JPH0256793B2 - - Google Patents
Info
- Publication number
- JPH0256793B2 JPH0256793B2 JP62311553A JP31155387A JPH0256793B2 JP H0256793 B2 JPH0256793 B2 JP H0256793B2 JP 62311553 A JP62311553 A JP 62311553A JP 31155387 A JP31155387 A JP 31155387A JP H0256793 B2 JPH0256793 B2 JP H0256793B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge electrode
- alumina
- linear discharge
- dielectric substrate
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 17
- 230000005684 electric field Effects 0.000 claims description 15
- 230000006698 induction Effects 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 5
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 5
- 229910017604 nitric acid Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 235000012255 calcium oxide Nutrition 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
Landscapes
- Elimination Of Static Electricity (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31155387A JPH01154482A (ja) | 1987-12-09 | 1987-12-09 | 電界装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31155387A JPH01154482A (ja) | 1987-12-09 | 1987-12-09 | 電界装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01154482A JPH01154482A (ja) | 1989-06-16 |
JPH0256793B2 true JPH0256793B2 (sv) | 1990-12-03 |
Family
ID=18018621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31155387A Granted JPH01154482A (ja) | 1987-12-09 | 1987-12-09 | 電界装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01154482A (sv) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2608477B2 (ja) * | 1989-08-29 | 1997-05-07 | 京セラ株式会社 | オゾン発生用放電体 |
JPH03236900A (ja) * | 1990-02-14 | 1991-10-22 | Sharp Corp | 衣類乾燥機 |
JPH0810935Y2 (ja) * | 1990-03-30 | 1996-03-29 | 日本特殊陶業株式会社 | 電界装置 |
JP4994171B2 (ja) * | 2006-09-27 | 2012-08-08 | 京セラ株式会社 | 放電素子、この放電素子を用いた放電モジュール、並びに、この放電モジュールを用いたオゾン発生装置及びイオン発生装置 |
JP5460092B2 (ja) * | 2009-03-25 | 2014-04-02 | 京セラ株式会社 | プラズマ発生体およびプラズマ発生装置 |
JP2013103857A (ja) * | 2011-11-14 | 2013-05-30 | Shunsuke Hosokawa | オゾン生成方法ならびにオゾン供給装置 |
CN115364634A (zh) * | 2021-05-18 | 2022-11-22 | 美的集团(上海)有限公司 | 等离子体发生模块、净化部件、设备及空调系统 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS576385A (en) * | 1980-06-12 | 1982-01-13 | Citizen Watch Co Ltd | Movement structure of digital watch |
JPS5749917U (sv) * | 1980-09-09 | 1982-03-20 |
-
1987
- 1987-12-09 JP JP31155387A patent/JPH01154482A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS576385A (en) * | 1980-06-12 | 1982-01-13 | Citizen Watch Co Ltd | Movement structure of digital watch |
JPS5749917U (sv) * | 1980-09-09 | 1982-03-20 |
Also Published As
Publication number | Publication date |
---|---|
JPH01154482A (ja) | 1989-06-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5409917B2 (ja) | 静電チャック | |
US6641939B1 (en) | Transition metal oxide doped alumina and methods of making and using | |
EP0863545A3 (en) | Monocrystalline ceramic electrostatic chuck | |
US9543184B2 (en) | Electrostatic chuck | |
JPH0256793B2 (sv) | ||
JP2008186660A (ja) | 電極構造体およびこれを用いたプラズマ生成装置 | |
JPH0222998B2 (sv) | ||
JPS62157752A (ja) | 静電チヤツク | |
US4841409A (en) | Method of manufacturing a corona discharge electrode and a corona discharge electrode produced by the method | |
JPS557564A (en) | Ozonizer | |
JPH06318490A (ja) | 電界装置 | |
JPH0763032B2 (ja) | 物体の静電的処理装置 | |
CN1074583C (zh) | 干刻蚀装置 | |
US4672503A (en) | Electric field forming apparatus | |
JPH0741116Y2 (ja) | 電界装置 | |
EP0099258A2 (en) | Substrates for electronic devices | |
JPH0810935Y2 (ja) | 電界装置 | |
JPS6366880A (ja) | 電界装置 | |
JPH08105317A (ja) | 排ガス処理装置 | |
JP3380807B2 (ja) | 高温及び高電圧下で耐久性のある石英管又は高アルミナ含有管に金被覆する方法、及び、オゾン発生器用の金被覆された石英管又は高アルミナ含有管 | |
JPH0795477B2 (ja) | 電界装置 | |
JPS6116603Y2 (sv) | ||
JPS63299137A (ja) | 試料保持装置 | |
JPH09100104A (ja) | オゾン発生用放電体 | |
JP2005104746A (ja) | アルミナ質セラミック板及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |