JPH0254857B2 - - Google Patents
Info
- Publication number
- JPH0254857B2 JPH0254857B2 JP59103916A JP10391684A JPH0254857B2 JP H0254857 B2 JPH0254857 B2 JP H0254857B2 JP 59103916 A JP59103916 A JP 59103916A JP 10391684 A JP10391684 A JP 10391684A JP H0254857 B2 JPH0254857 B2 JP H0254857B2
- Authority
- JP
- Japan
- Prior art keywords
- formula
- acid
- resistant material
- heat
- photosensitive heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Polyurethanes Or Polyureas (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59103916A JPS60245635A (ja) | 1984-05-21 | 1984-05-21 | 感光性耐熱材料 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59103916A JPS60245635A (ja) | 1984-05-21 | 1984-05-21 | 感光性耐熱材料 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60245635A JPS60245635A (ja) | 1985-12-05 |
JPH0254857B2 true JPH0254857B2 (cs) | 1990-11-22 |
Family
ID=14366748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59103916A Granted JPS60245635A (ja) | 1984-05-21 | 1984-05-21 | 感光性耐熱材料 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60245635A (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6874942B2 (en) | 2001-03-02 | 2005-04-05 | Nsk Ltd. | Rolling device |
-
1984
- 1984-05-21 JP JP59103916A patent/JPS60245635A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6874942B2 (en) | 2001-03-02 | 2005-04-05 | Nsk Ltd. | Rolling device |
Also Published As
Publication number | Publication date |
---|---|
JPS60245635A (ja) | 1985-12-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2890213B2 (ja) | 感光性重合体組成物及びパターンの形成方法 | |
JP2826940B2 (ja) | i線露光用感光性組成物 | |
JP4736864B2 (ja) | ポジ型感光性ポリアミドイミド樹脂組成物、パターンの製造方法及び電子部品 | |
JPH0159571B2 (cs) | ||
JPH07271034A (ja) | 耐熱性ネガ型フォトレジスト組成物および感光性基材、ならびにネガ型パターン形成方法 | |
US20030149142A1 (en) | Polyimide precursor, manufacturing method thereof, and resin composition using polyimide precursor | |
JPH0850354A (ja) | i線用感光性組成物 | |
EP0308270B1 (en) | Processes for preparation of polyimide-isoindoquinazoline dione and precursor thereof | |
JPH0415226A (ja) | ヒドロキシフェニル基を有する感光性耐熱重合体 | |
JPH0254857B2 (cs) | ||
JPS60108841A (ja) | 感光性耐熱材料 | |
KR100244981B1 (ko) | 감광성 폴리이미드 전구체 | |
JPH0254858B2 (cs) | ||
JPS6121130A (ja) | 感光性耐熱材料 | |
JPH0450926B2 (cs) | ||
JPH0159569B2 (cs) | ||
JPS6121131A (ja) | 感光性耐熱材料 | |
JPH0153969B2 (cs) | ||
JPH0159570B2 (cs) | ||
JPH0126369B2 (cs) | ||
JPS6194043A (ja) | 感光性耐熱材料 | |
JPH0456975B2 (cs) | ||
JPH02180961A (ja) | 半導体基板の層間絶縁膜および/または表面保護膜用組成物ならびに半導体装置 | |
JPH01230631A (ja) | 耐熱性感光材料 | |
JPS61263195A (ja) | 多層配線構造体及びその製造方法 |