JPH047182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-12-07 1992-02-26

Also Published As

Publication number Publication date
JPS5943875A (ja) 1984-03-12

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