JPH0252842B2 - - Google Patents
Info
- Publication number
- JPH0252842B2 JPH0252842B2 JP10266284A JP10266284A JPH0252842B2 JP H0252842 B2 JPH0252842 B2 JP H0252842B2 JP 10266284 A JP10266284 A JP 10266284A JP 10266284 A JP10266284 A JP 10266284A JP H0252842 B2 JPH0252842 B2 JP H0252842B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- permanent magnets
- permanent magnet
- magnet
- permanent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004907 flux Effects 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
- H01F7/0273—Magnetic circuits with PM for magnetic field generation
- H01F7/0278—Magnetic circuits with PM for magnetic field generation for generating uniform fields, focusing, deflecting electrically charged particles
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明は広い面積にわたつて均一な磁場を得る
ことができる磁気回路装置に関し、特に、例えば
マグネトロン、スパツタリング装置等に適した磁
気回路装置に関する。[Detailed Description of the Invention] [Technical Field to which the Invention Pertains] The present invention relates to a magnetic circuit device that can obtain a uniform magnetic field over a wide area, and particularly relates to a magnetic circuit device suitable for, for example, a magnetron, a sputtering device, etc. .
エレクトロニクス用素材あるいは部品に各種の
膜を形成する場合、スパツタリング装置が用いら
れることが多い。
Sputtering equipment is often used to form various films on electronic materials or parts.
この種の装置の磁気回路として、例えば第１図
に示すものが実用化されている。この磁気回路
は、スピーカ用磁気回路のように、中心の磁極１
１とリング状の磁極１２とで連続した環状磁場を
作り、磁束φに対して矢印Ｅで示す電界が直交
し、直交電磁界放電により密度の高いプラズマを
発生させ、この領域でスパツタリングを行う。 As a magnetic circuit for this type of device, for example, the one shown in FIG. 1 has been put into practical use. This magnetic circuit, like a magnetic circuit for speakers, has a magnetic pole in the center.
1 and the ring-shaped magnetic pole 12, a continuous annular magnetic field is created, and the electric field indicated by the arrow E is orthogonal to the magnetic flux φ, and high-density plasma is generated by orthogonal electromagnetic field discharge, and sputtering is performed in this region.
しかし、スパツタリングされる領域は図に示す
ように磁界発生領域のみであり、中心部あるいは
外周はほとんどされず、有効な領域は限定され
る。これは磁気回路が限定されるために生ずるこ
とである。 However, as shown in the figure, the area to be sputtered is only the magnetic field generation area, and the center or outer periphery is hardly sputtered, so the effective area is limited. This occurs because the magnetic circuit is limited.
このような欠点に鑑み、本発明の目的は広い領
域で均一な磁場を得ることができる磁気回路を提
供することにある。
In view of these drawbacks, an object of the present invention is to provide a magnetic circuit that can obtain a uniform magnetic field over a wide area.
本発明によれば、長さ方向に着磁された長四角
形状の第１の永久磁石を間にして、この第１の永
久磁石の両側に磁極の向きを同じにして第２及び
第３の永久磁石を並設し、しかもこれら第１，第
２及び第３の永久磁石の磁極端面を揃え、さらに
前記第１の永久磁石の磁極端面を囲みつつ前記第
２及び第３の永久磁石の磁極端面を磁気的に短絡
させる環状のヨークを前記第２及び第３の永久磁
石の磁極端に取りつけて成り、前記第１の永久磁
石の上下両主面上に発生する磁束が均一となるよ
うにしたことを特徴とする磁気回路装置が得られ
る。
According to the present invention, a rectangular first permanent magnet magnetized in the length direction is interposed therebetween, and second and third permanent magnets are placed on both sides of the first permanent magnet with magnetic poles having the same direction. Permanent magnets are arranged in parallel, and the magnetic pole faces of the first, second, and third permanent magnets are aligned, and the magnetic poles of the second and third permanent magnets are arranged so as to surround the magnetic pole face of the first permanent magnet. An annular yoke that magnetically shorts the end faces is attached to the pole tips of the second and third permanent magnets, so that the magnetic flux generated on both the upper and lower main surfaces of the first permanent magnet is uniform. A magnetic circuit device is obtained.
以下に本発明の実施例を説明する。 Examples of the present invention will be described below.
