JPH0255734B2 - - Google Patents
Info
- Publication number
- JPH0255734B2 JPH0255734B2 JP16582785A JP16582785A JPH0255734B2 JP H0255734 B2 JPH0255734 B2 JP H0255734B2 JP 16582785 A JP16582785 A JP 16582785A JP 16582785 A JP16582785 A JP 16582785A JP H0255734 B2 JPH0255734 B2 JP H0255734B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- mirror
- light
- light source
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16582785A JPS6227640A (ja) | 1985-07-29 | 1985-07-29 | レンズの射影特性測定装置における鏡位置制御装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16582785A JPS6227640A (ja) | 1985-07-29 | 1985-07-29 | レンズの射影特性測定装置における鏡位置制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6227640A JPS6227640A (ja) | 1987-02-05 |
JPH0255734B2 true JPH0255734B2 (en, 2012) | 1990-11-28 |
Family
ID=15819753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16582785A Granted JPS6227640A (ja) | 1985-07-29 | 1985-07-29 | レンズの射影特性測定装置における鏡位置制御装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6227640A (en, 2012) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3428604B1 (en) * | 2016-03-10 | 2020-07-15 | Panasonic Intellectual Property Management Co., Ltd. | Optical inspection device, lens, and optical inspection method |
-
1985
- 1985-07-29 JP JP16582785A patent/JPS6227640A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6227640A (ja) | 1987-02-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |