JPH0257000U - - Google Patents
Info
- Publication number
- JPH0257000U JPH0257000U JP13604488U JP13604488U JPH0257000U JP H0257000 U JPH0257000 U JP H0257000U JP 13604488 U JP13604488 U JP 13604488U JP 13604488 U JP13604488 U JP 13604488U JP H0257000 U JPH0257000 U JP H0257000U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- opening
- airtight bag
- piping section
- gas piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 9
- 238000007599 discharging Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010926 purge Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13604488U JPH0616695Y2 (ja) | 1988-10-18 | 1988-10-18 | グローブ付気密袋 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13604488U JPH0616695Y2 (ja) | 1988-10-18 | 1988-10-18 | グローブ付気密袋 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257000U true JPH0257000U (US07534539-20090519-C00280.png) | 1990-04-24 |
| JPH0616695Y2 JPH0616695Y2 (ja) | 1994-05-02 |
Family
ID=31396191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13604488U Expired - Lifetime JPH0616695Y2 (ja) | 1988-10-18 | 1988-10-18 | グローブ付気密袋 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0616695Y2 (US07534539-20090519-C00280.png) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05223379A (ja) * | 1992-02-07 | 1993-08-31 | Daikin Ind Ltd | 極低温冷凍機のメンテナンス装置 |
| JP2007088166A (ja) * | 2005-09-21 | 2007-04-05 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| JP2011011274A (ja) * | 2009-06-30 | 2011-01-20 | Mitsui Eng & Shipbuild Co Ltd | 移動式グローブボックス |
| US8242562B2 (en) | 2007-11-27 | 2012-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Film deposition apparatus |
| JP2012519599A (ja) * | 2009-03-06 | 2012-08-30 | ディスポーザブル−ラボ | 容器を充填するための手段を備えた使い捨てアイソレータ |
| CN104183520A (zh) * | 2013-05-22 | 2014-12-03 | 株式会社堀场Stec | 材料供给装置 |
| JP2018501965A (ja) * | 2014-09-08 | 2018-01-25 | タレス | ポッド修理ユニット |
-
1988
- 1988-10-18 JP JP13604488U patent/JPH0616695Y2/ja not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05223379A (ja) * | 1992-02-07 | 1993-08-31 | Daikin Ind Ltd | 極低温冷凍機のメンテナンス装置 |
| JP2007088166A (ja) * | 2005-09-21 | 2007-04-05 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| US8242562B2 (en) | 2007-11-27 | 2012-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Film deposition apparatus |
| JP2012519599A (ja) * | 2009-03-06 | 2012-08-30 | ディスポーザブル−ラボ | 容器を充填するための手段を備えた使い捨てアイソレータ |
| JP2011011274A (ja) * | 2009-06-30 | 2011-01-20 | Mitsui Eng & Shipbuild Co Ltd | 移動式グローブボックス |
| CN104183520A (zh) * | 2013-05-22 | 2014-12-03 | 株式会社堀场Stec | 材料供给装置 |
| JP2014226610A (ja) * | 2013-05-22 | 2014-12-08 | 株式会社堀場エステック | 材料供給装置 |
| JP2018501965A (ja) * | 2014-09-08 | 2018-01-25 | タレス | ポッド修理ユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0616695Y2 (ja) | 1994-05-02 |
