JPH0256444U - - Google Patents
Info
- Publication number
- JPH0256444U JPH0256444U JP13529688U JP13529688U JPH0256444U JP H0256444 U JPH0256444 U JP H0256444U JP 13529688 U JP13529688 U JP 13529688U JP 13529688 U JP13529688 U JP 13529688U JP H0256444 U JPH0256444 U JP H0256444U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- sides
- lowest point
- holding plate
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988135296U JPH0711470Y2 (ja) | 1988-10-17 | 1988-10-17 | 半導体基板保持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988135296U JPH0711470Y2 (ja) | 1988-10-17 | 1988-10-17 | 半導体基板保持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0256444U true JPH0256444U (cs) | 1990-04-24 |
| JPH0711470Y2 JPH0711470Y2 (ja) | 1995-03-15 |
Family
ID=31394791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988135296U Expired - Lifetime JPH0711470Y2 (ja) | 1988-10-17 | 1988-10-17 | 半導体基板保持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0711470Y2 (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193877A (ja) * | 1984-03-13 | 1985-10-02 | 信越半導体株式会社 | 輸送用半導体ウエーハケース |
| JPS6315042U (cs) * | 1986-07-16 | 1988-02-01 |
-
1988
- 1988-10-17 JP JP1988135296U patent/JPH0711470Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193877A (ja) * | 1984-03-13 | 1985-10-02 | 信越半導体株式会社 | 輸送用半導体ウエーハケース |
| JPS6315042U (cs) * | 1986-07-16 | 1988-02-01 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0711470Y2 (ja) | 1995-03-15 |
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