JPH0260227U - - Google Patents

Info

Publication number
JPH0260227U
JPH0260227U JP13870088U JP13870088U JPH0260227U JP H0260227 U JPH0260227 U JP H0260227U JP 13870088 U JP13870088 U JP 13870088U JP 13870088 U JP13870088 U JP 13870088U JP H0260227 U JPH0260227 U JP H0260227U
Authority
JP
Japan
Prior art keywords
reflected light
shutter
light intensity
exposure apparatus
projection exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13870088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13870088U priority Critical patent/JPH0260227U/ja
Publication of JPH0260227U publication Critical patent/JPH0260227U/ja
Pending legal-status Critical Current

Links

JP13870088U 1988-10-25 1988-10-25 Pending JPH0260227U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13870088U JPH0260227U (US06826419-20041130-M00005.png) 1988-10-25 1988-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13870088U JPH0260227U (US06826419-20041130-M00005.png) 1988-10-25 1988-10-25

Publications (1)

Publication Number Publication Date
JPH0260227U true JPH0260227U (US06826419-20041130-M00005.png) 1990-05-02

Family

ID=31401283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13870088U Pending JPH0260227U (US06826419-20041130-M00005.png) 1988-10-25 1988-10-25

Country Status (1)

Country Link
JP (1) JPH0260227U (US06826419-20041130-M00005.png)

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