JPH0257288B2 - - Google Patents
Info
- Publication number
- JPH0257288B2 JPH0257288B2 JP59276989A JP27698984A JPH0257288B2 JP H0257288 B2 JPH0257288 B2 JP H0257288B2 JP 59276989 A JP59276989 A JP 59276989A JP 27698984 A JP27698984 A JP 27698984A JP H0257288 B2 JPH0257288 B2 JP H0257288B2
- Authority
- JP
- Japan
- Prior art keywords
- dye
- layer
- color filter
- substrate
- color
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000975 dye Substances 0.000 claims description 88
- 239000000758 substrate Substances 0.000 claims description 62
- 239000001000 anthraquinone dye Substances 0.000 claims description 15
- 239000001046 green dye Substances 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 11
- -1 metal complex salt Chemical class 0.000 claims description 7
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 229910052745 lead Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000010410 layer Substances 0.000 description 127
- 238000000034 method Methods 0.000 description 42
- 230000003595 spectral effect Effects 0.000 description 38
- 238000007740 vapor deposition Methods 0.000 description 28
- 239000010408 film Substances 0.000 description 20
- 239000002904 solvent Substances 0.000 description 18
- 230000008569 process Effects 0.000 description 15
- 239000011521 glass Substances 0.000 description 12
- 238000000059 patterning Methods 0.000 description 11
- 239000004973 liquid crystal related substance Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000001007 phthalocyanine dye Substances 0.000 description 7
- 239000011241 protective layer Substances 0.000 description 7
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000003086 colorant Substances 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000004043 dyeing Methods 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 4
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 4
- 150000004056 anthraquinones Chemical class 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 206010040844 Skin exfoliation Diseases 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical group N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000010406 cathode material Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000008273 gelatin Substances 0.000 description 2
- 229920000159 gelatin Polymers 0.000 description 2
- 235000019322 gelatine Nutrition 0.000 description 2
- 235000011852 gelatine desserts Nutrition 0.000 description 2
- 239000001056 green pigment Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- AJDUTMFFZHIJEM-UHFFFAOYSA-N n-(9,10-dioxoanthracen-1-yl)-4-[4-[[4-[4-[(9,10-dioxoanthracen-1-yl)carbamoyl]phenyl]phenyl]diazenyl]phenyl]benzamide Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2NC(=O)C(C=C1)=CC=C1C(C=C1)=CC=C1N=NC(C=C1)=CC=C1C(C=C1)=CC=C1C(=O)NC1=CC=CC2=C1C(=O)C1=CC=CC=C1C2=O AJDUTMFFZHIJEM-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000007669 thermal treatment Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 239000001043 yellow dye Substances 0.000 description 2
- 239000001052 yellow pigment Substances 0.000 description 2
- MVIFQPPFCHUSIH-UHFFFAOYSA-N 1-[[4-[(9,10-dioxoanthracen-1-yl)amino]-6-phenyl-1,3,5-triazin-2-yl]amino]anthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C(=O)C2=C1NC(N=1)=NC(NC=2C=3C(=O)C4=CC=CC=C4C(=O)C=3C=CC=2)=NC=1C1=CC=CC=C1 MVIFQPPFCHUSIH-UHFFFAOYSA-N 0.000 description 1
- PLXMOAALOJOTIY-FPTXNFDTSA-N Aesculin Natural products OC[C@@H]1[C@@H](O)[C@H](O)[C@@H](O)[C@H](O)[C@H]1Oc2cc3C=CC(=O)Oc3cc2O PLXMOAALOJOTIY-FPTXNFDTSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 241000526960 Amaranthus acanthochiton Species 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 1
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 239000004234 Yellow 2G Substances 0.000 description 1
- 229960000583 acetic acid Drugs 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 150000004696 coordination complex Chemical class 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000004148 curcumin Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- VPWFPZBFBFHIIL-UHFFFAOYSA-L disodium 4-[(4-methyl-2-sulfophenyl)diazenyl]-3-oxidonaphthalene-2-carboxylate Chemical compound [Na+].[Na+].[O-]S(=O)(=O)C1=CC(C)=CC=C1N=NC1=C(O)C(C([O-])=O)=CC2=CC=CC=C12 VPWFPZBFBFHIIL-UHFFFAOYSA-L 0.000 description 1
- FTZLWXQKVFFWLY-UHFFFAOYSA-L disodium;2,5-dichloro-4-[3-methyl-5-oxo-4-[(4-sulfonatophenyl)diazenyl]-4h-pyrazol-1-yl]benzenesulfonate Chemical compound [Na+].[Na+].CC1=NN(C=2C(=CC(=C(Cl)C=2)S([O-])(=O)=O)Cl)C(=O)C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 FTZLWXQKVFFWLY-UHFFFAOYSA-L 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 239000012362 glacial acetic acid Substances 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229920001477 hydrophilic polymer Polymers 0.000 description 1
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 235000019239 indanthrene blue RS Nutrition 0.000 description 1
- UHOKSCJSTAHBSO-UHFFFAOYSA-N indanthrone blue Chemical compound C1=CC=C2C(=O)C3=CC=C4NC5=C6C(=O)C7=CC=CC=C7C(=O)C6=CC=C5NC4=C3C(=O)C2=C1 UHOKSCJSTAHBSO-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000434 metal complex dye Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000002151 riboflavin Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 235000019235 yellow 2G Nutrition 0.000 description 1
Landscapes
- Optical Filters (AREA)
Description
æ¬çºæã¯ã«ã©ãŒãã€ã«ã¿ãŒã«é¢ãããã®ã§ãç¹
ã«ã«ã©ãŒæ®åçŽ åãã«ã©ãŒã»ã³ãµãŒåã³ã«ã©ãŒã
ã€ã¹ãã¬ãŒãªã©ã®åŸ®çŽ°è²å解çšãšããŠå¥œé©ãªã«ã©
ãŒãã€ã«ã¿ãŒã«é¢ãããã®ã§ããã ã«ã©ãŒãã€ã«ã¿ãŒãšããŠã¯ãåºæ¿äžã«ãŒã©ã
ã³ãã«ãŒã€ã³ãã°ãªãŠãŒãããã¯ããªããã«ã¢ã«
ã³ãŒã«ãªã©ã®èŠªæ°Žæ§é«ååç©è³ªãããªãåªæå±€ã
èšãããã®åªæå±€ãè²çŽ ã§æè²ããŠçè²å±€ã圢æ
ããæè²ã«ã©ãŒãã€ã«ã¿ãŒãç¥ãããŠããããã®
ãããªæè²æ³ã§ã¯ã䜿çšå¯èœãªææãå€ããã€ã«
ã¿ãŒãšããŠèŠæ±ãããåå ç¹æ§ãžã®å¯Ÿå¿ãæ¯èŒç
容æã§ããããåªæå±€ã®æè²å·¥çšã«ææã溶解ã
ãæè²æµŽäžã«åªæå±€ã浞挬ãããšããã³ã³ãããŒ
ã«ã®é£ãã湿åŒå·¥çšãæ¡çšããŠããããŸãåè²æ¯
ã«é²æçšã®äžéå±€ãèšãããšãã€ãè€éãªå·¥çšã
æããããæ©çããæªããšãã€ãæ¬ ç¹ãæããŠ
ãããŸã䜿çšã§ããè²çŽ ã®èç±æ§ã150ã180âçš
床ãšæ¯èŒçäœãç±çåŠçãå¿ èŠãšããå·¥çšã§ã¯äœ¿
çšãå°é£ã§ããã ããã«å¯ŸããŠææãé¡æã®è²çŽ èèãèžççã®
æ°çžå ç©æ³ã§çè²å±€ã圢æããèžçæ³ãç¥ãããŠ
ããïŒç¹éæ55â146406å·ïŒã ãã®æ¹æ³ã«ããã°è²çŽ ãã®ãã®ã§çè²å±€ã圢æ
ã§ããã®ã§ãæè²æ³ã«æ¯ã¹ãŠçè²å±€ãèã圢æã
ãã«ã©ãŒãã€ã«ã¿ãŒã§èååã§ãããŸãéæ°Žå·¥çš
ã§ããã®ã§å·¥çšã®ç®¡çãå¶åŸ¡ã容æã§ããããŸã
èžçè²çŽ å±€ã¯èç±æ§ãè¯ããèžçè²çŽ å±€ã¯ç±çåŠ
çãå¿ èŠãšããå·¥çšã«ã䜿çšå¯èœã§ããããŸãã
çè²å±€ã®ãã¿ãŒã³ãã³ã°ã«ããªããªãœå·¥çšãçŽæ¥
é©çšã§ãããšããå©ç¹ãæããŠããã äžæ¹ãã«ã©ãŒãã€ã«ã¿ãŒã§ããã圢æããè²çŽ
ã®èŠ³ç¹ããã¿ããšãã«ã©ãŒãã€ã«ãŒã¿ãŒçšè²çŽ ã«
ã¯ä»¥äžã®ãããªç¹æ§ãèŠæ±ãããããŸã第äžã«å
åŠãã€ã«ã¿ãŒãšããŠã®æå®ã®åå ç¹æ§ãæããã
ã®ã§ãªããã°ãªããªãã ãŸããã«ã©ãŒãã€ã«ã¿ãŒã®è£œæ³ã®ç¹ããã¿ã
ã°ãåå ç¹æ§ãè¯ããŠã補é äžå®å®æ§ã«æ¬ ãã
ããç¹å¥ã®åŠçå·¥çšãå¿ èŠãªè²çŽ ã§ã¯æ©çãã®äœ
äžããŸããçµå±ã«ã©ãŒãã€ã«ã¿ãŒãšããŠã¯äžé©åœ
ãªãã®ã«ãªã€ãŠããŸããåŸã€ãŠã«ã©ãŒãã€ã«ã¿ãŒ
çšè²çŽ ãšããŠã¯ãåå ç¹æ§ãšè£œé ã®äž¡é¢ããã¿ãŠ
ãã©ã³ã¹ã®ãšããæé©ãªãã®ãéžã°ãªããã°ãªã
ãªãã èžçæ³ã«ãã€ãŠã«ã©ãŒãã€ã«ã¿ãŒã®åœ¢æãå®æœ
ããå Žåã«ã¯ã䜿çšããè²çŽ ã«ãèç±æ§ããã€ãŠ
容æã«èžçºæ°åå¯èœã§ããããã€ããªããªãœå·¥çš
ã§ã®æº¶å€åŠçã«èãããšãã補é é¢ã§ã®å¶çŽã匷
ãããã«ã䜿çšã§ããè²çŽ ãéãããŠããŸããã
ã«ãæè²æ³ã«æ¯ã¹ãŠäžèšã®ãããªçš®ã ã®å©ç¹ãã
ãã«ãããããããèžçæ³ã«ãã€ãŠåœ¢æãããã«
