JPH0256428B2 - - Google Patents
Info
- Publication number
- JPH0256428B2 JPH0256428B2 JP60010804A JP1080485A JPH0256428B2 JP H0256428 B2 JPH0256428 B2 JP H0256428B2 JP 60010804 A JP60010804 A JP 60010804A JP 1080485 A JP1080485 A JP 1080485A JP H0256428 B2 JPH0256428 B2 JP H0256428B2
- Authority
- JP
- Japan
- Prior art keywords
- target
- workpiece
- ion beam
- cylindrical workpiece
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 21
- 238000010884 ion-beam technique Methods 0.000 claims description 20
- 239000002245 particle Substances 0.000 claims description 14
- 239000002344 surface layer Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 238000012986 modification Methods 0.000 claims description 4
- 230000004048 modification Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 2
- 239000010408 film Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1080485A JPS61170567A (ja) | 1985-01-25 | 1985-01-25 | 加工物の表層改質方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1080485A JPS61170567A (ja) | 1985-01-25 | 1985-01-25 | 加工物の表層改質方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61170567A JPS61170567A (ja) | 1986-08-01 |
| JPH0256428B2 true JPH0256428B2 (zh) | 1990-11-30 |
Family
ID=11760527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1080485A Granted JPS61170567A (ja) | 1985-01-25 | 1985-01-25 | 加工物の表層改質方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61170567A (zh) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58167768A (ja) * | 1982-03-29 | 1983-10-04 | Nippon Telegr & Teleph Corp <Ntt> | イオンビ−ムスパツタによる薄膜製造装置 |
-
1985
- 1985-01-25 JP JP1080485A patent/JPS61170567A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58167768A (ja) * | 1982-03-29 | 1983-10-04 | Nippon Telegr & Teleph Corp <Ntt> | イオンビ−ムスパツタによる薄膜製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61170567A (ja) | 1986-08-01 |
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