JPH0259677A - 電子ビームを用いた非接触試験方法 - Google Patents

電子ビームを用いた非接触試験方法

Info

Publication number
JPH0259677A
JPH0259677A JP88211420A JP21142088A JPH0259677A JP H0259677 A JPH0259677 A JP H0259677A JP 88211420 A JP88211420 A JP 88211420A JP 21142088 A JP21142088 A JP 21142088A JP H0259677 A JPH0259677 A JP H0259677A
Authority
JP
Japan
Prior art keywords
electron beam
voltage
measured
pattern
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP88211420A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587789B2 (cg-RX-API-DMAC10.html
Inventor
Motosuke Miyoshi
元介 三好
Katsuya Okumura
勝弥 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP88211420A priority Critical patent/JPH0259677A/ja
Publication of JPH0259677A publication Critical patent/JPH0259677A/ja
Publication of JPH0587789B2 publication Critical patent/JPH0587789B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Tests Of Electronic Circuits (AREA)
JP88211420A 1988-08-25 1988-08-25 電子ビームを用いた非接触試験方法 Granted JPH0259677A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP88211420A JPH0259677A (ja) 1988-08-25 1988-08-25 電子ビームを用いた非接触試験方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP88211420A JPH0259677A (ja) 1988-08-25 1988-08-25 電子ビームを用いた非接触試験方法

Publications (2)

Publication Number Publication Date
JPH0259677A true JPH0259677A (ja) 1990-02-28
JPH0587789B2 JPH0587789B2 (cg-RX-API-DMAC10.html) 1993-12-17

Family

ID=16605661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP88211420A Granted JPH0259677A (ja) 1988-08-25 1988-08-25 電子ビームを用いた非接触試験方法

Country Status (1)

Country Link
JP (1) JPH0259677A (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPH0587789B2 (cg-RX-API-DMAC10.html) 1993-12-17

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