ã©ãŒãã€ã«ã¿ãŒã¯æ®åããŠããªãã€ãã ããªãã¡ãèžçå¯èœãªè²çŽ ã«å¶éããããèžç
å¯èœãªè²çŽ ãçšããŠã«ã©ãŒãã€ã«ã¿ãŒã圢æããŠ
ããã«ã©ãŒãã€ã«ã¿ãŒã«æå®ã®åå ç¹æ§ãåŸãã
ãªãå Žåãå€ãããŸããèžçå¯èœãªè²çŽ ã®ãªãã§
ããè²çŽ ã®èžçå±€ããã¿ãŒã³ãã³ã°ããéã«ãã¬
ãžã¹ãå¡åžãçŸåã«ããã溶å€åŠççã®åå·¥çšäž
ã§ãè²çŽ èã溶解ããŠããŸã€ããããŸãã溶解ãŸ
ã§ã«ã¯è³ããªããšãåå ç¹æ§ãå€åããŠããŸã€
ãŠãææã®åå ç¹æ§ãåŸãããªããã®ãå€ããã
ã§ããã äŸãã°ãç·è²çè²å±€ãèžçæ³ã«ãã€ãŠåœ¢æãã
ããšããå ŽåãåŸæ¥ãã¿ãã·ã¢ãã³ç³»è²çŽ ãå€ã
çšããããŠããããåŸæ¥ç¥ãããŠããèžç局圢æ
çšã®ãã¿ãã·ã¢ãã³ç³»è²çŽ ã¯ãåºæ¬æ§é ãšããŠã®
ãã¿ãã·ã¢ãã³ç°ãååŠçã«ãç±çã«ã極ããŠå®
å®ãªã®ã§ãèžçæ³ãè溶å€æ³ã«åªããŠããåé¢ã
åå ç¹æ§ã«ã€ããŠã¯ãæŠããŠéè²åŽã«ãã€ãŠãã
å Žåãå€ããå³å¯ã«ç·è²ãšããŠçšããå Žåå¿ ãã
ãååãªåå ç¹æ§ãæãããã®ã§ã¯ãªãã€ãã æ¬çºæã¯ãã®ãããªåé¡ã«éã¿ãªããããã®ã§
ãããç¹ã«ã«ã©ãŒãã€ã«ã¿ãŒã®æããç·è²çè²å±€
ãèžçæ³ã«ãã€ãŠåœ¢æããå Žåã«ãåå ç¹æ§ã®è£œ
é ã®äž¡é¢ããã¿ãŠãã©ã³ã¹ã®ãšãã奜é©ãªè²çŽ ã
èŠãåºãããšã«ããå®æããããã®ã§ããã æ¬çºæã®ç®çã¯ãèç±æ§ããã³è溶å€æ§ã«åª
ãããã€åå ç¹æ§ã«ãåªããè²çŽ ããèžçæ³ã«ã
ã圢æãããçè²å±€ãæããã«ã©ãŒãã€ã«ã¿ãŒã
æäŸããããšã«ããããªãã§ãåŸæ¥ãæå®ã®åå
ç¹æ§ãåŸããã«ããã€ãç·è²çè²å±€ã«ãåªããå
å ç¹æ§ãåŸãããšã®ã§ããã«ã©ãŒãã€ã«ã¿ãŒãæ
äŸããããšã«ããã æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã¯ããªã¯ã¿âïŒïŒïŒ
âããšãã«ãã¿ãã·ã¢ãã³ç³»è²çŽ ããã³ã¢ã³ãã©
ããã³ç³»è²çŽ ãèžçããŠåœ¢æãããç·è²è²çŽ å±€ã
æããããšãç¹åŸŽãšãããã®ã§ããã æ¬çºæã§ã¯ãç·è²è²çŽ å±€ãšããŠãªã¯ã¿âïŒïŒïŒ
âããšãã«ãã¿ãã·ã¢ãã³ç³»è²çŽ ãšã¢ã³ãã©ãã
ã³ç³»è²çŽ ã®é»è²è²çŽ ãšã䜵çšããããšã«ããããª
ã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³ã®ãã€é
è²åå æåãã«ããããåªããç·è²ã®åå ç¹æ§ã
æããçè²å±€ã圢æãããã®ã§ããã æ¬çºæã§äœ¿çšãããªã¯ã¿âïŒïŒïŒâããšãã«ã
ã¿ãã·ã¢ãã³ç³»è²çŽ ãšããŠã¯ãäŸãã°ïŒã¡ã¿ã«ã
ãªãŒïŒãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ã
ã³ãåã³äžèšã®æ§é åŒã§ç€ºããããªã¯ã¿âïŒïŒïŒ
âããšãã«ãã¿ãã·ã¢ãã³ã®éå±é¯å¡©ãæããã
ãšãã§ããã äžèšåŒäžãã¯CuïŒGaOHïŒVOïŒNiïŒPdïŒ
PbïŒMgïŒCaãŸãã¯Coã§ããã èžçæ³ã«çšããããè²çŽ ã¯ãæ¬æ¥ãèç±æ§ã«åª
ãããã®ã§ãªããã°ãªããªããäžè¬ã«ææ©è²çŽ ã¯
ãã®ååŠæ§é ã«ãã€ãŠå·®ãã¿ããããã®ã®ãç±ç
ã«äžå®å®ã§å解ãèµ·ããæããã®ãå€ãã ããã«å¯ŸããŠãäžèšã®ãªã¯ã¿âïŒïŒïŒâããšã
ã«ãã¿ãã·ã¢ãã³ç³»è²çŽ ã¯ãã¿ãã·ã¢ãã³ç³»è²çŽ
ã§ããããã®ãã¿ãã·ã¢ãã³ç°ã«ãã€ãŠç±çã«æ¥µ
ããŠå®å®ã§ãããå ç±ããŠãå解ããããšãªãã
æå®ã®æž©åºŠä»¥äžã«ãªããšå®¹æã«èžçããæ§è³ªãæ
ããŠãããèžçã«ãã€ãŠè²çŽ å±€ã圢æããã«ã¯æ¥µ
ããŠå¥œé©ã§ãããæŽã«åœ¢æãããèžçè²çŽ å±€ã¯ã
ãã以åŸã«ææã«å¿ããŠè¡ãªãããç±åŠçãçµãŠ
ãå®å®ããŠããããã®åå ç¹æ§ãå€åãããå€è³ª
ãããããããšããªãã äžèšã®ãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ã
ã³ç³»è²çŽ ã®åå ç¹æ§ã¯ããããã«éè²åŽã«ãã€ãŠ
ãããããå³å¯ãªç·è²è²çŽ å±€ãšããŠäœ¿çšããå Ž
åãå åã§ã¯ãªãããã®ãããæ¬çºæã®ã«ã©ãŒã
ã€ã«ã¿ãŒã¯ãäžèšã®ãªã¯ã¿âïŒïŒïŒâããšãã«ã
ã¿ãã·ã¢ãã³ç³»è²çŽ ãè²è£æ£ããŠå³å¯ãªç·è²è²çŽ
å±€ãšãããã®ã§ããã ãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³ç³»è²
çŽ ã®è²è£æ£ã«çšããè²çŽ ãšããŠã¯ãéãç«ã¡äžã
ç¹æ§ãæããé»è²è²çŽ ã§ãªããã°ãªããªãããŸã
èžçæ³ã§åœ¢æããã®ã§ãªã¯ã¿âïŒïŒïŒâããšãã«
ãã¿ãã·ã¢ãã³ç³»è²çŽ ã«å¹æµããèžçæ§ãšè溶å€
æ§ããå Œãããªããå¿ èŠãããããæ¬çºæã§çšã
ãã¢ã³ãã©ããã³ç³»é»è²è²çŽ ã¯ãããã®ç¹æ§ãå š
ãŠæºè¶³ãããã®ã§ããããªã¯ã¿âïŒïŒïŒâããšã
ã«ãã¿ãã·ã¢ãã³ç³»è²çŽ ãšã®çµåãã«ãããŠèžç
åã®ããããç·çè²å±€åœ¢æãå¯èœã«ãããã®ã§ã
ãã ãŸãããªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ã
ã³ç³»è²çŽ ãšã¢ã³ãã©ããã³ç³»è²çŽ ãšãçµã¿åããŠ
åŸãããç·è²è²çŽ å±€ã¯ãç·è²ã®æ³¢é·åã®ééæ§ã«
åªãããå³ã¡ããªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ã
ã·ã¢ãã³ã®åå ç¹æ§ã¯ãééé åãé·æ³¢é·åŽãŸã§
䌞ã³ãŠããããããªã¯ã¿âïŒïŒïŒâããšãã«ãã¿
ãã·ã¢ãã³ãã¢ã³ãã©ããã³ç³»è²çŽ ã§è²è£æ£ããŠ
ãæ倧ééçãé«ããšããç·è²è²çŽ å±€ãšããŠåªã
ãåå ç¹æ§ã®ã«ã©ãŒãã€ã«ã¿ãŒãšãªãã æ¬çºæã§çšããããã¢ã³ãã©ããã³ç³»è²çŽ ãšã¯
ã¢ã³ãã©ããã³ã®èªå°äœåã³é¡äŒŒã®å€ç°åŒããã³
ããããã¢ã³ãã©ããã³ç³»è²çŽ ã¯ç±çã«å®å®ã§é«
æž©ã«æŒããŠå解ããããšã¯ãªããæå®ã®æž©åºŠä»¥äž
ã«ãªããšå®¹æã«èžçºããæ§è³ªãæããããèžçã«
ãã€ãŠè²çŽ èå¹ã圢æããã«ã¯æ¥µããŠå¥œé©ã§ã
ãã èžçã«ãã€ãŠåœ¢æãããã¢ã³ãã©ããã³ç³»è²çŽ
ã®èå¹ã¯ææ©èã«ãã°ãã°èŠããããããªçãè
ã§ã¯ãªã極ããŠç·»å¯ã§ãããã¬ã©ã¹ã®ãããªç¡æ©
ç©ã®è¡šé¢ã«ã匷ãå¯çããŠãããèžçèãšããŠã
ãããç©æ§ãæããŠããã ãŸãäžæ¹ãã®èžçèã¯ææ©æº¶å€ã«å¯ŸããŠåªãã
èæ§ãæããŠãããå³ã¡ãã¢ã«ã³ãŒã«é¡çã®è²§æº¶
åªã¯å¿è«ãã±ãã³é¡ããšã¹ãã«é¡ããšãŒãã«ã¢ã«
ã³ãŒã«é¡ãããã²ã³æº¶å€çã®è¯æº¶åªã«å¯ŸããŠãã»
ãšãã©æº¶è§£ãããåå ç¹æ§çã«ãäœãå€åãèµ·ã
ããšããªããåŸã€ãŠãè²çŽ å±€ã«å¯ŸããŠãã¬ãžã¹ã
ã®å¡åžãçŸåãæœããŠãå šãäœãæ¯éããªãã®
ã§ãè²çŽ å±€ã®åŸ®çŽ°å å·¥ã容æã«è¡ãªããããã®ã§
ããã埮现ã«ã©ãŒãã€ã«ã¿ãŒçã®è£œé ã«æ¥µããŠå¥œ
é©ã§ããã ã¢ã³ãã©ããã³ç³»é»è²è²çŽ ã®æ§é ã次ã«ç€ºãã ãã®æ§ãªã¢ã³ãã©ããã³ç³»è²çŽ ãšããŠåžè²©ãã
ãŠããç©ã®äžäŸãåååãçšããŠä»¥äžæããã ã¯ãã¢ãã¿ãŒã«ã€ãšããŒ2AR
ïŒããã¬ã€ã®ãŒè£œïŒC.I.No.70600 ããªãªãã¢ãŒã¹ãã€ãšããŒE3R ïŒãã€ãšã«è£œïŒ ããªãªã²ã³ã€ãšããŒL1560
ïŒBASF補ïŒC.I.No.68420 ã«ã€ã»ããã€ãšããŒïŒ¥â
ïŒæ¥æ¬åè¬è£œïŒC.I.No.65049 ã¯ãã¢ãã¿ãŒã«ã€ãšããŒAGR
ïŒããã¬ã€ã®ãŒè£œïŒ ãã€ãã©ã¹ãã€ãšããŒE2G ïŒãã€ãšã«è£œïŒ ããã³ã¹ã¬ã³ã€ãšããŒGCN
ïŒäœåååŠè£œïŒC.I.No.67300 ãã±ã¹ã¬ã³ã€ãšããŒGK
ïŒäžäºæ±å§è£œïŒC.I.No.61725 ã€ã³ãã³ã¹ã¬ã³ããªã³ãã€ã³ã°ã€ãšããŒGOK
ïŒããã¹ã補ïŒC.I.No.59100 ã¢ã³ãã©ãŸãŒã«ã€ãšããŒïŒ¶
ïŒããã¹ã補ïŒC.I.No.60531 ãã±ã¹ã¬ã³ãœãªãŠãã«ã€ãšããŒ12G
ïŒäžäºæ±å§è£œïŒC.I.No.60605 ãã±ã¹ã¬ã³ã€ãšããŒGF
ïŒäžäºæ±å§è£œïŒC.I.No.66510 ããã³ã¹ã¬ã³ã€ãšããŒGCF
ïŒäœåååŠè£œïŒC.I.No.65430 ã€ã³ãã¹ã¬ã³ã€ãšããŒ3G
ïŒãã€ãšã«è£œïŒC.I.No.65405 ããã³ã¹ã¬ã³ã€ãšããŒ4GL ïŒäœåååŠè£œïŒ ã€ã³ãã¹ã¬ã³ã€ãšããŒ5GK
ïŒãã€ãšã«è£œïŒC.I.No.65410 ãã©ã³ã¹ã¬ã³ã€ãšããŒPGA
ïŒBASF補ïŒC.I.No.68400 ãããã³ã€ãšããŒ2G ïŒããã¬ã€ã®ãŒè£œïŒ ã€ã³ãã¹ã¬ã³ã€ãšããŒF2GC ïŒããã¹ãè£œïŒ ã¢ã³ãã©ãŸãŒã«ã€ãšããŒIGG ïŒããã¹ãè£œïŒ ã€ã³ãã¹ã¬ã³ã€ãšããŒ5GF ïŒBASFè£œïŒ ãã±ã³ã¹ã¬ã³ã€ãšããŒ3GL ïŒäžäºæ±å§è£œïŒ ã€ã³ãã¹ã¬ã³ã€ãšããŒLGF ïŒBASFè£œïŒ ã¢ãã©ã€ãã€ãšããŒFR ïŒICIè£œïŒ ã«ã€ã»ããã€ãšããŒïŒ¥âAR ïŒæ¥æ¬åè¬è£œïŒ ãªã©ããããããã ç·è²çŽ å±€ã®åœ¢æã¯ããªã¯ã¿âïŒïŒïŒâããšãã«
ãã¿ãã·ã¢ãã³ç³»è²çŽ ãšã¢ã³ãã©ããã³ç³»è²çŽ ã
é 次èžçç©å±€ããæ¹æ³ãäžè¬çã§ããããæ··åèž
çãããã¯åæèžçã§ãããŸããªããææã®åå
ç¹æ§ã«å¿ããŠããããã®èååã¯èžçéãå¶åŸ¡ã
ããéåžžã¯ããããèåã«ããŠ500ã10000â«ãé©
åã§ããã 次ã«æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã圢æããå Žå
ã®èžçè²çŽ å±€ã®ãã¿ãŒã³ãã³ã°ã«ã€ããŠèª¬æã
ãã èžçè²çŽ å±€ã®ãã¿ãŒã³ãã³ã°æè¡ãšããŠã¯ã代
è¡šçã«ã¯ããã©ã€ãšããã³ã°æ³ãšãªãããªãæ³ã
ããã ãã©ã€ãšããã³ã°æ³ã¯ãäŸãã°ã¬ã©ã¹ãªã©ã®åº
æ¿äžã«èšããããèžçè²çŽ å±€äžã«ã圢æããããš
ãããã¿ãŒã³ã«å¯Ÿå¿ãã圢ç¶ã®ã¬ãžã¹ããã¿ãŒã³
ãèšããããããã¹ã¯ãšããŠãã©ãºããããã¯ã€
ãªã³ãšããã³ã°ã§ãèžçè²çŽ å±€ã®ãã¹ã¯ã«èŠãã
ãéšå以å€ã®éšåãåºæ¿äžããé€å»ããè²çŽ ãã¿
ãŒã³ã圢æãããã®ã§ãããïŒç¹éæ58â34861
çïŒããã®æ¹æ³ã§ã¯æè²æ³ã®åŠãäžéå±€ã®åœ¢æã¯
äžçšã§ãããããã®ãããè²çŽ ãã¿ãŒã³äžã«ã¬ãž
ã¹ããã¹ã¯ãæ®ã€ãŠããŸãããããããã®ãã¹ã¯
ãè²çŽ å±€ã«äœãæå·ãäžããã«é€å»ããããšã¯æ¥µ
ããŠå°é£ãªãããçµå±å®è³ªçã«å åŠçã«ã¯äžçšãª
ã¬ãžã¹ããã¹ã¯ãè²çŽ å±€ã®äžã«ç©å±€ãããïŒå±€æ§
æã«ãªãã äžæ¹ããªãããªãæ³ã«ããæ¹æ³ã§ã¯ãäŸãã°ãŸ
ãåºæ¿äžã«ã圢æããããšãããã¿ãŒã³ã«å¯Ÿå¿ã
ã圢ç¶ã®ã¬ãžã¹ããã¿ãŒã³ããçŸå液ã«æº¶è§£å¯èœ
ãªç©è³ªãäŸãã°ã¬ãžã¹ããçšããŠèšãããã次ã«
ãã®ã¬ãžã¹ããã¿ãŒã³ãèšããããŠããåºæ¿äžã«
è²çŽ å±€ãèžçãããããã®ããã«ããŠåºæ¿äžã«
ã¯ãé€å»ãã¹ãè²çŽ å±€ã®äžéšã«ã¬ãžã¹ããã¿ãŒã³
ã圢æãããç¶æ ãåŸãããã次ã«ããã®åºæ¿ã¯
çŸå液ã§åŠçããããã®éã¬ãžã¹ããã¿ãŒã³ã¯æº¶
解åã¯å¥é¢ããŠåºæ¿äžããé€å»ãããããã®éã
ã¬ãžã¹ããã¿ãŒã³ãšãšãã«ãã®ã¬ãžã¹ããã¿ãŒã³
äžã«ããè²çŽ å±€ãåºæ¿äžããé€å»ãããè²çŽ å±€ã®
åºæ¿äžã«çŽæ¥ç©å±€ãããéšåãåºæ¿äžã«æ®ãããŠ
èžçè²çŽ å±€ã®ãã¿ãŒã³ãã³ã°ãè¡ãªããããåŸã€
ãŠããªãããªãæ³ã«ããã°ãåºæ¿äžã®èžçè²çŽ å±€
ã«ã¯äœãçŽæ¥çãªäœçšãåãŒãããšãªããç©çç
ã«åºæ¿äžããèžçè²çŽ å±€ã®äžçšéšåãé€å»ããã
ãšãã§ããã è²çŽ å±€ã®ãªãããªãæ³ã«ãããã¿ãŒã³ãã³ã°ã«
çšããã¬ãžã¹ããšããŠã¯ãåŸã«ãçŸå液ã«ããå¥
é¢åŠçæã«æº¶è§£å¯èœã§ããã°ãã¬åãããžåãå
ããªããããããã¬åã§ã¯äžè¬ã«èŒ»å°ç·ã®ç §å°ã§
æ¶æ©ãé²ã¿ã溶解ããã«ã¯åŒ·ã溶解åããã€æº¶å€
ãå¿ èŠãšãªããåŸã€ãŠè²çŽ å±€ã«æå·ãäžããã溶
解ãããããããã®ã§å¥œãŸããã¯ãªãã ãã®ç¹ããžåã¬ãžã¹ãã§ã¯ãç¹ã«ã¬ãžã¹ããã¿
ãŒã³åœ¢æåŸãå šé¢ã«èŒ»å°ç·ãç §å°ããã°ã¬ãžã¹ã
ãçŸå液ã«å¯æº¶æ§ã«ãªãã®ã§ããã¬åã«æ¯ã¹ãŠè²
çŽ ã溶解ãã«ãã溶å€ãéžæã§ããã®ã§ãªãããª
