JPH0257252B2 - - Google Patents
Info
- Publication number
- JPH0257252B2 JPH0257252B2 JP59129815A JP12981584A JPH0257252B2 JP H0257252 B2 JPH0257252 B2 JP H0257252B2 JP 59129815 A JP59129815 A JP 59129815A JP 12981584 A JP12981584 A JP 12981584A JP H0257252 B2 JPH0257252 B2 JP H0257252B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- piezoelectric element
- electrodes
- vibration mode
- thickness direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005452 bending Methods 0.000 claims description 33
- 238000000605 extraction Methods 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 2
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12981584A JPS618630A (ja) | 1984-06-22 | 1984-06-22 | 振動センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12981584A JPS618630A (ja) | 1984-06-22 | 1984-06-22 | 振動センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS618630A JPS618630A (ja) | 1986-01-16 |
JPH0257252B2 true JPH0257252B2 (US20100223739A1-20100909-C00005.png) | 1990-12-04 |
Family
ID=15018902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12981584A Granted JPS618630A (ja) | 1984-06-22 | 1984-06-22 | 振動センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS618630A (US20100223739A1-20100909-C00005.png) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS638565A (ja) * | 1986-06-27 | 1988-01-14 | Mitsubishi Electric Corp | 半導体加速度検出装置 |
JP2901132B2 (ja) * | 1994-08-02 | 1999-06-07 | オリンパス光学工業株式会社 | 一眼レフレックスカメラの可動ミラー装置 |
CN105181114B (zh) * | 2015-09-15 | 2018-05-15 | 国家电网公司 | 双悬臂振动传感器 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS559198A (en) * | 1978-07-04 | 1980-01-23 | Bosch Gmbh Robert | Device for measuring vibration generated at internal combustion engine knocking |
JPS5970923A (ja) * | 1982-10-14 | 1984-04-21 | Matsushita Electric Ind Co Ltd | 振動センサ |
-
1984
- 1984-06-22 JP JP12981584A patent/JPS618630A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS559198A (en) * | 1978-07-04 | 1980-01-23 | Bosch Gmbh Robert | Device for measuring vibration generated at internal combustion engine knocking |
JPS5970923A (ja) * | 1982-10-14 | 1984-04-21 | Matsushita Electric Ind Co Ltd | 振動センサ |
Also Published As
Publication number | Publication date |
---|---|
JPS618630A (ja) | 1986-01-16 |
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