JPH0256809B2 - - Google Patents

Info

Publication number
JPH0256809B2
JPH0256809B2 JP16091084A JP16091084A JPH0256809B2 JP H0256809 B2 JPH0256809 B2 JP H0256809B2 JP 16091084 A JP16091084 A JP 16091084A JP 16091084 A JP16091084 A JP 16091084A JP H0256809 B2 JPH0256809 B2 JP H0256809B2
Authority
JP
Japan
Prior art keywords
power supply
turntable
shaft
vacuum
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16091084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140031A (ja
Inventor
Kosuke Ooshio
Osamu Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokuda Seisakusho Co Ltd
Original Assignee
Toshiba Corp
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokuda Seisakusho Co Ltd filed Critical Toshiba Corp
Priority to JP16091084A priority Critical patent/JPS6140031A/ja
Publication of JPS6140031A publication Critical patent/JPS6140031A/ja
Publication of JPH0256809B2 publication Critical patent/JPH0256809B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP16091084A 1984-07-31 1984-07-31 真空処理装置 Granted JPS6140031A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16091084A JPS6140031A (ja) 1984-07-31 1984-07-31 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16091084A JPS6140031A (ja) 1984-07-31 1984-07-31 真空処理装置

Publications (2)

Publication Number Publication Date
JPS6140031A JPS6140031A (ja) 1986-02-26
JPH0256809B2 true JPH0256809B2 (OSRAM) 1990-12-03

Family

ID=15724965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16091084A Granted JPS6140031A (ja) 1984-07-31 1984-07-31 真空処理装置

Country Status (1)

Country Link
JP (1) JPS6140031A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2792647B2 (ja) * 1987-03-10 1998-09-03 株式会社 アスカル 高真空型輻射線集中加熱装置
JP4768699B2 (ja) * 2006-11-30 2011-09-07 キヤノンアネルバ株式会社 電力導入装置及び成膜方法
US10597779B2 (en) * 2015-06-05 2020-03-24 Applied Materials, Inc. Susceptor position and rational apparatus and methods of use

Also Published As

Publication number Publication date
JPS6140031A (ja) 1986-02-26

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