ãã«ã¯å¥œé©ã§ããããŸãããžåã¬ãžã¹ããæš¹èæ
åã®çš®é¡ãå€å²ã«ããã€ãŠããããã®å¡åžãçŸå
ã«äœ¿çšããã溶å€ãæ§ã ã§ãããè²çŽ ã«å¯ŸããŠã
ãäœçšæ§ã®å°ãªã溶å€ã®äœ¿ããããžåã¬ãžã¹ãã
éžæããããšãæãŸãããäžäŸãšããŠéååäœãš
ããŠäžèšæ§é ã§ãããããå«ããçŽ ã¡ã¿ã¯ãªã¬ãŒ
ããäž»äœãšããããžåã¬ãžã¹ãã奜é©äŸãšããŠæ
ããããããã®ã¬ãžã¹ãã¯ããšã¹ãã«é¡ãè³éŠæ
é¡ãããã²ã³åçåæ°ŽçŽ é¡ãªã©ã®æº¶è§£èœãé«ãè¯
溶åªã¯ç¡è«ã®ããšãã¢ã«ã³ãŒã«é¡ãªã©ã®æº¶è§£èœã
äœã貧溶åªã«ãè¯ã溶解ãããããè²çŽ èã«åœ±é¿
ã®å°ãªã溶å€ã䜿ããããã§ããã ãã®ãããªã¬ãžã¹ããšããŠã¯ãFPM210ïŒ
FBN110ããã³FBM120ïŒããããåååã§ãã€
ãã³å·¥æ¥è£œïŒãæããããã ããã§ãR1ããã³R2ã¯æ°ŽçŽ åã¯ã¢ã«ãã«åºã
R3ã¯åççŽ ã«å°ãªããšãïŒåã®ããçŽ ãçµåã
ãã¢ã«ãã«åºã§ããã 代衚çãªR1ïŒR2åã³R3ã®çµã¿åãã®äŸãšããŠ
ã¯æ¬¡ã®ãã®ãæããããšãã§ããã
ã«ã«ã©ãŒæ®åçŽ åãã«ã©ãŒã»ã³ãµãŒåã³ã«ã©ãŒã
ã€ã¹ãã¬ãŒãªã©ã®åŸ®çŽ°è²å解çšãšããŠå¥œé©ãªã«ã©
ãŒãã€ã«ã¿ãŒã«é¢ãããã®ã§ããã ã«ã©ãŒãã€ã«ã¿ãŒãšããŠã¯ãåºæ¿äžã«ãŒã©ã
ã³ãã«ãŒã€ã³ãã°ãªãŠãŒãããã¯ããªããã«ã¢ã«
ã³ãŒã«ãªã©ã®èŠªæ°Žæ§é«ååç©è³ªãããªãåªæå±€ã
èšãããã®åªæå±€ãè²çŽ ã§æè²ããŠçè²å±€ã圢æ
ããæè²ã«ã©ãŒãã€ã«ã¿ãŒãç¥ãããŠããããã®
ãããªæè²æ³ã§ã¯ã䜿çšå¯èœãªææãå€ããã€ã«
ã¿ãŒãšããŠèŠæ±ãããåå ç¹æ§ãžã®å¯Ÿå¿ãæ¯èŒç
容æã§ããããåªæå±€ã®æè²å·¥çšã«ææã溶解ã
ãæè²æµŽäžã«åªæå±€ã浞挬ãããšããã³ã³ãããŒ
ã«ã®é£ãã湿åŒå·¥çšãæ¡çšããŠããããŸãåè²æ¯
ã«é²æçšã®äžéå±€ãèšãããšãã€ãè€éãªå·¥çšã
æããããæ©çããæªããšãã€ãæ¬ ç¹ãæããŠ
ãããŸã䜿çšã§ããè²çŽ ã®èç±æ§ã150ã180âçš
床ãšæ¯èŒçäœãç±çåŠçãå¿ èŠãšããå·¥çšã§ã¯äœ¿
çšãå°é£ã§ããã ããã«å¯ŸããŠææãé¡æã®è²çŽ èèãèžççã®
æ°çžå ç©æ³ã§çè²å±€ã圢æããèžçæ³ãç¥ãããŠ
ããïŒç¹éæ55â146406å·ïŒã ãã®æ¹æ³ã«ããã°è²çŽ ãã®ãã®ã§çè²å±€ã圢æ
ã§ããã®ã§ãæè²æ³ã«æ¯ã¹ãŠçè²å±€ãèã圢æã
ãã«ã©ãŒãã€ã«ã¿ãŒã§èååã§ãããŸãéæ°Žå·¥çš
ã§ããã®ã§å·¥çšã®ç®¡çãå¶åŸ¡ã容æã§ããããŸã
èžçè²çŽ å±€ã¯èç±æ§ãè¯ããèžçè²çŽ å±€ã¯ç±çåŠ
çãå¿ èŠãšããå·¥çšã«ã䜿çšå¯èœã§ããããŸãã
çè²å±€ã®ãã¿ãŒã³ãã³ã°ã«ããªããªãœå·¥çšãçŽæ¥
é©çšã§ãããšããå©ç¹ãæããŠããã äžæ¹ãã«ã©ãŒãã€ã«ã¿ãŒã§ããã圢æããè²çŽ
ã®èŠ³ç¹ããã¿ããšãã«ã©ãŒãã€ã«ãŒã¿ãŒçšè²çŽ ã«
ã¯ä»¥äžã®ãããªç¹æ§ãèŠæ±ãããããŸã第äžã«å
åŠãã€ã«ã¿ãŒãšããŠã®æå®ã®åå ç¹æ§ãæããã
ã®ã§ãªããã°ãªããªãã ãŸããã«ã©ãŒãã€ã«ã¿ãŒã®è£œæ³ã®ç¹ããã¿ã
ã°ãåå ç¹æ§ãè¯ããŠã補é äžå®å®æ§ã«æ¬ ãã
ããç¹å¥ã®åŠçå·¥çšãå¿ èŠãªè²çŽ ã§ã¯æ©çãã®äœ
äžããŸããçµå±ã«ã©ãŒãã€ã«ã¿ãŒãšããŠã¯äžé©åœ
ãªãã®ã«ãªã€ãŠããŸããåŸã€ãŠã«ã©ãŒãã€ã«ã¿ãŒ
çšè²çŽ ãšããŠã¯ãåå ç¹æ§ãšè£œé ã®äž¡é¢ããã¿ãŠ
ãã©ã³ã¹ã®ãšããæé©ãªãã®ãéžã°ãªããã°ãªã
ãªãã èžçæ³ã«ãã€ãŠã«ã©ãŒãã€ã«ã¿ãŒã®åœ¢æãå®æœ
ããå Žåã«ã¯ã䜿çšããè²çŽ ã«ãèç±æ§ããã€ãŠ
容æã«èžçºæ°åå¯èœã§ããããã€ããªããªãœå·¥çš
ã§ã®æº¶å€åŠçã«èãããšãã補é é¢ã§ã®å¶çŽã匷
ãããã«ã䜿çšã§ããè²çŽ ãéãããŠããŸããã
ã«ãæè²æ³ã«æ¯ã¹ãŠäžèšã®ãããªçš®ã ã®å©ç¹ãã
ãã«ãããããããèžçæ³ã«ãã€ãŠåœ¢æãããã«
ã©ãŒãã€ã«ã¿ãŒã¯æ®åããŠããªãã€ãã ããªãã¡ãèžçå¯èœãªè²çŽ ã«å¶éããããèžç
å¯èœãªè²çŽ ãçšããŠã«ã©ãŒãã€ã«ã¿ãŒã圢æããŠ
ããã«ã©ãŒãã€ã«ã¿ãŒã«æå®ã®åå ç¹æ§ãåŸãã
ãªãå Žåãå€ãããŸããèžçå¯èœãªè²çŽ ã®ãªãã§
ããè²çŽ ã®èžçå±€ããã¿ãŒã³ãã³ã°ããéã«ãã¬
ãžã¹ãå¡åžãçŸåã«ããã溶å€åŠççã®åå·¥çšäž
ã§ãè²çŽ èã溶解ããŠããŸã€ããããŸãã溶解ãŸ
ã§ã«ã¯è³ããªããšãåå ç¹æ§ãå€åããŠããŸã€
ãŠãææã®åå ç¹æ§ãåŸãããªããã®ãå€ããã
ã§ããã äŸãã°ãç·è²çè²å±€ãèžçæ³ã«ãã€ãŠåœ¢æãã
ããšããå ŽåãåŸæ¥ãã¿ãã·ã¢ãã³ç³»è²çŽ ãå€ã
çšããããŠããããåŸæ¥ç¥ãããŠããèžç局圢æ
çšã®ãã¿ãã·ã¢ãã³ç³»è²çŽ ã¯ãåºæ¬æ§é ãšããŠã®
ãã¿ãã·ã¢ãã³ç°ãååŠçã«ãç±çã«ã極ããŠå®
å®ãªã®ã§ãèžçæ³ãè溶å€æ³ã«åªããŠããåé¢ã
åå ç¹æ§ã«ã€ããŠã¯ãæŠããŠéè²åŽã«ãã€ãŠãã
å Žåãå€ããå³å¯ã«ç·è²ãšããŠçšããå Žåå¿ ãã
ãååãªåå ç¹æ§ãæãããã®ã§ã¯ãªãã€ãã æ¬çºæã¯ãã®ãããªåé¡ã«éã¿ãªããããã®ã§
ãããç¹ã«ã«ã©ãŒãã€ã«ã¿ãŒã®æããç·è²çè²å±€
ãèžçæ³ã«ãã€ãŠåœ¢æããå Žåã«ãåå ç¹æ§ã®è£œ
é ã®äž¡é¢ããã¿ãŠãã©ã³ã¹ã®ãšãã奜é©ãªè²çŽ ã
èŠãåºãããšã«ããå®æããããã®ã§ããã æ¬çºæã®ç®çã¯ãèç±æ§ããã³è溶å€æ§ã«åª
ãããã€åå ç¹æ§ã«ãåªããè²çŽ ããèžçæ³ã«ã
ã圢æãããçè²å±€ãæããã«ã©ãŒãã€ã«ã¿ãŒã
æäŸããããšã«ããããªãã§ãåŸæ¥ãæå®ã®åå
ç¹æ§ãåŸããã«ããã€ãç·è²çè²å±€ã«ãåªããå
å ç¹æ§ãåŸãããšã®ã§ããã«ã©ãŒãã€ã«ã¿ãŒãæ
äŸããããšã«ããã æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã¯ããªã¯ã¿âïŒïŒïŒ
âããšãã«ãã¿ãã·ã¢ãã³ç³»è²çŽ ããã³ã¢ã³ãã©
ããã³ç³»è²çŽ ãèžçããŠåœ¢æãããç·è²è²çŽ å±€ã
æããããšãç¹åŸŽãšãããã®ã§ããã æ¬çºæã§ã¯ãç·è²è²çŽ å±€ãšããŠãªã¯ã¿âïŒïŒïŒ
âããšãã«ãã¿ãã·ã¢ãã³ç³»è²çŽ ãšã¢ã³ãã©ãã
ã³ç³»è²çŽ ã®é»è²è²çŽ ãšã䜵çšããããšã«ããããª
ã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³ã®ãã€é
è²åå æåãã«ããããåªããç·è²ã®åå ç¹æ§ã
æããçè²å±€ã圢æãããã®ã§ããã æ¬çºæã§äœ¿çšãããªã¯ã¿âïŒïŒïŒâããšãã«ã
ã¿ãã·ã¢ãã³ç³»è²çŽ ãšããŠã¯ãäŸãã°ïŒã¡ã¿ã«ã
ãªãŒïŒãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ã
ã³ãåã³äžèšã®æ§é åŒã§ç€ºããããªã¯ã¿âïŒïŒïŒ
âããšãã«ãã¿ãã·ã¢ãã³ã®éå±é¯å¡©ãæããã
ãšãã§ããã äžèšåŒäžãã¯CuïŒGaOHïŒVOïŒNiïŒPdïŒ
PbïŒMgïŒCaãŸãã¯Coã§ããã èžçæ³ã«çšããããè²çŽ ã¯ãæ¬æ¥ãèç±æ§ã«åª
ãããã®ã§ãªããã°ãªããªããäžè¬ã«ææ©è²çŽ ã¯
ãã®ååŠæ§é ã«ãã€ãŠå·®ãã¿ããããã®ã®ãç±ç
ã«äžå®å®ã§å解ãèµ·ããæããã®ãå€ãã ããã«å¯ŸããŠãäžèšã®ãªã¯ã¿âïŒïŒïŒâããšã
ã«ãã¿ãã·ã¢ãã³ç³»è²çŽ ã¯ãã¿ãã·ã¢ãã³ç³»è²çŽ
ã§ããããã®ãã¿ãã·ã¢ãã³ç°ã«ãã€ãŠç±çã«æ¥µ
ããŠå®å®ã§ãããå ç±ããŠãå解ããããšãªãã
æå®ã®æž©åºŠä»¥äžã«ãªããšå®¹æã«èžçããæ§è³ªãæ
ããŠãããèžçã«ãã€ãŠè²çŽ å±€ã圢æããã«ã¯æ¥µ
ããŠå¥œé©ã§ãããæŽã«åœ¢æãããèžçè²çŽ å±€ã¯ã
ãã以åŸã«ææã«å¿ããŠè¡ãªãããç±åŠçãçµãŠ
ãå®å®ããŠããããã®åå ç¹æ§ãå€åãããå€è³ª
ãããããããšããªãã äžèšã®ãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ã
ã³ç³»è²çŽ ã®åå ç¹æ§ã¯ããããã«éè²åŽã«ãã€ãŠ
ãããããå³å¯ãªç·è²è²çŽ å±€ãšããŠäœ¿çšããå Ž
åãå åã§ã¯ãªãããã®ãããæ¬çºæã®ã«ã©ãŒã
ã€ã«ã¿ãŒã¯ãäžèšã®ãªã¯ã¿âïŒïŒïŒâããšãã«ã
ã¿ãã·ã¢ãã³ç³»è²çŽ ãè²è£æ£ããŠå³å¯ãªç·è²è²çŽ
å±€ãšãããã®ã§ããã ãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³ç³»è²
çŽ ã®è²è£æ£ã«çšããè²çŽ ãšããŠã¯ãéãç«ã¡äžã
ç¹æ§ãæããé»è²è²çŽ ã§ãªããã°ãªããªãããŸã
èžçæ³ã§åœ¢æããã®ã§ãªã¯ã¿âïŒïŒïŒâããšãã«
ãã¿ãã·ã¢ãã³ç³»è²çŽ ã«å¹æµããèžçæ§ãšè溶å€
æ§ããå Œãããªããå¿ èŠãããããæ¬çºæã§çšã
ãã¢ã³ãã©ããã³ç³»é»è²è²çŽ ã¯ãããã®ç¹æ§ãå š
ãŠæºè¶³ãããã®ã§ããããªã¯ã¿âïŒïŒïŒâããšã
ã«ãã¿ãã·ã¢ãã³ç³»è²çŽ ãšã®çµåãã«ãããŠèžç
åã®ããããç·çè²å±€åœ¢æãå¯èœã«ãããã®ã§ã
ãã ãŸãããªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ã
ã³ç³»è²çŽ ãšã¢ã³ãã©ããã³ç³»è²çŽ ãšãçµã¿åããŠ
åŸãããç·è²è²çŽ å±€ã¯ãç·è²ã®æ³¢é·åã®ééæ§ã«
åªãããå³ã¡ããªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ã
ã·ã¢ãã³ã®åå ç¹æ§ã¯ãééé åãé·æ³¢é·åŽãŸã§
䌞ã³ãŠããããããªã¯ã¿âïŒïŒïŒâããšãã«ãã¿
ãã·ã¢ãã³ãã¢ã³ãã©ããã³ç³»è²çŽ ã§è²è£æ£ããŠ
ãæ倧ééçãé«ããšããç·è²è²çŽ å±€ãšããŠåªã
ãåå ç¹æ§ã®ã«ã©ãŒãã€ã«ã¿ãŒãšãªãã æ¬çºæã§çšããããã¢ã³ãã©ããã³ç³»è²çŽ ãšã¯
ã¢ã³ãã©ããã³ã®èªå°äœåã³é¡äŒŒã®å€ç°åŒããã³
ããããã¢ã³ãã©ããã³ç³»è²çŽ ã¯ç±çã«å®å®ã§é«
æž©ã«æŒããŠå解ããããšã¯ãªããæå®ã®æž©åºŠä»¥äž
ã«ãªããšå®¹æã«èžçºããæ§è³ªãæããããèžçã«
ãã€ãŠè²çŽ èå¹ã圢æããã«ã¯æ¥µããŠå¥œé©ã§ã
ãã èžçã«ãã€ãŠåœ¢æãããã¢ã³ãã©ããã³ç³»è²çŽ
ã®èå¹ã¯ææ©èã«ãã°ãã°èŠããããããªçãè
ã§ã¯ãªã極ããŠç·»å¯ã§ãããã¬ã©ã¹ã®ãããªç¡æ©
ç©ã®è¡šé¢ã«ã匷ãå¯çããŠãããèžçèãšããŠã
ãããç©æ§ãæããŠããã ãŸãäžæ¹ãã®èžçèã¯ææ©æº¶å€ã«å¯ŸããŠåªãã
èæ§ãæããŠãããå³ã¡ãã¢ã«ã³ãŒã«é¡çã®è²§æº¶
åªã¯å¿è«ãã±ãã³é¡ããšã¹ãã«é¡ããšãŒãã«ã¢ã«
ã³ãŒã«é¡ãããã²ã³æº¶å€çã®è¯æº¶åªã«å¯ŸããŠãã»
ãšãã©æº¶è§£ãããåå ç¹æ§çã«ãäœãå€åãèµ·ã
ããšããªããåŸã€ãŠãè²çŽ å±€ã«å¯ŸããŠãã¬ãžã¹ã
ã®å¡åžãçŸåãæœããŠãå šãäœãæ¯éããªãã®
ã§ãè²çŽ å±€ã®åŸ®çŽ°å å·¥ã容æã«è¡ãªããããã®ã§
ããã埮现ã«ã©ãŒãã€ã«ã¿ãŒçã®è£œé ã«æ¥µããŠå¥œ
é©ã§ããã ã¢ã³ãã©ããã³ç³»é»è²è²çŽ ã®æ§é ã次ã«ç€ºãã ãã®æ§ãªã¢ã³ãã©ããã³ç³»è²çŽ ãšããŠåžè²©ãã
ãŠããç©ã®äžäŸãåååãçšããŠä»¥äžæããã ã¯ãã¢ãã¿ãŒã«ã€ãšããŒ2AR
ïŒããã¬ã€ã®ãŒè£œïŒC.I.No.70600 ããªãªãã¢ãŒã¹ãã€ãšããŒE3R ïŒãã€ãšã«è£œïŒ ããªãªã²ã³ã€ãšããŒL1560
ïŒBASF補ïŒC.I.No.68420 ã«ã€ã»ããã€ãšããŒïŒ¥â
ïŒæ¥æ¬åè¬è£œïŒC.I.No.65049 ã¯ãã¢ãã¿ãŒã«ã€ãšããŒAGR
ïŒããã¬ã€ã®ãŒè£œïŒ ãã€ãã©ã¹ãã€ãšããŒE2G ïŒãã€ãšã«è£œïŒ ããã³ã¹ã¬ã³ã€ãšããŒGCN
ïŒäœåååŠè£œïŒC.I.No.67300 ãã±ã¹ã¬ã³ã€ãšããŒGK
ïŒäžäºæ±å§è£œïŒC.I.No.61725 ã€ã³ãã³ã¹ã¬ã³ããªã³ãã€ã³ã°ã€ãšããŒGOK
ïŒããã¹ã補ïŒC.I.No.59100 ã¢ã³ãã©ãŸãŒã«ã€ãšããŒïŒ¶
ïŒããã¹ã補ïŒC.I.No.60531 ãã±ã¹ã¬ã³ãœãªãŠãã«ã€ãšããŒ12G
ïŒäžäºæ±å§è£œïŒC.I.No.60605 ãã±ã¹ã¬ã³ã€ãšããŒGF
ïŒäžäºæ±å§è£œïŒC.I.No.66510 ããã³ã¹ã¬ã³ã€ãšããŒGCF
ïŒäœåååŠè£œïŒC.I.No.65430 ã€ã³ãã¹ã¬ã³ã€ãšããŒ3G
