JPH0257361B2 - - Google Patents
Info
- Publication number
- JPH0257361B2 JPH0257361B2 JP61142540A JP14254086A JPH0257361B2 JP H0257361 B2 JPH0257361 B2 JP H0257361B2 JP 61142540 A JP61142540 A JP 61142540A JP 14254086 A JP14254086 A JP 14254086A JP H0257361 B2 JPH0257361 B2 JP H0257361B2
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- metal rod
- tapered
- base member
- microwave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 238000003780 insertion Methods 0.000 claims description 33
- 230000037431 insertion Effects 0.000 claims description 33
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Plasma Technology (AREA)
- ing And Chemical Polishing (AREA)
- Waveguide Connection Structure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61142540A JPS62299101A (ja) | 1986-06-18 | 1986-06-18 | マイクロ波可変りアクタンス素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61142540A JPS62299101A (ja) | 1986-06-18 | 1986-06-18 | マイクロ波可変りアクタンス素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62299101A JPS62299101A (ja) | 1987-12-26 |
| JPH0257361B2 true JPH0257361B2 (ko) | 1990-12-04 |
Family
ID=15317727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61142540A Granted JPS62299101A (ja) | 1986-06-18 | 1986-06-18 | マイクロ波可変りアクタンス素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62299101A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013098054A (ja) * | 2011-11-01 | 2013-05-20 | Ulvac Japan Ltd | マイクロ波導入装置 |
-
1986
- 1986-06-18 JP JP61142540A patent/JPS62299101A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62299101A (ja) | 1987-12-26 |
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