JPH026002B2 - - Google Patents
Info
- Publication number
- JPH026002B2 JPH026002B2 JP10934982A JP10934982A JPH026002B2 JP H026002 B2 JPH026002 B2 JP H026002B2 JP 10934982 A JP10934982 A JP 10934982A JP 10934982 A JP10934982 A JP 10934982A JP H026002 B2 JPH026002 B2 JP H026002B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- polarizing beam
- beam splitter
- target
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 13
- 230000001427 coherent effect Effects 0.000 claims description 3
- 101000983348 Plasmodium berghei (strain Anka) 24 kDa ookinete surface protein Proteins 0.000 abstract description 5
- 238000009792 diffusion process Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 9
- 238000001444 catalytic combustion detection Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000002452 interceptive effect Effects 0.000 description 2
- 101100139907 Arabidopsis thaliana RAR1 gene Proteins 0.000 description 1
- 101100028790 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) PBS2 gene Proteins 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10934982A JPS58225304A (ja) | 1982-06-25 | 1982-06-25 | 光学式機械量測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10934982A JPS58225304A (ja) | 1982-06-25 | 1982-06-25 | 光学式機械量測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58225304A JPS58225304A (ja) | 1983-12-27 |
JPH026002B2 true JPH026002B2 (ru) | 1990-02-07 |
Family
ID=14507969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10934982A Granted JPS58225304A (ja) | 1982-06-25 | 1982-06-25 | 光学式機械量測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58225304A (ru) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8613635D0 (en) * | 1986-06-05 | 1986-07-09 | Tyrer J R | Optical inspection |
JPH03128405A (ja) * | 1989-10-12 | 1991-05-31 | Keyence Corp | フォーミングマシン等における材料の送り量検出装置 |
IE910326A1 (en) * | 1991-01-31 | 1992-07-29 | Mairead Rosario Reynolds | A method and apparatus for detecting direction and¹displacement of a surface |
JP2008096295A (ja) * | 2006-10-12 | 2008-04-24 | Mitsutoyo Corp | 三次元センサおよび接触プローブ |
-
1982
- 1982-06-25 JP JP10934982A patent/JPS58225304A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58225304A (ja) | 1983-12-27 |
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