ïŒãã€ãšã«è£œïŒC.I.No.65405 ããã³ã¹ã¬ã³ã€ãšããŒ4GL ïŒäœåååŠè£œïŒ ã€ã³ãã¹ã¬ã³ã€ãšããŒ5GK
ïŒãã€ãšã«è£œïŒC.I.No.65410 ãã©ã³ã¹ã¬ã³ã€ãšããŒPGA
ïŒBASF補ïŒC.I.No.68400 ãããã³ã€ãšããŒ2G ïŒããã¬ã€ã®ãŒè£œïŒ ã€ã³ãã¹ã¬ã³ã€ãšããŒF2GC ïŒããã¹ãè£œïŒ ã¢ã³ãã©ãŸãŒã«ã€ãšããŒIGG ïŒããã¹ãè£œïŒ ã€ã³ãã¹ã¬ã³ã€ãšããŒ5GF ïŒBASFè£œïŒ ãã±ã³ã¹ã¬ã³ã€ãšããŒ3GL ïŒäžäºæ±å§è£œïŒ ã€ã³ãã¹ã¬ã³ã€ãšããŒLGF ïŒBASFè£œïŒ ã¢ãã©ã€ãã€ãšããŒFR ïŒICIè£œïŒ ã«ã€ã»ããã€ãšããŒïŒ¥âAR ïŒæ¥æ¬åè¬è£œïŒ ãªã©ããããããã ç·è²çŽ å±€ã®åœ¢æã¯ããªã¯ã¿âïŒïŒïŒâããšãã«
ãã¿ãã·ã¢ãã³ç³»è²çŽ ãšã¢ã³ãã©ããã³ç³»è²çŽ ã
é 次èžçç©å±€ããæ¹æ³ãäžè¬çã§ããããæ··åèž
çãããã¯åæèžçã§ãããŸããªããææã®åå
ç¹æ§ã«å¿ããŠããããã®èååã¯èžçéãå¶åŸ¡ã
ããéåžžã¯ããããèåã«ããŠ500ã10000â«ãé©
åã§ããã 次ã«æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã圢æããå Žå
ã®èžçè²çŽ å±€ã®ãã¿ãŒã³ãã³ã°ã«ã€ããŠèª¬æã
ãã èžçè²çŽ å±€ã®ãã¿ãŒã³ãã³ã°æè¡ãšããŠã¯ã代
è¡šçã«ã¯ããã©ã€ãšããã³ã°æ³ãšãªãããªãæ³ã
ããã ãã©ã€ãšããã³ã°æ³ã¯ãäŸãã°ã¬ã©ã¹ãªã©ã®åº
æ¿äžã«èšããããèžçè²çŽ å±€äžã«ã圢æããããš
ãããã¿ãŒã³ã«å¯Ÿå¿ãã圢ç¶ã®ã¬ãžã¹ããã¿ãŒã³
ãèšããããããã¹ã¯ãšããŠãã©ãºããããã¯ã€
ãªã³ãšããã³ã°ã§ãèžçè²çŽ å±€ã®ãã¹ã¯ã«èŠãã
ãéšå以å€ã®éšåãåºæ¿äžããé€å»ããè²çŽ ãã¿
ãŒã³ã圢æãããã®ã§ãããïŒç¹éæ58â34861
çïŒããã®æ¹æ³ã§ã¯æè²æ³ã®åŠãäžéå±€ã®åœ¢æã¯
äžçšã§ãããããã®ãããè²çŽ ãã¿ãŒã³äžã«ã¬ãž
ã¹ããã¹ã¯ãæ®ã€ãŠããŸãããããããã®ãã¹ã¯
ãè²çŽ å±€ã«äœãæå·ãäžããã«é€å»ããããšã¯æ¥µ
ããŠå°é£ãªãããçµå±å®è³ªçã«å åŠçã«ã¯äžçšãª
ã¬ãžã¹ããã¹ã¯ãè²çŽ å±€ã®äžã«ç©å±€ãããïŒå±€æ§
æã«ãªãã äžæ¹ããªãããªãæ³ã«ããæ¹æ³ã§ã¯ãäŸãã°ãŸ
ãåºæ¿äžã«ã圢æããããšãããã¿ãŒã³ã«å¯Ÿå¿ã
ã圢ç¶ã®ã¬ãžã¹ããã¿ãŒã³ããçŸå液ã«æº¶è§£å¯èœ
ãªç©è³ªãäŸãã°ã¬ãžã¹ããçšããŠèšãããã次ã«
ãã®ã¬ãžã¹ããã¿ãŒã³ãèšããããŠããåºæ¿äžã«
è²çŽ å±€ãèžçãããããã®ããã«ããŠåºæ¿äžã«
ã¯ãé€å»ãã¹ãè²çŽ å±€ã®äžéšã«ã¬ãžã¹ããã¿ãŒã³
ã圢æãããç¶æ ãåŸãããã次ã«ããã®åºæ¿ã¯
çŸå液ã§åŠçããããã®éã¬ãžã¹ããã¿ãŒã³ã¯æº¶
解åã¯å¥é¢ããŠåºæ¿äžããé€å»ãããããã®éã
ã¬ãžã¹ããã¿ãŒã³ãšãšãã«ãã®ã¬ãžã¹ããã¿ãŒã³
äžã«ããè²çŽ å±€ãåºæ¿äžããé€å»ãããè²çŽ å±€ã®
åºæ¿äžã«çŽæ¥ç©å±€ãããéšåãåºæ¿äžã«æ®ãããŠ
èžçè²çŽ å±€ã®ãã¿ãŒã³ãã³ã°ãè¡ãªããããåŸã€
ãŠããªãããªãæ³ã«ããã°ãåºæ¿äžã®èžçè²çŽ å±€
ã«ã¯äœãçŽæ¥çãªäœçšãåãŒãããšãªããç©çç
ã«åºæ¿äžããèžçè²çŽ å±€ã®äžçšéšåãé€å»ããã
ãšãã§ããã è²çŽ å±€ã®ãªãããªãæ³ã«ãããã¿ãŒã³ãã³ã°ã«
çšããã¬ãžã¹ããšããŠã¯ãåŸã«ãçŸå液ã«ããå¥
é¢åŠçæã«æº¶è§£å¯èœã§ããã°ãã¬åãããžåãå
ããªããããããã¬åã§ã¯äžè¬ã«èŒ»å°ç·ã®ç §å°ã§
æ¶æ©ãé²ã¿ã溶解ããã«ã¯åŒ·ã溶解åããã€æº¶å€
ãå¿ èŠãšãªããåŸã€ãŠè²çŽ å±€ã«æå·ãäžããã溶
解ãããããããã®ã§å¥œãŸããã¯ãªãã ãã®ç¹ããžåã¬ãžã¹ãã§ã¯ãç¹ã«ã¬ãžã¹ããã¿
ãŒã³åœ¢æåŸãå šé¢ã«èŒ»å°ç·ãç §å°ããã°ã¬ãžã¹ã
ãçŸå液ã«å¯æº¶æ§ã«ãªãã®ã§ããã¬åã«æ¯ã¹ãŠè²
çŽ ã溶解ãã«ãã溶å€ãéžæã§ããã®ã§ãªãããª
ãã«ã¯å¥œé©ã§ããããŸãããžåã¬ãžã¹ããæš¹èæ
åã®çš®é¡ãå€å²ã«ããã€ãŠããããã®å¡åžãçŸå
ã«äœ¿çšããã溶å€ãæ§ã ã§ãããè²çŽ ã«å¯ŸããŠã
ãäœçšæ§ã®å°ãªã溶å€ã®äœ¿ããããžåã¬ãžã¹ãã
éžæããããšãæãŸãããäžäŸãšããŠéååäœãš
ããŠäžèšæ§é ã§ãããããå«ããçŽ ã¡ã¿ã¯ãªã¬ãŒ
ããäž»äœãšããããžåã¬ãžã¹ãã奜é©äŸãšããŠæ
ããããããã®ã¬ãžã¹ãã¯ããšã¹ãã«é¡ãè³éŠæ
é¡ãããã²ã³åçåæ°ŽçŽ é¡ãªã©ã®æº¶è§£èœãé«ãè¯
溶åªã¯ç¡è«ã®ããšãã¢ã«ã³ãŒã«é¡ãªã©ã®æº¶è§£èœã
äœã貧溶åªã«ãè¯ã溶解ãããããè²çŽ èã«åœ±é¿
ã®å°ãªã溶å€ã䜿ããããã§ããã ãã®ãããªã¬ãžã¹ããšããŠã¯ãFPM210ïŒ
FBN110ããã³FBM120ïŒããããåååã§ãã€
ãã³å·¥æ¥è£œïŒãæããããã ããã§ãR1ããã³R2ã¯æ°ŽçŽ åã¯ã¢ã«ãã«åºã
R3ã¯åççŽ ã«å°ãªããšãïŒåã®ããçŽ ãçµåã
ãã¢ã«ãã«åºã§ããã 代衚çãªR1ïŒR2åã³R3ã®çµã¿åãã®äŸãšããŠ
ã¯æ¬¡ã®ãã®ãæããããšãã§ããã
ãè¡šã
ãã®ä»ã®ã¬ãžã¹ããšããŠã¯ã次ã®ãããªååå
ã§åžè²©ãããŠããåçš®ã®ãã®ãé©å®çšããããšã
ã§ããã AZã·ãªãŒãºïŒ111ïŒ119AïŒ120ïŒ340ïŒ1350BïŒ
1350JïŒ1370ïŒ1375ïŒ1450ïŒ1450JïŒ1470ïŒ
1475ïŒ2400ïŒ2415ïŒ2430
ïŒä»¥äžã·ãã¬ãŒç€Ÿè£œïŒ WaycoatïŒHPRâ204ïŒHPRâ205ïŒHPRâ
206ïŒHPRâ207ïŒ HPRâ1182ïŒWaycoatïŒMPR ïŒä»¥äžãã³ãç€Ÿè£œïŒ Kodak Micro Positive Resist 808
ïŒã³ããã¯ç€Ÿè£œïŒ Isofine Positive Resist
ïŒãã€ã¯ãã€ã¡ãŒãžãã¯ãããžãŒç€Ÿè£œïŒ PC 129ïŒ129SF ïŒããªã¯ããŒã ç€Ÿè£œïŒ OFPRïŒ77ïŒ78ïŒ800 OEBRïŒ1000ïŒ1010ïŒ1030 ODURïŒ1000ïŒ1001ïŒ1010ïŒ1013ïŒ1014
ïŒä»¥äžæ±äº¬å¿åç€Ÿè£œïŒ EBRïŒïŒïŒïŒ ïŒæ±ã¬è£œïŒ FMRïŒE100ïŒE101 ïŒå¯å£«è¬åå·¥æ¥è£œïŒ JSR Positive Photoresist PFR3003 ïŒæ¥æ¬åæãŽã ç€Ÿè£œïŒ Selectilux  ïŒã¡ã«ã¯ç€Ÿè£œïŒ 以äžèª¬æãããããªãã¿ãŒãã³ã°æ³ã«ãã€ãŠã
èžçè²çŽ å±€ããã¿ãŒãã³ã°ããã«ã©ãŒãã€ã«ã¿ãŒ
ã®æããè²ããšã«èžçè²çŽ å±€ã®åœ¢æãšãã®ãã¿ãŒ
ãã³ã°ãšãç¹°ãè¿ããŠè¡ãªããæå®ã®è€æ°è²ã®ã
ã¿ãŒã³ç¶ã®è²çŽ å±€ã圢æããåŸããããè²çŽ å±€äž
ã«ã¯ãä¿è·èãèšããããšãæãŸãããããã¯ãŽ
ãã®ä»çãå·ãšãã€ãè²çŽ å±€ã®æ¬ é¥ãé²ãããŸã
åçš®ç°å¢æ¡ä»¶ããè²çŽ å±€ãä¿è·ããããã§ããã
ãã®ä¿è·èã®åœ¢æã«ã¯éåžžç¥ãããŠããåçš®æ¹æ³
ã䜿ããã è²çŽ å±€ã®ä¿è·èã圢æããããšã®ã§ããææãš
ããŠã¯ãäŸãã°ããªãŠã¬ã¿ã³ãããªã«ãŒãããŒ
ããã·ãªã³ã³ãã¢ã¯ãªã«ããªãã©ãã·ãªã¬ã³çã®
ææ©æš¹èããSi3N4ïŒSiO2ïŒSiOïŒAl2O3ïŒTa2O3
çã®ç¡æ©èãæãããããããã®ãªãããé©å®éž
æããææãã¹ãã³ã³ãŒãããã€ãã³ãã³ã°ãã
ãŒã«ã³ãŒã¿ãŒçã®å¡åžæ³ãããã¯èžçæ³ã«ãã€ãŠ
èžçè²çŽ å±€äžã«ä¿è·å±€ã圢æããããšãã§ããã
ãã®ä¿è·å±€ã®åœ¢æã«ã¯ãåçš®æå æ§æš¹èäŸãã°å
çš®ã¬ãžã¹ãã䜿çšããããšãå¯èœã§ããã 以äžèª¬æãããããªèžçè²çŽ å±€ã®ãã¿ãŒã³ãã³
ã°ã¯é©åœãªåºæ¿äžã§è¡ãªãããšãã§ããçšããåº
æ¿ãšããŠã¯ãè²çŽ ã®èžçãå¯èœã§ããã圢æãã
ãã«ã©ãŒãã€ã«ã¿ãŒã«æå®ã®æ©èœãæãããã®ã§
ããã°ç¹ã«éå®ããããã®ã§ã¯ãªãã äŸãã°å ·äœçã«ä»¥äžã®ãã®ãåºæ¿ãšããŠäœ¿çšã
ãããšãã§ãããã¬ã©ã¹æ¿ãå åŠçšæš¹èæ¿ããŒã©
ãã³ãããªããã«ã¢ã«ã³ãŒã«ãããããã·ãšãã«
ã»ã«ããŒã¹ãã¡ãã«ã¡ã¿ã¯ãªã¬ãŒããããªãšã¹ã
ã«ãããã©ãŒã«ãããªã¢ãããªã©ã®æš¹èãã€ã«ã
è¥ããã¯æ¿ããããã¯ãã¿ãŒã³ç¶ã®è²çŽ å±€ãã«ã©
ãŒãã€ã«ã¿ãŒãšããŠé©çšããããã®ãšäžäœã«åœ¢æ
ããããšãå¯èœã§ããããã®å Žåã®åºæ¿ã®äžäŸãš
ããŠã¯ããã©ãŠã³ç®¡è¡šç€ºé¢ãæ®å管ã®åå é¢ã
CCDïŒBBDïŒCIDïŒBASISçã®åºäœæ®åçŽ åã
圢æããããŠãšããŒãïœâSiïŒã¢ã¢ã«ãã¢ã¹ã·ãª
ã³ã³ïŒãçšããŠå¯çåã€ã¡ãŒãžã»ã³ãµãŒã液æ¶ã
ã€ã¹ãã¬ãŒé¢ãã«ã©ãŒé»ååççšæå äœçããã
ãããã èžçãããè²çŽ å±€ãšäžå°ã®åºæ¿ãäŸãã°ã¬ã©ã¹
çãšã®æ¥çæ§ãå¢ãå¿ èŠãããå Žåã¯ãã¬ã©ã¹åº
æ¿çã«ããªãŠã¬ã¿ã³æš¹èãããªã«ãŒãããŒãæš¹
èãã·ã©ã³ã«ãããªã³ã°å€çããããããèãå¡
åžããŠããèžçèã圢æãããšå¹æçã§ããã 以äžå³é¢ãåç §ãã€ã€ä»£è¡šçãªæ¬çºæã®ã«ã©ãŒ
ãã€ã«ã¿ãŒã®åœ¢ææ³ããç·è²ã¹ãã©ã€ããã€ã«ã¿
ãŒã圢æããå ŽåãäžäŸãšããŠèª¬æããã ãŸããããžåã¬ãžã¹ããææã®åºæ¿äžã«ã¹ãã³
ããŒãçšããŠå転å¡åžããã也ç¥åŸé©åœãªæž©åºŠæ¡
件äžã§ã¬ãžã¹ãå±€ãããªããŒã¯ãããã€ãã§ã¬ãž
ã¹ãæ床ãæããå ãŸãã¯é»åããŒã ã§ã圢æã
ãããšãããã¿ãŒã³ïŒã¹ãã©ã€ãç¶ãã¿ãŒã³ïŒã«
察å¿ããŠæå®ã®ãã¿ãŒã³åœ¢ç¶ãæãããã¹ã¯ãä»
ããŠã¬ãžã¹ãå±€ãé²å ããæŽã«ãããçŸåããŠã
ã¬ãžã¹ããã¿ãŒã³ã圢æãããå¿ èŠã«å¿ããŠãçŸ
ååã«ã¬ãžã¹ãèã®ã²ãã¿ãç·©åããç®çã§ã®å
åŠçãçŸååŸãèã®èšæœ€ãæŒããããã®ãªã³ã¹åŠ
çãè¡ãªã€ãŠãè¯ãã çŸåã«ãã€ãŠãã¬ãžã¹ãã®æ®èããæ®æž£ããã
ãã¹ã«ã ãåããããªãå Žåã¯ããã©ãºãç°åæ³
ã«ãã€ãŠé€å»ããããšãå¯èœã§ããã 以äžã®å·¥çšã«ãã€ãŠç¬¬ïŒå³ã«ç€ºãããã¬ãžã¹ã
ãã¿ãŒã³ïŒãåºæ¿ïŒäžã«åœ¢æããããã€ãã§ç¬¬ïŒ
å³ã®åŠãã¬ãžã¹ããã¿ãŒã³ïŒã®å šé¢ã«ã¬ãžã¹ãæ
床ãæããå ãŸãã¯é»åããŒã ãç §å°ããããã
ã¯ã¬ãžã¹ãã®äž»éåæãå解ãè¡ãªãããšã«ãã€
ãŠåŸã®ã¬ãžã¹ããã¿ãŒã³ã®æº¶è§£é€å»ã容æã«ãã
ãã®ã§ããããçãããšãå¯èœã§ãããçããå Ž
åã«ã¯ããã®åã ã匷ã溶解æ§ã®æº¶åªã䜿ãå¿ èŠ
ãããã ã€ãã§ç¬¬ïŒå³ã®åŠããã¬ãžã¹ããã¿ãŒã³ã®èšã
ãããŠããåºæ¿ïŒã®é¢ã«ãå ã«æãããããªãªã¯
ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³è¥ããã¯ã
ã®éå±é¯äœãšã¢ã³ãã©ããã³ç³»è²çŽ ãšãç空èžç
æ³ã«ãã€ãŠèžçããè²çŽ å±€ïŒã圢æããã è²çŽ å±€ïŒã®åãã¯ãææã®åå ç¹æ§ã«å¿ããŠæ±º
ãããããéåžž500ã10000â«çšåºŠã§ããã 次ã«ãè²çŽ å±€ïŒã®èšããããŠããåºæ¿ããè²çŽ
å±€äžã®ã¬ãžã¹ããã¿ãŒã³ïŒãé€å»ããããã«è²çŽ
ã溶解ãããããŸãåå ç¹æ§ããããªããã«ã¬ãž
ã¹ããã¿ãŒã³ã®ã¿ã溶解ãããã¯åºæ¿ããå¥é¢ã
ãã溶åªã«æµžæŒ¬ããã ã¬ãžã¹ããã¿ãŒã³ã®é€å»ã«ãã€ãŠåæã«ãã®äž
ã«ããè²çŽ å±€ãé€å»ããããããããè£å©ããã
ãã«ã浞挬æã«è¶ é³æ³¢ã®ãšãã«ã®ãŒãå ããããš
ãæå¹ã§ããã ãã®ããã«ããŠã第ïŒå³ã®ãããªã¹ãã©ã€ãã
ã¿ãŒã³ç¶ã®ç·è²è²çŽ å±€ïŒã圢æããããšãã§ãã
æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒãåŸãããšãã§ããã ãªããïŒè²ä»¥äžãããªãæ¬çºæã®ã«ã©ãŒãã€ã«
ã¿ãŒã圢æããå Žåã«ã¯ãæŽã«å¿ èŠã«å¿ããŠãã
ãªãã¡çšãããããã€ã«ã¿ãŒã®è²ã®æ°ã«å¿ããŠã
第ïŒå³ãã第ïŒå³ãŸã§ã®å·¥çšããåè²ã«å¯Ÿå¿ãã
è²çŽ ãããããçšããŠç¹°ãè¿ããŠè¡ããäŸãã°ç¬¬
ïŒå³ã«ç€ºãããããªç°ãªãè²ã®çè²å±€ïŒïŒïŒåã³
ïŒã®ïŒè²ãããªãã«ã©ãŒãã€ã«ã¿ãŒã圢æããã
ãšãã§ããã ãªããæ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã¯ã第ïŒå³ã«
瀺ãããã«ãã€ã«ã¿ãŒäžéšã«å ã«æãããããªæ
æãã圢æããä¿è·å±€ïŒãæããŠãããã®ã§ãã€
ãŠãè¯ãã å®æœäŸ ïŒ ã¬ã©ã¹åºæ¿äžã«ã¹ãã³ããŒå¡åžæ³ã«ãããããž
åã¬ãžã¹ãODUR1013ïŒæ±äº¬å¿å補ïŒã1.0ÎŒïœã®
èåã«å¡åžããã次ã«ãã¬ãžã¹ãå±€ã«120âïŒ20
åéã®ããªããŒã¯ãè¡ãªã€ãåŸãæŽã«ãã®ã¬ãžã¹
ãå±€ãé 玫å€å ãçšããŠã圢æããããšãããã¿
ãŒã³ã®åœ¢ç¶ã«å¯Ÿå¿ãããã¿ãŒã³ãã¹ã¯ãä»ããŠé²
å ãããé²å çµäºåŸãåºæ¿äžã®ã¬ãžã¹ãå±€ã¯ã¬ãž
ã¹ãå°çšçŸå液ãå°çšãªã³ã¹æ¶²ã§åŠçãããåºæ¿
äžã«ã¯ã¬ãžã¹ããã¿ãŒã³ã圢æãããã次ã«ãã®
ã¬ãžã¹ããã¿ãŒã³ãåŸã«è¡ãªãçŸå液ã«ãããªã
ããªãåŠçã®ãšãã«ãçŸå液ã«å¯ŸããŠæº¶è§£ãæã
ãªãããã«ããã®ã¬ãžã¹ããã¿ãŒã³å šé¢ã«é 玫å€
å ãç §å°ããã ç¶ããŠã¬ãžã¹ããã¿ãŒã³ã®åœ¢æãããã¬ã©ã¹åº
æ¿ãšãã¢ã³ãã©ããã³ç³»è²çŽ ãšããŠã¯ãã¢ãã¿ãŒ
ã«ã€ãšããŒAGRïŒåååãããã¬ã€ã®ãŒè£œïŒãè©°
ããã¢ãªããã³è£œèžçããŒããšãç空èžçè£ çœ®ã®
ç空局å ã®æå®ã®äœçœ®ã«é 眮ããç空槜å ãææ°
ãããç空床10-5ã10-6torrã«ãããŠèžçããŒã
ã450ã550âã«å ç±ããŠçŽ4000â«ã®åãã§ãã¬ãž
ã¹ããã¿ãŒã³ã®åœ¢æãããŠããåºæ¿äžã«ã¯ãã¢ã
ã¿ãŒã«ã€ãšããŒAGRã®èžçå±€ã圢æããã åæ§ãªæ¹æ³ã«ãããé ãªã¯ã¿âïŒïŒïŒâããšã
ã«ãã¿ãã·ã¢ãã³ãçŽ2000â«ã®åãã«èžçããã æåŸã«ãèžççµäºåŸã®ã¬ã©ã¹åºæ¿ãå ã«çšãã
ã¬ãžã¹ãå°çšçŸå液ã«æµžæŒ¬æ¹æããŠã¬ãžã¹ããã¿
ãŒã³ã溶解ããªããèžçè²çŽ å±€ã®äžèŠéšåãåºæ¿
äžããé€å»ããããšã«ãã€ãŠåºæ¿äžã®ç·è²è²çŽ å±€
ãã¹ãã©ã€ãç¶ã«ãã¿ãŒã³ãã³ã°ããæ¬çºæã®ã«
ã©ãŒãã€ã«ã¿ãŒãåŸãã åŸãããç·è²è²çŽ ã®åå ç¹æ§ã第ïŒå³ã®æ²ç·ïŒ
ïŒã«ç€ºãããã®å³ã«ç€ºããããã«ãã¯ãã¢ãã¿ãŒ
ã«ã€ãšããŒAGRïŒæ²ç·ïŒïŒã§è£æ£ããããšã«ã
ããé ãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³
åç¬ã®ç¹æ§ïŒæ²ç·ïŒïŒã«æ¯ã¹ãŠéè²åŽãæ¹åãã
ãåªããç·è²ã®åå ç¹æ§ãåŸãããã å®æœäŸ ïŒ ã¢ã³ãã©ããã³ç³»é»è²è²çŽ ããã€ãã©ã¹ãã€ãš
ããŒE2GïŒãã€ãšã«è£œïŒã«å€ããŠãããšã¯å®æœäŸ
ïŒãšåæ§ãªæ¹æ³ã§æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã圢
æããã ãã®å Žåãå®æœäŸïŒã®å Žåãšåæ§ã«åå ç¹æ§ã®
æ¹åããããã¿ãŒã³ç¶ç·è²çè²å±€ãåŸããã å®æœäŸ ïŒ å®æœäŸïŒã®ç·è²ã¹ãã©ã€ããã€ã«ã¿ãŒã®åœ¢æã
ããã¬ã©ã¹åºæ¿äžã«ãéè²ã¹ãã©ã€ããã¿ãŒã³ã®
圢ç¶ã®å¯Ÿå¿ãããã¿ãŒã³ãã¹ã¯ãçšããŠã¬ãžã¹ã
å±€ã®é²å ãè¡ãªããæŽã«èžçè²çŽ å±€ã®åœ¢æçšè²çŽ
ãšããŠCuãã¿ãã·ã¢ãã³ãçšãã以å€ã¯å®æœäŸ
ïŒãšåæ§ã«ããŠéè²ã¹ãã©ã€ããã¿ãŒã³ãåºæ¿äž
ã®æå®äœçœ®ã«åœ¢æããã ãªããCuãã¿ãã·ã¢ãã³ãããªãèžçå±€ã®åœ¢
æã¯ãç空槜ã®ç空床ã10-5ã10-6torrãšããèž
çããŒãã450ã550âã«å ç±ããŠãå±€åãçŽ2000
â«ãšãªãããã«å®æœããã ããã«ããã®ããã«ããŠç·è²åã³éè²ã¹ãã©ã€
ããã¿ãŒã³ã®åœ¢æãããŠããåºæ¿äžã«ãèµ€è²ã¹ã
ã©ã€ããã¿ãŒã³ã®åœ¢ç¶ã«å¯Ÿå¿ãããã¿ãŒã³ãã¹ã¯
ãçšããŠã¬ãžã¹ãã®é²å ãè¡ãªããèžçè²çŽ 局圢
æçšè²çŽ ãšããŠã€ã«ã¬ãžã³ã¬ããBPTïŒåååã
ããã¬ã€ã®ãŒè£œãC.I.No.71127ïŒãçšããè²çŽ ã®
èžçãç空槜ã®ç空床ã10-5ã10-6torrãšããèž
çããŒãã400ã500âã«å ç±ããŠãå±€åãçŽ2000
â«ãšãªãããã«å®æœãã以å€ã¯ãå®æœäŸïŒãšåæ§
ã«ããŠåºæ¿äžã®æå®ã®äœçœ®ã«èµ€è²ã¹ãã©ã€ããã¿
ãŒã³ã圢æããïŒè²ã¹ãã©ã€ãã®çè²ãã¿ãŒã³ã
åŸãã æåŸã«ãŽã 系暹èã®ä¿è·èãšããŠåžè²©ã®ãã¬ã¬
ãžã¹ãODUR110WRïŒåååãæ±äº¬å¿å補ïŒãã
äžèšã®ããã«ããŠåœ¢æããïŒè²ã¹ãã©ã€ãçè²ã
ã¿ãŒã³äžã«å¡åžãããããããªããŒã¯ããã³å šé¢
é²å ã«ãã€ãŠç¡¬åãããæ¬çºæã®ïŒè²ã¹ãã©ã€ã
ã«ã©ãŒãã€ã«ã¿ãŒãå®æãããã ãã®ããã«ããŠåœ¢æãããïŒè²ã«ã©ãŒãã€ã«ã¿
ãŒã®åå ç¹æ§ãå³ïŒã«ç€ºãã å°ãïŒïŒã¯éè²ã¹ãã©ã€ããã¿ãŒã³ã®åå ç¹æ§
ã瀺ãæ²ç·ã§ãããïŒïŒã¯èµ€è²ã¹ãã©ã€ããã¿ãŒ
ã³ã®åå ç¹æ§ã瀺ãæ²ç·ã§ããã å®æœäŸ ïŒ èèãã©ã³ãžã¹ã¿ãŒãåºæ¿ãšããŠã該åºæ¿äžã«
æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã圢æããŠãªãã«ã©ãŒ
液æ¶è¡šç€ºçŽ åã®äœè£œã以äžã®ããã«ããŠå®æœã
ãã ãŸã第ïŒå³ïœã«ç€ºãããã«ãã¬ã©ã¹åºæ¿ïŒåå
åïŒ7059ãã³ãŒãã³ã°ç€Ÿè£œïŒïŒïŒäžã«1000â«ã®å±€
åã®I.T.Oç»çŽ é»æ¥µïŒïŒãããªããªãœå·¥çšã«ãã
ææã®ãã¿ãŒã³ã«æ圢ããåŸããã®é¢ã«æŽã«Al
ã1000â«ã®å±€åã«ç空èžçãããã®èžçå±€ãããª
ããªãœå·¥çšã«ããææã®åœ¢ç¶ã«ãã¿ãŒã¬ã³ãã³ã°
ããŠç¬¬ïŒå³ïœã«ç€ºããããªã²ãŒãé»æ¥µïŒïŒã圢æ
ããã ç¶ããŠãæå æ§ããªã€ããïŒåååïŒã»ãã³ã³
ãã¢ã€ã³ãæ±ã¬ç€Ÿè£œïŒãåèšé»æ¥µã®èšããããåº
æ¿ïŒïŒé¢äžã«å¡åžã絶çžå±€ïŒïŒã圢æãããã¿ãŒ
ã³é²å åã³çŸååŠçã«ãã€ãŠãã¬ã€ã³é»æ¥µïŒïŒãš
ç»çŽ é»æ¥µïŒïŒãšã®ã³ã³ã¿ã¯ãéšãæ§æããã¹ã«ãŒ
ããŒã«ïŒïŒã第ïŒå³ïœã«ç€ºãããã«åœ¢æããã ããã§ãåºæ¿ïŒïŒãå ç©æ§œå ã®æå®ã®äœçœ®ã«ã»
ããããå ç©æ§œå ã«H2ã§åžéãããSiH4ãå°å ¥
ããç空äžã§ã²ããŒæŸé»æ³ã«ãããåèšé»æ¥µïŒ
ïŒïŒïŒïŒåã³çµ¶çžå±€ïŒïŒã®èšããããåºæ¿ïŒïŒå š
é¢ã«2000â«ã®å±€åã®ïœâSiãããªãå å°é»å±€ïŒã€
ã³ããªã³ã·ãã¯å±€ïŒïŒïŒãå ç©ãããåŸããã®å
å°é»å±€ïŒïŒäžã«åŒç¶ãåæ§ã®æäœã«ãã€ãŠã1000
â«ã®å±€åã®n+å±€ïŒïŒã第ïŒå³ïœã«ç€ºããããã«
ç©å±€ããããã®åºæ¿ïŒïŒãå ç©æ§œããååºããå
èšn+å±€ïŒïŒåã³å å°é»å±€ïŒïŒã®ããããããã
ã®é ã«ãã©ã€ãšããã³ã°æ³ã«ããææã®åœ¢ç¶ã«ç¬¬
ïŒå³ïœ ã«ç€ºããæ§ã«ãã¿ãŒã³ãã³ã°ããã 次ã«ããã®ããã«ããŠå å°é»å±€ïŒïŒåã³n+å±€
ïŒïŒãèšããããŠããåºæ¿é¢ã«ãAlã1000â«ã®
å±€åã§ç空èžçããåŸããã®Alèžçå±€ãããªã
ãªãœå·¥çšã«ããææã®åœ¢ç¶ã«ãã¿ãŒã³ãã³ã°ã
ãŠã第ïŒå³ïœã«ç€ºããããªãœãŒã¹é»æ¥µïŒïŒåã³ã
ã¬ã€ã³é»æ¥µïŒïŒã圢æããã æåŸã«ãç»çŽ é»æ¥µïŒïŒã®ããããã«å¯Ÿå¿ãã
ãŠãå®æœäŸïŒãšåæ§ãªæ¹æ³ã«ããèµ€ãéåã³ç·ã®
ïŒè²ã®çè²ãã¿ãŒã³ã第ïŒå³ïœã«ç€ºãããã«åœ¢æ
ããåŸããã®åºæ¿é¢å šé¢ã«é åæ©èœãä»äžãã絶
çžèïŒïŒãšããŠã®ããªã€ããæš¹èã1200â«ã®å±€å
ã«å¡åžãã250âïŒïŒæéã®å ç±ãåŠçã«ãã€ãŠ
æš¹èã®ç¡¬åãè¡ãªããŠã«ã©ãŒãã€ã«ã¿ãŒãäžäœå
ãããèèãã©ã³ãžã¹ã¿ãŒãäœè£œããã ãã®ããã«äœè£œãããã«ã©ãŒãã€ã«ã¿ãŒä»ãè
èãã©ã³ãžã¹ã¿ãŒãçšããŠæŽã«ãã«ã©ãŒçšæ¶²æ¶è¡š
ç€ºçŽ åã圢æããã ããªãã¡ãã¬ã©ã¹åºæ¿ïŒåååïŒ7059ãã³ãŒã
ã³ã°ç€Ÿè£œïŒã®äžé¢ã®åèšã®æ¹æ³ãšåæ§ã«ããŠã
1000â«ã®I.T.Oé»æ¥µå±€ã圢æããæŽã«è©²é»æ¥µå±€äž
ã«é åæ©èœãä»äžããããªã€ããæš¹èãããªãè
å1200â«ã®çµ¶çžå±€ã圢æãããã®åºæ¿ãšå ã«åœ¢æ
ããã«ã©ãŒãã€ã«ã¿ãŒä»ãèèãã©ã³ãžã¹ã¿ãŒãš
ã®éã«æ¶²æ¶ãå°å ¥ãŠå šäœãåºå®ããŠãã«ã©ãŒçšæ¶²
æ¶è¡šç€ºçŽ åãåŸãã ãã®ããã«ããŠåœ¢æãããã«ã©ãŒçšæ¶²æ¶è¡šç€ºçŽ
åã¯ãè¯å¥œãªæ©èœãæãããã®ã§ãããã«ã©ãŒã
ã€ã«ã¿ãŒã®åå ç¹æ§ã¯ãå®æœäŸïŒåã³ïŒãšåæ§ã®
å¹æãåŸãããã å®æœäŸ ïŒ ïŒè²ã«ã©ãŒãã€ã«ã¿ãŒãç»çŽ é»æ¥µäžã«èšãã代
ãã«ã察åé»æ¥µäžã«èšãã以å€ã¯å®æœäŸïŒãšåæ§
ã«ããŠãæ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒãæããã«ã©
ãŒçšæ¶²æ¶è¡šç€ºçŽ åãåŸãã ãã®ããã«ããŠåœ¢æãããã«ã©ãŒçšæ¶²æ¶è¡šç€ºçŽ
åã¯ãè¯å¥œãªæ©èœãæãããã®ã§ãããã«ã©ãŒã
ã€ã«ã¿ãŒã®åå ç¹æ§ã¯å®æœäŸïŒåã³ïŒãšåæ§ãªå¹
æãåŸãããã å®æœäŸ ïŒ CCDïŒãã€ãŒãžãã«ããã«ããããã€ã¹ïŒã®åœ¢
æããããŠãšããŒãåºæ¿ãšããŠçšããCCDã®æ
ããååå ã»ã«ã«å¯Ÿå¿ããŠãã«ã©ãŒãã€ã«ã¿ãŒã®
æããåçè²ãã¿ãŒã³ãé 眮ãããããã«ãïŒè²
ã¹ãã©ã€ãã«ã©ãŒãã€ã«ã¿ãŒã圢æãã以å€ã¯ã
å®æœäŸïŒãšåæ§ã«ããŠæ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒ
ãæããã«ã©ãŒåºäœæ®åçŽ åã圢æããã ãã®ããã«ããŠåœ¢æãããã«ã©ãŒåºäœæ®åçŽ å
ã¯ãè¯å¥œãªæ©èœãæãããã®ã§ãããã«ã©ãŒãã€
ã«ã¿ãŒã®åå ç¹æ§ã¯ãå®æœäŸïŒãšåæ§ã®å¹æãåŸ
ããã å®æœäŸ ïŒ CCDïŒãã€ãŒãžãã«ããã«ããããã€ã¹ïŒã®åœ¢
æããããŠãšããŒã«ãå®æœäŸïŒã«æŒããŠåœ¢æãã
ã«ã©ãŒãã€ã«ã¿ãŒããCCDã®æããååå ã»ã«
ã«å¯Ÿå¿ããŠãã«ã©ãŒãã€ã«ã¿ãŒã®æããåçè²ã
ã¿ãŒã³ãé 眮ãããããã«äœçœ®åãããããŠè²Œç
ããã«ã©ãŒåºäœæ®åçŽ åã圢æããã ãã®ããã«ããŠåœ¢æãããã«ã©ãŒåºäœæ®åçŽ å
ã¯ãè¯å¥œãªæ©èœãæãããã®ã§ãããã«ã©ãŒãã€
ã«ã¿ãŒã®åå ç¹æ§ã¯ãå®æœäŸïŒåã³ïŒãšåæ§ã®å¹
æãåŸããã å®æœäŸ ïŒ æ¬çºæã®æ¹æ³ãé©çšããŠã第ïŒïŒå³ã®éšåå¹³é¢
該ç¥å³ã«ç€ºããããªã«ã©ãŒçšããªãã»ã³ãµãŒã¢ã¬
ã€ã®åœ¢æã第ïŒïŒå³ã«ç€ºããå·¥çšã«åŸã€ãŠä»¥äžã®
ããã«å®æœããã ãŸããã¬ã©ã¹åºæ¿ïŒåååïŒ7059ãã³ãŒãã³ã°
瀟補ïŒïŒïŒïŒã®äžã«ã°ããŒæŸé»æ³ã«ãã€ãŠïœâSi
ïŒã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ïŒå±€ãããªãå å°é»å±€
ïŒã€ã³ããªã³ã·ãã¯å±€ïŒïŒïŒïŒã第ïŒïŒå³ïœã«ç€º
ãããã«èšããã ããªãã¡ãH2ã§10容éïŒ ã«åžéãããSiH4ã
ã¬ã¹å§0.50TirrïŒRFïŒRadio RrequencyïŒãã¯ãŒ
10Wãåºæ¿æž©åºŠ250âã§ïŒæéåºæ¿äžã«å ç©ãã
ãããšã«ãã€ãŠ0.7ÎŒïœã®èåã®å å°é»å±€ïŒïŒïŒã
åŸãã ç¶ããŠããã®å å°é»å±€ïŒïŒïŒäžã«ã°ããŒæŸé»æ³
ã«ãã第ïŒïŒå³ïœã«ç€ºãããã«n+å±€ïŒïŒïŒãèš
ããã ããªãã¡ãH2ã§10容éïŒ ã«åžéãããSiH4ãšã
H2ã§100ppmã«åžéãããPH3ãšãïŒïŒ10ã§æ··å
ããã¬ã¹ãåæãšããŠçšãããã®ä»ã¯ãå ã®å å°
é»å±€ã®å ç©æ¡ä»¶ãšåæ§ã«ããŠå å°é»å±€ïŒïŒïŒã«é£
ç¶ããŠã0.1ÎŒïœã®å±€åã®n+å±€ïŒïŒïŒãèšããã 次ã«ã第ïŒïŒå³ïœã«ç€ºãããã«é»åããŒã èžç
æ³ã§Alã0.3ÎŒïœã®å±€åã«n+å±€ïŒïŒïŒäžã«å ç©ã
ããŠãå°é»å±€ïŒïŒïŒãå ç©ãããç¶ããŠã第ïŒïŒ
å³ïœã«ç€ºãããã«å°é»å±€ïŒïŒïŒã®å å€æéšãšãªã
éšåã«çžåœããéšåãé€å»ããã ããªãã¡ãããžåã®ãã€ã¯ãããžãã1300â27
ïŒåååãShipley瀟補ïŒããªãã¬ãžã¹ããçšããŠ
ææã®åœ¢ç¶ã«ããªãã¬ãžã¹ããã¿ãŒã³ã圢æãã
åŸããªã³é žïŒ85容éïŒ æ°Žæº¶æ¶²ïŒãç¡é žïŒ80容éïŒ
氎溶液ïŒãæ°·é ¢é žåã³æ°Žã16ïŒïŒïŒïŒïŒïŒã®å²å
ã§æ··åãããšããã³ã°æº¶æ¶²ãçšããŠé²åºéšïŒã¬ãž
ã¹ããã¿ãŒã³ã®èšããããŠããªãéšåïŒã®å°é»å±€
ïŒïŒïŒãåºæ¿äžããé€å»ããå ±éé»æ¥µïŒïŒïŒåã³
åå¥é»æ¥µïŒïŒïŒã圢æããã 次ã«ãå å€æéšãšãªãéšåã®n+å±€ïŒïŒïŒã第
ïŒïŒå³ïœ ã«ç€ºãããã«é€å»ããã å³ã¡ãäžèšãã€ã¯ãããžãã1300â27ããªãã¬
ãžã¹ããåºæ¿ããå¥é¢ããåŸãå¹³è¡å¹³æ¿åãã©ãº
ããšããã³ã°è£ 眮DEMâ451ïŒæ¥é»ã¢ãã«ã瀟補ïŒ
ãçšããŠãã©ãºããšããã³ã°æ³ïŒå¥åãªã¢ã¯ãã€
ãã€ãªã³ãšããã³ã°æ³ïŒã§RFãã¯ãŒ120Wãã¬ã¹
å§0.1Torrã§CF4ã¬ã¹ã«ãããã©ã€ãšããã³ã°ã
ïŒåéè¡ãªããé²åºéšã®n+å±€ïŒïŒïŒåã³å å°é»
å±€ïŒïŒïŒã®è¡šé¢å±€ã®äžéšãåºæ¿ããé€å»ããã ãªããæ¬å®æœäŸã§ã¯ããšããã³ã°è£ 眮ã®ã«ãœãŒ
ãææã®ã€ã³ãã©ã³ããŒã·ãšã³ãé²æ¢ããçºã«ã
ã«ãœãŒãäžã®ããªã·ãªã³ã³ã®ã¹ããã¿çšã¿ãŒã²ã
ãïŒïŒã€ã³ããçŽåºŠ99.999ïŒ ïŒã眮ãããã®äžã«
è©Šæãã®ããã«ãœãŒãææã®SUSãé²åºããéš
åã¯ããŒããç¶ã«åæãããããã³ã·ãŒãã§ã«ã
ãŒããSUSé¢ãã»ãšãã©ãã©ãºãã§ãããªãç¶
æ ã§ãšããã³ã°ãè¡ãªã€ãããã®åŸãçªçŽ ãïŒ
ïŒminã®é床ã§æµãããªãŒãã³å ã§200âïŒ60
åã®ç±åŠçãè¡ãªã€ãã ããããŠäœæãããããªãã»ã³ãµãŒã¢ã¬ã€ã®è¡š
é¢ã«ã次ã«ä¿è·å±€ã以äžã®ããã«ããŠåœ¢æããã ããªãã¡ãããªãã»ã³ãµãŒã¢ã¬ã€äžã«ã°ããŒæŸ
é»æ³ã«ãã€ãŠä¿è·å±€ãšããŠã®ã·ãªã³ã³ãã€ãã©ã€
ãå±€ïŒïŒïŒã圢æããã ããªãã¡ãH2ã§10容éïŒ ã«åžéãããSiH4ãš
100ïŒ NH3ãïŒïŒïŒã®æµéæ¯ã§æ··åããæ··åã¬ã¹
ãçšãããã®ä»ã¯å ã®ïœâSiå±€ã圢æããã®ãšå
æ§ã«ããŠã0.5ÎŒïœã®å±€åã®ã·ãªã³ã³ãã€ãã©ã€ã
ïŒïœâSiNHïŒå±€ïŒïŒïŒã第ïŒïŒå³ïœã«ç€ºããã
ã«åœ¢æããã æŽã«ããã®ä¿è·å±€ïŒïŒïŒãåºæ¿ãšããŠãå®æœäŸ
ïŒãšåæ§ã«ããŠãéïŒãç·ïŒãèµ€ïŒã®ïŒè²ã®çè²
ãã¿ãŒã³ãããªãã«ã©ãŒãã€ã«ã¿ãŒã圢æãã第
ïŒå³ã«ç€ºãããã«ãåããªãã»ã³ãµãŒäžã«ããã
ãçè²ãã€ã«ã¿ãŒãé 眮ãããã«ã©ãŒããªãã»ã³
ãµãŒã¢ã¬ã€ã圢æããã æ¬å®æœäŸã«æŒããŠåœ¢æãããã«ã©ãŒããªãã»ã³
ãµãŒã¢ã¬ã€ã«æŒããŠãã«ã©ãŒãã€ã«ã¿ãŒåœ¢ææã«
å®æœäŸïŒåã³ïŒã«æŒããã®ãšåæ§ãªå¹æãåŸãã
ãšãã§ãã圢æãããã«ã©ãŒããªãã»ã³ãµãŒã¯è¯
奜ãªæ©èœãæãããã®ã§ãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã«æŒããŠåœ¢æããã«ã©ãŒãã€ã«ã¿ãŒ
ããæ¥çå€ãçšããŠãå®æœäŸïŒã«æŒããŠåœ¢æãã
ããªãã»ã³ãµãŒã¢ã¬ã€äžã«è²Œçããããšã«ããã«
ã©ãŒããªãã»ã³ãµãŒã¢ã¬ã€ã圢æããã æ¬å®æœäŸã«æŒããŠåœ¢æããã«ã©ãŒããªãã»ã³ãµ
ãŒãå®æœäŸïŒã«æŒããŠåœ¢æãããã®ãšåæ§ã«ãè¯
奜ãªæ©èœãæãããã®ã§ãã€ãã æ¬çºæã«ããã°ãçè²å±€ãèç±æ§ããã³è溶å€
æ§ã«åªãããã€åå ç¹æ§ã«ãåªããè²çŽ ã®èžçã«
ãã圢æãããã®ã§ãèžçã«ããè²çŽ å±€ã®åœ¢æã
èžçè²çŽ å±€ã®ãã¿ãŒãã³ã°ãªã©ã®è£œé äžã®ç¹åã³
圢æãããã«ã©ãŒãã€ã«ã¿ãŒã®å åŠçæ©èœã®ç¹ã
ããåªããã«ã©ãŒãã€ã«ã¿ãŒãæäŸããããšãã§
ãããç¹ã«ãåŸæ¥ãæå®ã®åå ç¹æ§ãåŸããã«ã
ãã€ãç·è²è²çŽ å±€ã«ããªã¯ã¿âïŒïŒïŒâããšãã«
ãã¿ãã·ã¢ãã³ç³»è²çŽ ãã¢ã³ãã©ããã³ç³»è²çŽ ã§
è²è£æ§ããè²çŽ ãçšããããŠããã®ã§ãæ¬çºæã®
ã«ã©ãŒãã€ã«ã¿ãŒã®æããç·è²çè²å±€ã¯ãæå®ã®
åå ç¹æ§ãæãããã®ãšãªã€ãã
ã§åžè²©ãããŠããåçš®ã®ãã®ãé©å®çšããããšã
ã§ããã AZã·ãªãŒãºïŒ111ïŒ119AïŒ120ïŒ340ïŒ1350BïŒ
1350JïŒ1370ïŒ1375ïŒ1450ïŒ1450JïŒ1470ïŒ
1475ïŒ2400ïŒ2415ïŒ2430
ïŒä»¥äžã·ãã¬ãŒç€Ÿè£œïŒ WaycoatïŒHPRâ204ïŒHPRâ205ïŒHPRâ
206ïŒHPRâ207ïŒ HPRâ1182ïŒWaycoatïŒMPR ïŒä»¥äžãã³ãç€Ÿè£œïŒ Kodak Micro Positive Resist 808
ïŒã³ããã¯ç€Ÿè£œïŒ Isofine Positive Resist
ïŒãã€ã¯ãã€ã¡ãŒãžãã¯ãããžãŒç€Ÿè£œïŒ PC 129ïŒ129SF ïŒããªã¯ããŒã ç€Ÿè£œïŒ OFPRïŒ77ïŒ78ïŒ800 OEBRïŒ1000ïŒ1010ïŒ1030 ODURïŒ1000ïŒ1001ïŒ1010ïŒ1013ïŒ1014
ïŒä»¥äžæ±äº¬å¿åç€Ÿè£œïŒ EBRïŒïŒïŒïŒ ïŒæ±ã¬è£œïŒ FMRïŒE100ïŒE101 ïŒå¯å£«è¬åå·¥æ¥è£œïŒ JSR Positive Photoresist PFR3003 ïŒæ¥æ¬åæãŽã ç€Ÿè£œïŒ Selectilux  ïŒã¡ã«ã¯ç€Ÿè£œïŒ 以äžèª¬æãããããªãã¿ãŒãã³ã°æ³ã«ãã€ãŠã
èžçè²çŽ å±€ããã¿ãŒãã³ã°ããã«ã©ãŒãã€ã«ã¿ãŒ
ã®æããè²ããšã«èžçè²çŽ å±€ã®åœ¢æãšãã®ãã¿ãŒ
ãã³ã°ãšãç¹°ãè¿ããŠè¡ãªããæå®ã®è€æ°è²ã®ã
ã¿ãŒã³ç¶ã®è²çŽ å±€ã圢æããåŸããããè²çŽ å±€äž
ã«ã¯ãä¿è·èãèšããããšãæãŸãããããã¯ãŽ
ãã®ä»çãå·ãšãã€ãè²çŽ å±€ã®æ¬ é¥ãé²ãããŸã
åçš®ç°å¢æ¡ä»¶ããè²çŽ å±€ãä¿è·ããããã§ããã
ãã®ä¿è·èã®åœ¢æã«ã¯éåžžç¥ãããŠããåçš®æ¹æ³
ã䜿ããã è²çŽ å±€ã®ä¿è·èã圢æããããšã®ã§ããææãš
ããŠã¯ãäŸãã°ããªãŠã¬ã¿ã³ãããªã«ãŒãããŒ
ããã·ãªã³ã³ãã¢ã¯ãªã«ããªãã©ãã·ãªã¬ã³çã®
ææ©æš¹èããSi3N4ïŒSiO2ïŒSiOïŒAl2O3ïŒTa2O3
çã®ç¡æ©èãæãããããããã®ãªãããé©å®éž
æããææãã¹ãã³ã³ãŒãããã€ãã³ãã³ã°ãã
ãŒã«ã³ãŒã¿ãŒçã®å¡åžæ³ãããã¯èžçæ³ã«ãã€ãŠ
èžçè²çŽ å±€äžã«ä¿è·å±€ã圢æããããšãã§ããã
ãã®ä¿è·å±€ã®åœ¢æã«ã¯ãåçš®æå æ§æš¹èäŸãã°å
çš®ã¬ãžã¹ãã䜿çšããããšãå¯èœã§ããã 以äžèª¬æãããããªèžçè²çŽ å±€ã®ãã¿ãŒã³ãã³
ã°ã¯é©åœãªåºæ¿äžã§è¡ãªãããšãã§ããçšããåº
æ¿ãšããŠã¯ãè²çŽ ã®èžçãå¯èœã§ããã圢æãã
ãã«ã©ãŒãã€ã«ã¿ãŒã«æå®ã®æ©èœãæãããã®ã§
ããã°ç¹ã«éå®ããããã®ã§ã¯ãªãã äŸãã°å ·äœçã«ä»¥äžã®ãã®ãåºæ¿ãšããŠäœ¿çšã
ãããšãã§ãããã¬ã©ã¹æ¿ãå åŠçšæš¹èæ¿ããŒã©
ãã³ãããªããã«ã¢ã«ã³ãŒã«ãããããã·ãšãã«
ã»ã«ããŒã¹ãã¡ãã«ã¡ã¿ã¯ãªã¬ãŒããããªãšã¹ã
ã«ãããã©ãŒã«ãããªã¢ãããªã©ã®æš¹èãã€ã«ã
è¥ããã¯æ¿ããããã¯ãã¿ãŒã³ç¶ã®è²çŽ å±€ãã«ã©
ãŒãã€ã«ã¿ãŒãšããŠé©çšããããã®ãšäžäœã«åœ¢æ
ããããšãå¯èœã§ããããã®å Žåã®åºæ¿ã®äžäŸãš
ããŠã¯ããã©ãŠã³ç®¡è¡šç€ºé¢ãæ®å管ã®åå é¢ã
CCDïŒBBDïŒCIDïŒBASISçã®åºäœæ®åçŽ åã
圢æããããŠãšããŒãïœâSiïŒã¢ã¢ã«ãã¢ã¹ã·ãª
ã³ã³ïŒãçšããŠå¯çåã€ã¡ãŒãžã»ã³ãµãŒã液æ¶ã
ã€ã¹ãã¬ãŒé¢ãã«ã©ãŒé»ååççšæå äœçããã
ãããã èžçãããè²çŽ å±€ãšäžå°ã®åºæ¿ãäŸãã°ã¬ã©ã¹
çãšã®æ¥çæ§ãå¢ãå¿ èŠãããå Žåã¯ãã¬ã©ã¹åº
æ¿çã«ããªãŠã¬ã¿ã³æš¹èãããªã«ãŒãããŒãæš¹
èãã·ã©ã³ã«ãããªã³ã°å€çããããããèãå¡
åžããŠããèžçèã圢æãããšå¹æçã§ããã 以äžå³é¢ãåç §ãã€ã€ä»£è¡šçãªæ¬çºæã®ã«ã©ãŒ
ãã€ã«ã¿ãŒã®åœ¢ææ³ããç·è²ã¹ãã©ã€ããã€ã«ã¿
ãŒã圢æããå ŽåãäžäŸãšããŠèª¬æããã ãŸããããžåã¬ãžã¹ããææã®åºæ¿äžã«ã¹ãã³
ããŒãçšããŠå転å¡åžããã也ç¥åŸé©åœãªæž©åºŠæ¡
件äžã§ã¬ãžã¹ãå±€ãããªããŒã¯ãããã€ãã§ã¬ãž
ã¹ãæ床ãæããå ãŸãã¯é»åããŒã ã§ã圢æã
ãããšãããã¿ãŒã³ïŒã¹ãã©ã€ãç¶ãã¿ãŒã³ïŒã«
察å¿ããŠæå®ã®ãã¿ãŒã³åœ¢ç¶ãæãããã¹ã¯ãä»
ããŠã¬ãžã¹ãå±€ãé²å ããæŽã«ãããçŸåããŠã
ã¬ãžã¹ããã¿ãŒã³ã圢æãããå¿ èŠã«å¿ããŠãçŸ
ååã«ã¬ãžã¹ãèã®ã²ãã¿ãç·©åããç®çã§ã®å
åŠçãçŸååŸãèã®èšæœ€ãæŒããããã®ãªã³ã¹åŠ
çãè¡ãªã€ãŠãè¯ãã çŸåã«ãã€ãŠãã¬ãžã¹ãã®æ®èããæ®æž£ããã
ãã¹ã«ã ãåããããªãå Žåã¯ããã©ãºãç°åæ³
ã«ãã€ãŠé€å»ããããšãå¯èœã§ããã 以äžã®å·¥çšã«ãã€ãŠç¬¬ïŒå³ã«ç€ºãããã¬ãžã¹ã
ãã¿ãŒã³ïŒãåºæ¿ïŒäžã«åœ¢æããããã€ãã§ç¬¬ïŒ
å³ã®åŠãã¬ãžã¹ããã¿ãŒã³ïŒã®å šé¢ã«ã¬ãžã¹ãæ
床ãæããå ãŸãã¯é»åããŒã ãç §å°ããããã
ã¯ã¬ãžã¹ãã®äž»éåæãå解ãè¡ãªãããšã«ãã€
ãŠåŸã®ã¬ãžã¹ããã¿ãŒã³ã®æº¶è§£é€å»ã容æã«ãã
ãã®ã§ããããçãããšãå¯èœã§ãããçããå Ž
åã«ã¯ããã®åã ã匷ã溶解æ§ã®æº¶åªã䜿ãå¿ èŠ
ãããã ã€ãã§ç¬¬ïŒå³ã®åŠããã¬ãžã¹ããã¿ãŒã³ã®èšã
ãããŠããåºæ¿ïŒã®é¢ã«ãå ã«æãããããªãªã¯
ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³è¥ããã¯ã
ã®éå±é¯äœãšã¢ã³ãã©ããã³ç³»è²çŽ ãšãç空èžç
æ³ã«ãã€ãŠèžçããè²çŽ å±€ïŒã圢æããã è²çŽ å±€ïŒã®åãã¯ãææã®åå ç¹æ§ã«å¿ããŠæ±º
ãããããéåžž500ã10000â«çšåºŠã§ããã 次ã«ãè²çŽ å±€ïŒã®èšããããŠããåºæ¿ããè²çŽ
å±€äžã®ã¬ãžã¹ããã¿ãŒã³ïŒãé€å»ããããã«è²çŽ
ã溶解ãããããŸãåå ç¹æ§ããããªããã«ã¬ãž
ã¹ããã¿ãŒã³ã®ã¿ã溶解ãããã¯åºæ¿ããå¥é¢ã
ãã溶åªã«æµžæŒ¬ããã ã¬ãžã¹ããã¿ãŒã³ã®é€å»ã«ãã€ãŠåæã«ãã®äž
ã«ããè²çŽ å±€ãé€å»ããããããããè£å©ããã
ãã«ã浞挬æã«è¶ é³æ³¢ã®ãšãã«ã®ãŒãå ããããš
ãæå¹ã§ããã ãã®ããã«ããŠã第ïŒå³ã®ãããªã¹ãã©ã€ãã
ã¿ãŒã³ç¶ã®ç·è²è²çŽ å±€ïŒã圢æããããšãã§ãã
æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒãåŸãããšãã§ããã ãªããïŒè²ä»¥äžãããªãæ¬çºæã®ã«ã©ãŒãã€ã«
ã¿ãŒã圢æããå Žåã«ã¯ãæŽã«å¿ èŠã«å¿ããŠãã
ãªãã¡çšãããããã€ã«ã¿ãŒã®è²ã®æ°ã«å¿ããŠã
第ïŒå³ãã第ïŒå³ãŸã§ã®å·¥çšããåè²ã«å¯Ÿå¿ãã
è²çŽ ãããããçšããŠç¹°ãè¿ããŠè¡ããäŸãã°ç¬¬
ïŒå³ã«ç€ºãããããªç°ãªãè²ã®çè²å±€ïŒïŒïŒåã³
ïŒã®ïŒè²ãããªãã«ã©ãŒãã€ã«ã¿ãŒã圢æããã
ãšãã§ããã ãªããæ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã¯ã第ïŒå³ã«
瀺ãããã«ãã€ã«ã¿ãŒäžéšã«å ã«æãããããªæ
æãã圢æããä¿è·å±€ïŒãæããŠãããã®ã§ãã€
ãŠãè¯ãã å®æœäŸ ïŒ ã¬ã©ã¹åºæ¿äžã«ã¹ãã³ããŒå¡åžæ³ã«ãããããž
åã¬ãžã¹ãODUR1013ïŒæ±äº¬å¿å補ïŒã1.0ÎŒïœã®
èåã«å¡åžããã次ã«ãã¬ãžã¹ãå±€ã«120âïŒ20
åéã®ããªããŒã¯ãè¡ãªã€ãåŸãæŽã«ãã®ã¬ãžã¹
ãå±€ãé 玫å€å ãçšããŠã圢æããããšãããã¿
ãŒã³ã®åœ¢ç¶ã«å¯Ÿå¿ãããã¿ãŒã³ãã¹ã¯ãä»ããŠé²
å ãããé²å çµäºåŸãåºæ¿äžã®ã¬ãžã¹ãå±€ã¯ã¬ãž
ã¹ãå°çšçŸå液ãå°çšãªã³ã¹æ¶²ã§åŠçãããåºæ¿
äžã«ã¯ã¬ãžã¹ããã¿ãŒã³ã圢æãããã次ã«ãã®
ã¬ãžã¹ããã¿ãŒã³ãåŸã«è¡ãªãçŸå液ã«ãããªã
ããªãåŠçã®ãšãã«ãçŸå液ã«å¯ŸããŠæº¶è§£ãæã
ãªãããã«ããã®ã¬ãžã¹ããã¿ãŒã³å šé¢ã«é 玫å€
å ãç §å°ããã ç¶ããŠã¬ãžã¹ããã¿ãŒã³ã®åœ¢æãããã¬ã©ã¹åº
æ¿ãšãã¢ã³ãã©ããã³ç³»è²çŽ ãšããŠã¯ãã¢ãã¿ãŒ
ã«ã€ãšããŒAGRïŒåååãããã¬ã€ã®ãŒè£œïŒãè©°
ããã¢ãªããã³è£œèžçããŒããšãç空èžçè£ çœ®ã®
ç空局å ã®æå®ã®äœçœ®ã«é 眮ããç空槜å ãææ°
ãããç空床10-5ã10-6torrã«ãããŠèžçããŒã
ã450ã550âã«å ç±ããŠçŽ4000â«ã®åãã§ãã¬ãž
ã¹ããã¿ãŒã³ã®åœ¢æãããŠããåºæ¿äžã«ã¯ãã¢ã
ã¿ãŒã«ã€ãšããŒAGRã®èžçå±€ã圢æããã åæ§ãªæ¹æ³ã«ãããé ãªã¯ã¿âïŒïŒïŒâããšã
ã«ãã¿ãã·ã¢ãã³ãçŽ2000â«ã®åãã«èžçããã æåŸã«ãèžççµäºåŸã®ã¬ã©ã¹åºæ¿ãå ã«çšãã
ã¬ãžã¹ãå°çšçŸå液ã«æµžæŒ¬æ¹æããŠã¬ãžã¹ããã¿
ãŒã³ã溶解ããªããèžçè²çŽ å±€ã®äžèŠéšåãåºæ¿
äžããé€å»ããããšã«ãã€ãŠåºæ¿äžã®ç·è²è²çŽ å±€
ãã¹ãã©ã€ãç¶ã«ãã¿ãŒã³ãã³ã°ããæ¬çºæã®ã«
ã©ãŒãã€ã«ã¿ãŒãåŸãã åŸãããç·è²è²çŽ ã®åå ç¹æ§ã第ïŒå³ã®æ²ç·ïŒ
ïŒã«ç€ºãããã®å³ã«ç€ºããããã«ãã¯ãã¢ãã¿ãŒ
ã«ã€ãšããŒAGRïŒæ²ç·ïŒïŒã§è£æ£ããããšã«ã
ããé ãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³
åç¬ã®ç¹æ§ïŒæ²ç·ïŒïŒã«æ¯ã¹ãŠéè²åŽãæ¹åãã
ãåªããç·è²ã®åå ç¹æ§ãåŸãããã å®æœäŸ ïŒ ã¢ã³ãã©ããã³ç³»é»è²è²çŽ ããã€ãã©ã¹ãã€ãš
ããŒE2GïŒãã€ãšã«è£œïŒã«å€ããŠãããšã¯å®æœäŸ
ïŒãšåæ§ãªæ¹æ³ã§æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã圢
æããã ãã®å Žåãå®æœäŸïŒã®å Žåãšåæ§ã«åå ç¹æ§ã®
æ¹åããããã¿ãŒã³ç¶ç·è²çè²å±€ãåŸããã å®æœäŸ ïŒ å®æœäŸïŒã®ç·è²ã¹ãã©ã€ããã€ã«ã¿ãŒã®åœ¢æã
ããã¬ã©ã¹åºæ¿äžã«ãéè²ã¹ãã©ã€ããã¿ãŒã³ã®
圢ç¶ã®å¯Ÿå¿ãããã¿ãŒã³ãã¹ã¯ãçšããŠã¬ãžã¹ã
å±€ã®é²å ãè¡ãªããæŽã«èžçè²çŽ å±€ã®åœ¢æçšè²çŽ
ãšããŠCuãã¿ãã·ã¢ãã³ãçšãã以å€ã¯å®æœäŸ
ïŒãšåæ§ã«ããŠéè²ã¹ãã©ã€ããã¿ãŒã³ãåºæ¿äž
ã®æå®äœçœ®ã«åœ¢æããã ãªããCuãã¿ãã·ã¢ãã³ãããªãèžçå±€ã®åœ¢
æã¯ãç空槜ã®ç空床ã10-5ã10-6torrãšããèž
çããŒãã450ã550âã«å ç±ããŠãå±€åãçŽ2000
â«ãšãªãããã«å®æœããã ããã«ããã®ããã«ããŠç·è²åã³éè²ã¹ãã©ã€
ããã¿ãŒã³ã®åœ¢æãããŠããåºæ¿äžã«ãèµ€è²ã¹ã
ã©ã€ããã¿ãŒã³ã®åœ¢ç¶ã«å¯Ÿå¿ãããã¿ãŒã³ãã¹ã¯
ãçšããŠã¬ãžã¹ãã®é²å ãè¡ãªããèžçè²çŽ 局圢
æçšè²çŽ ãšããŠã€ã«ã¬ãžã³ã¬ããBPTïŒåååã
ããã¬ã€ã®ãŒè£œãC.I.No.71127ïŒãçšããè²çŽ ã®
èžçãç空槜ã®ç空床ã10-5ã10-6torrãšããèž
çããŒãã400ã500âã«å ç±ããŠãå±€åãçŽ2000
â«ãšãªãããã«å®æœãã以å€ã¯ãå®æœäŸïŒãšåæ§
ã«ããŠåºæ¿äžã®æå®ã®äœçœ®ã«èµ€è²ã¹ãã©ã€ããã¿
ãŒã³ã圢æããïŒè²ã¹ãã©ã€ãã®çè²ãã¿ãŒã³ã
åŸãã æåŸã«ãŽã 系暹èã®ä¿è·èãšããŠåžè²©ã®ãã¬ã¬
ãžã¹ãODUR110WRïŒåååãæ±äº¬å¿å補ïŒãã
äžèšã®ããã«ããŠåœ¢æããïŒè²ã¹ãã©ã€ãçè²ã
ã¿ãŒã³äžã«å¡åžãããããããªããŒã¯ããã³å šé¢
é²å ã«ãã€ãŠç¡¬åãããæ¬çºæã®ïŒè²ã¹ãã©ã€ã
ã«ã©ãŒãã€ã«ã¿ãŒãå®æãããã ãã®ããã«ããŠåœ¢æãããïŒè²ã«ã©ãŒãã€ã«ã¿
ãŒã®åå ç¹æ§ãå³ïŒã«ç€ºãã å°ãïŒïŒã¯éè²ã¹ãã©ã€ããã¿ãŒã³ã®åå ç¹æ§
ã瀺ãæ²ç·ã§ãããïŒïŒã¯èµ€è²ã¹ãã©ã€ããã¿ãŒ
ã³ã®åå ç¹æ§ã瀺ãæ²ç·ã§ããã å®æœäŸ ïŒ èèãã©ã³ãžã¹ã¿ãŒãåºæ¿ãšããŠã該åºæ¿äžã«
æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã圢æããŠãªãã«ã©ãŒ
液æ¶è¡šç€ºçŽ åã®äœè£œã以äžã®ããã«ããŠå®æœã
ãã ãŸã第ïŒå³ïœã«ç€ºãããã«ãã¬ã©ã¹åºæ¿ïŒåå
åïŒ7059ãã³ãŒãã³ã°ç€Ÿè£œïŒïŒïŒäžã«1000â«ã®å±€
åã®I.T.Oç»çŽ é»æ¥µïŒïŒãããªããªãœå·¥çšã«ãã
ææã®ãã¿ãŒã³ã«æ圢ããåŸããã®é¢ã«æŽã«Al
ã1000â«ã®å±€åã«ç空èžçãããã®èžçå±€ãããª
ããªãœå·¥çšã«ããææã®åœ¢ç¶ã«ãã¿ãŒã¬ã³ãã³ã°
ããŠç¬¬ïŒå³ïœã«ç€ºããããªã²ãŒãé»æ¥µïŒïŒã圢æ
ããã ç¶ããŠãæå æ§ããªã€ããïŒåååïŒã»ãã³ã³
ãã¢ã€ã³ãæ±ã¬ç€Ÿè£œïŒãåèšé»æ¥µã®èšããããåº
æ¿ïŒïŒé¢äžã«å¡åžã絶çžå±€ïŒïŒã圢æãããã¿ãŒ
ã³é²å åã³çŸååŠçã«ãã€ãŠãã¬ã€ã³é»æ¥µïŒïŒãš
ç»çŽ é»æ¥µïŒïŒãšã®ã³ã³ã¿ã¯ãéšãæ§æããã¹ã«ãŒ
ããŒã«ïŒïŒã第ïŒå³ïœã«ç€ºãããã«åœ¢æããã ããã§ãåºæ¿ïŒïŒãå ç©æ§œå ã®æå®ã®äœçœ®ã«ã»
ããããå ç©æ§œå ã«H2ã§åžéãããSiH4ãå°å ¥
ããç空äžã§ã²ããŒæŸé»æ³ã«ãããåèšé»æ¥µïŒ
ïŒïŒïŒïŒåã³çµ¶çžå±€ïŒïŒã®èšããããåºæ¿ïŒïŒå š
é¢ã«2000â«ã®å±€åã®ïœâSiãããªãå å°é»å±€ïŒã€
ã³ããªã³ã·ãã¯å±€ïŒïŒïŒãå ç©ãããåŸããã®å
å°é»å±€ïŒïŒäžã«åŒç¶ãåæ§ã®æäœã«ãã€ãŠã1000
â«ã®å±€åã®n+å±€ïŒïŒã第ïŒå³ïœã«ç€ºããããã«
ç©å±€ããããã®åºæ¿ïŒïŒãå ç©æ§œããååºããå
èšn+å±€ïŒïŒåã³å å°é»å±€ïŒïŒã®ããããããã
ã®é ã«ãã©ã€ãšããã³ã°æ³ã«ããææã®åœ¢ç¶ã«ç¬¬
ïŒå³ïœ ã«ç€ºããæ§ã«ãã¿ãŒã³ãã³ã°ããã 次ã«ããã®ããã«ããŠå å°é»å±€ïŒïŒåã³n+å±€
ïŒïŒãèšããããŠããåºæ¿é¢ã«ãAlã1000â«ã®
å±€åã§ç空èžçããåŸããã®Alèžçå±€ãããªã
ãªãœå·¥çšã«ããææã®åœ¢ç¶ã«ãã¿ãŒã³ãã³ã°ã
ãŠã第ïŒå³ïœã«ç€ºããããªãœãŒã¹é»æ¥µïŒïŒåã³ã
ã¬ã€ã³é»æ¥µïŒïŒã圢æããã æåŸã«ãç»çŽ é»æ¥µïŒïŒã®ããããã«å¯Ÿå¿ãã
ãŠãå®æœäŸïŒãšåæ§ãªæ¹æ³ã«ããèµ€ãéåã³ç·ã®
ïŒè²ã®çè²ãã¿ãŒã³ã第ïŒå³ïœã«ç€ºãããã«åœ¢æ
ããåŸããã®åºæ¿é¢å šé¢ã«é åæ©èœãä»äžãã絶
çžèïŒïŒãšããŠã®ããªã€ããæš¹èã1200â«ã®å±€å
ã«å¡åžãã250âïŒïŒæéã®å ç±ãåŠçã«ãã€ãŠ
æš¹èã®ç¡¬åãè¡ãªããŠã«ã©ãŒãã€ã«ã¿ãŒãäžäœå
ãããèèãã©ã³ãžã¹ã¿ãŒãäœè£œããã ãã®ããã«äœè£œãããã«ã©ãŒãã€ã«ã¿ãŒä»ãè
èãã©ã³ãžã¹ã¿ãŒãçšããŠæŽã«ãã«ã©ãŒçšæ¶²æ¶è¡š
ç€ºçŽ åã圢æããã ããªãã¡ãã¬ã©ã¹åºæ¿ïŒåååïŒ7059ãã³ãŒã
ã³ã°ç€Ÿè£œïŒã®äžé¢ã®åèšã®æ¹æ³ãšåæ§ã«ããŠã
1000â«ã®I.T.Oé»æ¥µå±€ã圢æããæŽã«è©²é»æ¥µå±€äž
ã«é åæ©èœãä»äžããããªã€ããæš¹èãããªãè
å1200â«ã®çµ¶çžå±€ã圢æãããã®åºæ¿ãšå ã«åœ¢æ
ããã«ã©ãŒãã€ã«ã¿ãŒä»ãèèãã©ã³ãžã¹ã¿ãŒãš
ã®éã«æ¶²æ¶ãå°å ¥ãŠå šäœãåºå®ããŠãã«ã©ãŒçšæ¶²
æ¶è¡šç€ºçŽ åãåŸãã ãã®ããã«ããŠåœ¢æãããã«ã©ãŒçšæ¶²æ¶è¡šç€ºçŽ
åã¯ãè¯å¥œãªæ©èœãæãããã®ã§ãããã«ã©ãŒã
ã€ã«ã¿ãŒã®åå ç¹æ§ã¯ãå®æœäŸïŒåã³ïŒãšåæ§ã®
å¹æãåŸãããã å®æœäŸ ïŒ ïŒè²ã«ã©ãŒãã€ã«ã¿ãŒãç»çŽ é»æ¥µäžã«èšãã代
ãã«ã察åé»æ¥µäžã«èšãã以å€ã¯å®æœäŸïŒãšåæ§
ã«ããŠãæ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒãæããã«ã©
ãŒçšæ¶²æ¶è¡šç€ºçŽ åãåŸãã ãã®ããã«ããŠåœ¢æãããã«ã©ãŒçšæ¶²æ¶è¡šç€ºçŽ
åã¯ãè¯å¥œãªæ©èœãæãããã®ã§ãããã«ã©ãŒã
ã€ã«ã¿ãŒã®åå ç¹æ§ã¯å®æœäŸïŒåã³ïŒãšåæ§ãªå¹
æãåŸãããã å®æœäŸ ïŒ CCDïŒãã€ãŒãžãã«ããã«ããããã€ã¹ïŒã®åœ¢
æããããŠãšããŒãåºæ¿ãšããŠçšããCCDã®æ
ããååå ã»ã«ã«å¯Ÿå¿ããŠãã«ã©ãŒãã€ã«ã¿ãŒã®
æããåçè²ãã¿ãŒã³ãé 眮ãããããã«ãïŒè²
ã¹ãã©ã€ãã«ã©ãŒãã€ã«ã¿ãŒã圢æãã以å€ã¯ã
å®æœäŸïŒãšåæ§ã«ããŠæ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒ
ãæããã«ã©ãŒåºäœæ®åçŽ åã圢æããã ãã®ããã«ããŠåœ¢æãããã«ã©ãŒåºäœæ®åçŽ å
ã¯ãè¯å¥œãªæ©èœãæãããã®ã§ãããã«ã©ãŒãã€
ã«ã¿ãŒã®åå ç¹æ§ã¯ãå®æœäŸïŒãšåæ§ã®å¹æãåŸ
ããã å®æœäŸ ïŒ CCDïŒãã€ãŒãžãã«ããã«ããããã€ã¹ïŒã®åœ¢
æããããŠãšããŒã«ãå®æœäŸïŒã«æŒããŠåœ¢æãã
ã«ã©ãŒãã€ã«ã¿ãŒããCCDã®æããååå ã»ã«
ã«å¯Ÿå¿ããŠãã«ã©ãŒãã€ã«ã¿ãŒã®æããåçè²ã
ã¿ãŒã³ãé 眮ãããããã«äœçœ®åãããããŠè²Œç
ããã«ã©ãŒåºäœæ®åçŽ åã圢æããã ãã®ããã«ããŠåœ¢æãããã«ã©ãŒåºäœæ®åçŽ å
ã¯ãè¯å¥œãªæ©èœãæãããã®ã§ãããã«ã©ãŒãã€
ã«ã¿ãŒã®åå ç¹æ§ã¯ãå®æœäŸïŒåã³ïŒãšåæ§ã®å¹
æãåŸããã å®æœäŸ ïŒ æ¬çºæã®æ¹æ³ãé©çšããŠã第ïŒïŒå³ã®éšåå¹³é¢
該ç¥å³ã«ç€ºããããªã«ã©ãŒçšããªãã»ã³ãµãŒã¢ã¬
ã€ã®åœ¢æã第ïŒïŒå³ã«ç€ºããå·¥çšã«åŸã€ãŠä»¥äžã®
ããã«å®æœããã ãŸããã¬ã©ã¹åºæ¿ïŒåååïŒ7059ãã³ãŒãã³ã°
瀟補ïŒïŒïŒïŒã®äžã«ã°ããŒæŸé»æ³ã«ãã€ãŠïœâSi
ïŒã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ïŒå±€ãããªãå å°é»å±€
ïŒã€ã³ããªã³ã·ãã¯å±€ïŒïŒïŒïŒã第ïŒïŒå³ïœã«ç€º
ãããã«èšããã ããªãã¡ãH2ã§10容éïŒ ã«åžéãããSiH4ã
ã¬ã¹å§0.50TirrïŒRFïŒRadio RrequencyïŒãã¯ãŒ
10Wãåºæ¿æž©åºŠ250âã§ïŒæéåºæ¿äžã«å ç©ãã
ãããšã«ãã€ãŠ0.7ÎŒïœã®èåã®å å°é»å±€ïŒïŒïŒã
åŸãã ç¶ããŠããã®å å°é»å±€ïŒïŒïŒäžã«ã°ããŒæŸé»æ³
ã«ãã第ïŒïŒå³ïœã«ç€ºãããã«n+å±€ïŒïŒïŒãèš
ããã ããªãã¡ãH2ã§10容éïŒ ã«åžéãããSiH4ãšã
H2ã§100ppmã«åžéãããPH3ãšãïŒïŒ10ã§æ··å
ããã¬ã¹ãåæãšããŠçšãããã®ä»ã¯ãå ã®å å°
é»å±€ã®å ç©æ¡ä»¶ãšåæ§ã«ããŠå å°é»å±€ïŒïŒïŒã«é£
ç¶ããŠã0.1ÎŒïœã®å±€åã®n+å±€ïŒïŒïŒãèšããã 次ã«ã第ïŒïŒå³ïœã«ç€ºãããã«é»åããŒã èžç
æ³ã§Alã0.3ÎŒïœã®å±€åã«n+å±€ïŒïŒïŒäžã«å ç©ã
ããŠãå°é»å±€ïŒïŒïŒãå ç©ãããç¶ããŠã第ïŒïŒ
å³ïœã«ç€ºãããã«å°é»å±€ïŒïŒïŒã®å å€æéšãšãªã
éšåã«çžåœããéšåãé€å»ããã ããªãã¡ãããžåã®ãã€ã¯ãããžãã1300â27
ïŒåååãShipley瀟補ïŒããªãã¬ãžã¹ããçšããŠ
ææã®åœ¢ç¶ã«ããªãã¬ãžã¹ããã¿ãŒã³ã圢æãã
åŸããªã³é žïŒ85容éïŒ æ°Žæº¶æ¶²ïŒãç¡é žïŒ80容éïŒ
氎溶液ïŒãæ°·é ¢é žåã³æ°Žã16ïŒïŒïŒïŒïŒïŒã®å²å
ã§æ··åãããšããã³ã°æº¶æ¶²ãçšããŠé²åºéšïŒã¬ãž
ã¹ããã¿ãŒã³ã®èšããããŠããªãéšåïŒã®å°é»å±€
ïŒïŒïŒãåºæ¿äžããé€å»ããå ±éé»æ¥µïŒïŒïŒåã³
åå¥é»æ¥µïŒïŒïŒã圢æããã 次ã«ãå å€æéšãšãªãéšåã®n+å±€ïŒïŒïŒã第
ïŒïŒå³ïœ ã«ç€ºãããã«é€å»ããã å³ã¡ãäžèšãã€ã¯ãããžãã1300â27ããªãã¬
ãžã¹ããåºæ¿ããå¥é¢ããåŸãå¹³è¡å¹³æ¿åãã©ãº
ããšããã³ã°è£ 眮DEMâ451ïŒæ¥é»ã¢ãã«ã瀟補ïŒ
ãçšããŠãã©ãºããšããã³ã°æ³ïŒå¥åãªã¢ã¯ãã€
ãã€ãªã³ãšããã³ã°æ³ïŒã§RFãã¯ãŒ120Wãã¬ã¹
å§0.1Torrã§CF4ã¬ã¹ã«ãããã©ã€ãšããã³ã°ã
ïŒåéè¡ãªããé²åºéšã®n+å±€ïŒïŒïŒåã³å å°é»
å±€ïŒïŒïŒã®è¡šé¢å±€ã®äžéšãåºæ¿ããé€å»ããã ãªããæ¬å®æœäŸã§ã¯ããšããã³ã°è£ 眮ã®ã«ãœãŒ
ãææã®ã€ã³ãã©ã³ããŒã·ãšã³ãé²æ¢ããçºã«ã
ã«ãœãŒãäžã®ããªã·ãªã³ã³ã®ã¹ããã¿çšã¿ãŒã²ã
ãïŒïŒã€ã³ããçŽåºŠ99.999ïŒ ïŒã眮ãããã®äžã«
è©Šæãã®ããã«ãœãŒãææã®SUSãé²åºããéš
åã¯ããŒããç¶ã«åæãããããã³ã·ãŒãã§ã«ã
ãŒããSUSé¢ãã»ãšãã©ãã©ãºãã§ãããªãç¶
æ ã§ãšããã³ã°ãè¡ãªã€ãããã®åŸãçªçŽ ãïŒ
ïŒminã®é床ã§æµãããªãŒãã³å ã§200âïŒ60
åã®ç±åŠçãè¡ãªã€ãã ããããŠäœæãããããªãã»ã³ãµãŒã¢ã¬ã€ã®è¡š
é¢ã«ã次ã«ä¿è·å±€ã以äžã®ããã«ããŠåœ¢æããã ããªãã¡ãããªãã»ã³ãµãŒã¢ã¬ã€äžã«ã°ããŒæŸ
é»æ³ã«ãã€ãŠä¿è·å±€ãšããŠã®ã·ãªã³ã³ãã€ãã©ã€
ãå±€ïŒïŒïŒã圢æããã ããªãã¡ãH2ã§10容éïŒ ã«åžéãããSiH4ãš
100ïŒ NH3ãïŒïŒïŒã®æµéæ¯ã§æ··åããæ··åã¬ã¹
ãçšãããã®ä»ã¯å ã®ïœâSiå±€ã圢æããã®ãšå
æ§ã«ããŠã0.5ÎŒïœã®å±€åã®ã·ãªã³ã³ãã€ãã©ã€ã
ïŒïœâSiNHïŒå±€ïŒïŒïŒã第ïŒïŒå³ïœã«ç€ºããã
ã«åœ¢æããã æŽã«ããã®ä¿è·å±€ïŒïŒïŒãåºæ¿ãšããŠãå®æœäŸ
ïŒãšåæ§ã«ããŠãéïŒãç·ïŒãèµ€ïŒã®ïŒè²ã®çè²
ãã¿ãŒã³ãããªãã«ã©ãŒãã€ã«ã¿ãŒã圢æãã第
ïŒå³ã«ç€ºãããã«ãåããªãã»ã³ãµãŒäžã«ããã
ãçè²ãã€ã«ã¿ãŒãé 眮ãããã«ã©ãŒããªãã»ã³
ãµãŒã¢ã¬ã€ã圢æããã æ¬å®æœäŸã«æŒããŠåœ¢æãããã«ã©ãŒããªãã»ã³
ãµãŒã¢ã¬ã€ã«æŒããŠãã«ã©ãŒãã€ã«ã¿ãŒåœ¢ææã«
å®æœäŸïŒåã³ïŒã«æŒããã®ãšåæ§ãªå¹æãåŸãã
ãšãã§ãã圢æãããã«ã©ãŒããªãã»ã³ãµãŒã¯è¯
奜ãªæ©èœãæãããã®ã§ãã€ãã å®æœäŸ ïŒ å®æœäŸïŒã«æŒããŠåœ¢æããã«ã©ãŒãã€ã«ã¿ãŒ
ããæ¥çå€ãçšããŠãå®æœäŸïŒã«æŒããŠåœ¢æãã
ããªãã»ã³ãµãŒã¢ã¬ã€äžã«è²Œçããããšã«ããã«
ã©ãŒããªãã»ã³ãµãŒã¢ã¬ã€ã圢æããã æ¬å®æœäŸã«æŒããŠåœ¢æããã«ã©ãŒããªãã»ã³ãµ
ãŒãå®æœäŸïŒã«æŒããŠåœ¢æãããã®ãšåæ§ã«ãè¯
奜ãªæ©èœãæãããã®ã§ãã€ãã æ¬çºæã«ããã°ãçè²å±€ãèç±æ§ããã³è溶å€
æ§ã«åªãããã€åå ç¹æ§ã«ãåªããè²çŽ ã®èžçã«
ãã圢æãããã®ã§ãèžçã«ããè²çŽ å±€ã®åœ¢æã
èžçè²çŽ å±€ã®ãã¿ãŒãã³ã°ãªã©ã®è£œé äžã®ç¹åã³
圢æãããã«ã©ãŒãã€ã«ã¿ãŒã®å åŠçæ©èœã®ç¹ã
ããåªããã«ã©ãŒãã€ã«ã¿ãŒãæäŸããããšãã§
ãããç¹ã«ãåŸæ¥ãæå®ã®åå ç¹æ§ãåŸããã«ã
ãã€ãç·è²è²çŽ å±€ã«ããªã¯ã¿âïŒïŒïŒâããšãã«
ãã¿ãã·ã¢ãã³ç³»è²çŽ ãã¢ã³ãã©ããã³ç³»è²çŽ ã§
è²è£æ§ããè²çŽ ãçšããããŠããã®ã§ãæ¬çºæã®
ã«ã©ãŒãã€ã«ã¿ãŒã®æããç·è²çè²å±€ã¯ãæå®ã®
åå ç¹æ§ãæãããã®ãšãªã€ãã
第ïŒå³ã第ïŒå³ã¯æ¬çºæã®ã«ã©ãŒãã€ã«ã¿ãŒã®
補é æ³ã説æããããã®å·¥çšå³ã第ïŒå³ã第ïŒå³
ã¯å®æœäŸïŒåã³ïŒã«ãããŠåŸãããè²çŽ å±€ã®åå
ééçã®ã°ã©ãã瀺ãã第ïŒå³ïœãïœã¯æ¬çºæã«
ã©ãŒãã€ã«ã¿ãŒãæããã«ã©ãŒçšæ¶²æ¶è¡šç€ºçŽ åã®
補é å·¥çšå³ã第ïŒïŒå³ã¯æ¬çºæã®ã«ã©ãŒãã€ã«ã¿
ãŒãæããã«ã©ãŒçšããªãã»ã³ãµãŒã¢ã¬ã€ã®æš¡åŒ
çå¹³é¢éšåå³ã第ïŒïŒå³ïœãïœã¯ç¬¬ïŒïŒå³ã«ç€ºã
ãã«ã©ãŒçšããªãã»ã³ãµãŒã¢ã¬ã€ã®åœ¢æå·¥çšå³ã§
ããã ïŒïŒïŒïŒïŒïŒïŒïŒâŠâŠåºæ¿ãïŒâŠâŠã¬ãžã¹ãã
ã¿ãŒã³ãïŒâŠâŠè²çŽ å±€ãïŒïŒïŒããã³ïŒâŠâŠãã¿
ãŒã³ç¶è²çŽ å±€ãïŒâŠâŠæš¹èãïŒâŠâŠç·è²ã®åå ç¹
æ§ãïŒâŠâŠéè²ã®åå ç¹æ§ãïŒïŒâŠâŠç·è²ã®åå
ç¹æ§ãïŒïŒâŠâŠç»çŽ é»æ¥µãïŒïŒâŠâŠã²ãŒãé»æ¥µã
ïŒïŒïŒïŒïŒâŠâŠçµ¶çžå±€ãïŒïŒâŠâŠã¹ã«ãŒããŒã«ã
ïŒïŒïŒïŒïŒïŒâŠâŠå å°é»å±€ãïŒïŒïŒïŒïŒïŒâŠâŠ
n+å±€ãïŒïŒâŠâŠãœãŒã¹é»æ¥µãïŒïŒâŠâŠãã¬ã€ã³
é»æ¥µãïŒïŒïŒâŠâŠå°é»å±€ãïŒïŒïŒâŠâŠåå¥é»æ¥µã
ïŒïŒïŒâŠâŠå ±éé»æ¥µãïŒïŒïŒâŠâŠä¿è·å±€ã
補é æ³ã説æããããã®å·¥çšå³ã第ïŒå³ã第ïŒå³
ã¯å®æœäŸïŒåã³ïŒã«ãããŠåŸãããè²çŽ å±€ã®åå
ééçã®ã°ã©ãã瀺ãã第ïŒå³ïœãïœã¯æ¬çºæã«
ã©ãŒãã€ã«ã¿ãŒãæããã«ã©ãŒçšæ¶²æ¶è¡šç€ºçŽ åã®
補é å·¥çšå³ã第ïŒïŒå³ã¯æ¬çºæã®ã«ã©ãŒãã€ã«ã¿
ãŒãæããã«ã©ãŒçšããªãã»ã³ãµãŒã¢ã¬ã€ã®æš¡åŒ
çå¹³é¢éšåå³ã第ïŒïŒå³ïœãïœã¯ç¬¬ïŒïŒå³ã«ç€ºã
ãã«ã©ãŒçšããªãã»ã³ãµãŒã¢ã¬ã€ã®åœ¢æå·¥çšå³ã§
ããã ïŒïŒïŒïŒïŒïŒïŒïŒâŠâŠåºæ¿ãïŒâŠâŠã¬ãžã¹ãã
ã¿ãŒã³ãïŒâŠâŠè²çŽ å±€ãïŒïŒïŒããã³ïŒâŠâŠãã¿
ãŒã³ç¶è²çŽ å±€ãïŒâŠâŠæš¹èãïŒâŠâŠç·è²ã®åå ç¹
æ§ãïŒâŠâŠéè²ã®åå ç¹æ§ãïŒïŒâŠâŠç·è²ã®åå
ç¹æ§ãïŒïŒâŠâŠç»çŽ é»æ¥µãïŒïŒâŠâŠã²ãŒãé»æ¥µã
ïŒïŒïŒïŒïŒâŠâŠçµ¶çžå±€ãïŒïŒâŠâŠã¹ã«ãŒããŒã«ã
ïŒïŒïŒïŒïŒïŒâŠâŠå å°é»å±€ãïŒïŒïŒïŒïŒïŒâŠâŠ
n+å±€ãïŒïŒâŠâŠãœãŒã¹é»æ¥µãïŒïŒâŠâŠãã¬ã€ã³
é»æ¥µãïŒïŒïŒâŠâŠå°é»å±€ãïŒïŒïŒâŠâŠåå¥é»æ¥µã
ïŒïŒïŒâŠâŠå ±éé»æ¥µãïŒïŒïŒâŠâŠä¿è·å±€ã
Claims (1)
- ãç¹èš±è«æ±ã®ç¯å²ã ïŒ ãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³ç³»
è²çŽ ããã³ã¢ã³ãã©ããã³ç³»è²çŽ ãèžçããŠåœ¢æ
ãããç·è²è²çŽ å±€ãæããããšãç¹åŸŽãšããã«ã©
ãŒãã€ã«ã¿ãŒã ïŒ åèšãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ã
ã³ç³»è²çŽ ããªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢
ãã³ãããã¯äžèšã®æ§é åŒã«ãã€ãŠç€ºããããªã¯
ã¿âïŒïŒïŒâããšãã«ãã¿ãã·ã¢ãã³ã®éå±é¯å¡©
ã§ããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé èšèŒã®ã«ã©ãŒãã€ã«
ã¿ãŒã ïŒäžèšåŒäžãã¯CuïŒGaOHïŒVOïŒNiïŒPdïŒ
PbïŒMgïŒCaãŸãã¯Coãè¡šãããïŒ ïŒ åèšã¢ã³ãã©ããã³ç³»è²çŽ ãäžèšæ§é åŒã«ã
ã€ãŠç€ºãããååç©ã§ããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé
èšèŒã®ã«ã©ãŒãã€ã«ã¿ãŒã ïŒ åèšç·è²è²çŽ å±€ããåºæ¿äžã«èšãããããã¿
ãŒã³ç¶ç·è²è²çŽ å±€ã§ããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé ã
第ïŒé ãŸãã¯ç¬¬ïŒé èšèŒã®ã«ã©ãŒãã€ã«ã¿ãŒã ïŒ åèšç·è²è²çŽ å±€ããã¬ãžã¹ããã¿ãŒã³ãæã
ãåºæ¿äžã«åèšãªã¯ã¿âïŒïŒïŒâããšãã«ãã¿ã
ã·ã¢ãã³ç³»è²çŽ åã³åèšã¢ã³ãã©ããã³ç³»è²çŽ ã
èžçåŸã該è²çŽ èžçå±€ã®åèšã¬ãžã¹ããã¿ãŒã³äž
ã«èšããããéšåããåèšã¬ãžã¹ããã¿ãŒã³ãšã
ã«åºæ¿äžããé€å»ããããšã«ãã€ãŠåœ¢æãããã¿
ãŒã³ç¶ç·è²è²çŽ å±€ã§ããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé èš
èŒã®ã«ã©ãŒãã€ã«ã¿ãŒã ïŒ åèšã¬ãžã¹ããã¿ãŒã³ãããžåã¬ãžã¹ããã¿
ãŒã³ã§åœ¢æããããã®ã§ããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒ
é èšèŒã®ã«ã©ãŒãã€ã«ã¿ãŒã ïŒ åèšåºæ¿ããè¡šç€ºè£ çœ®ã®è¡šç€ºéšã§ããç¹èš±è«
æ±ã®ç¯å²ç¬¬ïŒé ãŸãã¯ç¬¬ïŒé èšèŒã®ã«ã©ãŒãã€ã«
ã¿ãŒã ïŒ åèšåºæ¿ããåºå®æ®åçŽ åã§ããç¹èš±è«æ±ã®
ç¯å²ç¬¬ïŒé ãŸãã¯ç¬¬ïŒé èšèŒã®ã«ã©ãŒãã€ã«ã¿
ãŒã ïŒ åèšåºæ¿ããã€ã¡ãŒãžã»ã³ãµãŒã®åå é¢ã§ã
ãç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé ãŸãã¯ç¬¬ïŒé èšèŒã®ã«ã©
ãŒãã€ã«ã¿ãŒã
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59276989A JPS61165704A (ja) | 1984-12-28 | 1984-12-28 | ã«ã©âãã€ã«ã¿â |
| US06/808,507 US4793692A (en) | 1984-12-14 | 1985-12-13 | Color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59276989A JPS61165704A (ja) | 1984-12-28 | 1984-12-28 | ã«ã©âãã€ã«ã¿â |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61165704A JPS61165704A (ja) | 1986-07-26 |
| JPH0257288B2 true JPH0257288B2 (ja) | 1990-12-04 |
Family
ID=17577214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59276989A Granted JPS61165704A (ja) | 1984-12-14 | 1984-12-28 | ã«ã©âãã€ã«ã¿â |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61165704A (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000079316A1 (fr) * | 1999-06-17 | 2000-12-28 | Fuji Photo Film Co., Ltd. | Filtre optique |
| JP2002184575A (ja) * | 2000-12-11 | 2002-06-28 | Tdk Corp | ææ©ïœ ïœãã£ã¹ãã¬ã€è£ 眮 |
| WO2007093536A2 (en) * | 2006-02-17 | 2007-08-23 | Ciba Holding Inc. | Blue colour filters with enhanced contrast |
| JP2010085702A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | ã«ã©ãŒãã£ã«ã¿ã®è£œé æ¹æ³ |
| JP2010085703A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | ã«ã©ãŒãã£ã«ã¿ã®è£œé æ¹æ³ |
-
1984
- 1984-12-28 JP JP59276989A patent/JPS61165704A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61165704A (ja) | 1986-07-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4793692A (en) | Color filter | |
| JPH0257285B2 (ja) | ||
| JPH0257288B2 (ja) | ||
| US4700080A (en) | Color photosensor utilizing color filters | |
| JPH0257283B2 (ja) | ||
| JPS62136605A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPS61140902A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPH0257287B2 (ja) | ||
| JPS6127506A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPS6127507A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPH0257284B2 (ja) | ||
| JPS62108204A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPS62136604A (ja) | ã«ã©âãã€ã«ã¿â | |
| JP2544915B2 (ja) | ã«ã©âãã£ã«ã¿âããã®è£œé æ¹æ³ããã³ãããçšããçŽ å | |
| JPS62136606A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPS63155105A (ja) | ã«ã©âãã€ã«ã¿ãŒ | |
| JPS62108205A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPS63191105A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPS63165803A (ja) | ã«ã©ãŒãã£ã«ã¿ãŒããã³ãããçšããçŽ å | |
| JPS62108202A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPS62108203A (ja) | ã«ã©âãã€ã«ã¿â | |
| JPS60114807A (ja) | 埮现è²ãã€ã«ã¿âäœè£œæ³ | |
| JPS61172102A (ja) | ã«ã©âãã€ã«ã¿âã®è£œé æ¹æ³ | |
| JPH02176602A (ja) | ã«ã©ãŒãã£ã«ã¿ã®è£œé æ¹æ³ | |
| JPS63191104A (ja) | ã«ã©âãã€ã«ã¿â |