第２図は長四角形状永久磁石の磁力線を示す。
磁石２１の磁極を長さ方向（ｘ方向）に形成する
と、磁力線φ0の他に、側面から磁力線φ1も発生
し、側面あるいは磁極端面ではフリンジングがあ
つて磁場勾配が一様とは言えない。 Figure 2 shows the lines of magnetic force of a rectangular permanent magnet.
When the magnetic poles of the magnet 21 are formed in the length direction (x direction), in addition to the magnetic field line φ 0 , a magnetic field line φ 1 is also generated from the side surface, and there is fringing on the side surface or the pole end surface, and the magnetic field gradient is not uniform. do not have.
本発明は上記の如き側面あるいは端面のフリン
ジングを極力抑えようとするものである。 The present invention aims to suppress fringing of the side surfaces or end surfaces as described above as much as possible.
第３図は本発明装置の斜視図である。 FIG. 3 is a perspective view of the device of the present invention.
長四角形状の永久磁石２１の磁極端面にそれぞ
れ、軟磁性体板２３，２４が接合されている。永
久磁石２１の両側には磁極を同じ向きにして同程
度の長さの永久磁石２５，２６を等間隔に配して
いる。２７，２８は軟磁性体で構成された環状の
ヨークで、この環状部分内に軟磁性体板２３，２
４が位置するように永久磁石２５，２６の磁極端
とそれぞれ磁気的に結合している。 Soft magnetic plates 23 and 24 are bonded to the magnetic pole end faces of the rectangular permanent magnet 21, respectively. On both sides of the permanent magnet 21, permanent magnets 25 and 26 having the same length and with magnetic poles in the same direction are arranged at equal intervals. Reference numerals 27 and 28 are annular yokes made of soft magnetic material, and soft magnetic plates 23 and 2 are provided in the annular portions.
4 is magnetically coupled to the pole tips of permanent magnets 25 and 26, respectively.
このような磁気回路においては、磁石２１の両
側に磁石２５，２６の同極が配されているので、
磁石２１と磁石２５，磁石２６との磁気力線は反
発し、磁石２１の側面のフリジングはほとんど抑
えられる。一方、磁石２５，２６の端面にそれぞ
れ、磁気的に結合された環状ヨーク２７，２８が
磁石２１の両端の周囲にあり、磁石２１とヨーク
２７，２８とは磁気的に反発するために、磁石２
１の端面からのフリンジングは極力抑えられる。 In such a magnetic circuit, since the magnets 25 and 26 have the same polarity on both sides of the magnet 21,
The lines of magnetic force between the magnet 21, the magnet 25, and the magnet 26 repel each other, and the fringing of the side surface of the magnet 21 is almost suppressed. On the other hand, annular yokes 27 and 28, which are magnetically coupled to the end faces of the magnets 25 and 26, are located around both ends of the magnet 21, and since the magnet 21 and the yokes 27 and 28 magnetically repel, 2
Fringing from the end face of 1 is suppressed as much as possible.
この結果、第４図、第５図に示すように、磁石
２１の上下両主面の磁場発生が極めて好ましい状
態となる。 As a result, as shown in FIGS. 4 and 5, magnetic field generation on both the upper and lower principal surfaces of the magnet 21 becomes extremely favorable.
従つて、磁石２１の上下両主面を広くすれば、
広い面積でのスパツタリングが可能となり、第１
図に示す従来装置のように有効領域が限定されな
くて済む。また、第１図では磁気回路装置の一方
の面でしかスパツタリングができなかつたが、本
発明によれば、磁気回路装置の両面で行うことが
でき、２倍の生産性となり、産業上極めて有効な
装置である。
Therefore, if both the upper and lower main surfaces of the magnet 21 are made wider,
Sputtering is possible over a wide area, making it the first
The effective area does not have to be limited as in the conventional device shown in the figure. In addition, in Fig. 1, sputtering could only be performed on one side of the magnetic circuit device, but according to the present invention, sputtering can be performed on both sides of the magnetic circuit device, which doubles the productivity and is extremely effective industrially. It is a great device.
第１図は従来装置の一例の斜視図、第２図は本
発明の原理を説明するための斜視図、第３図は本
発明の一実施例の斜視図、第４図、第５図はそれ
ぞれ、第３図のＡ―A′線、Ｂ―B′線による断面
図。
図中、２１，２５，２６は永久磁石、２３，２
４は軟磁性体板、２７，２８はヨーーク。
FIG. 1 is a perspective view of an example of a conventional device, FIG. 2 is a perspective view for explaining the principle of the present invention, FIG. 3 is a perspective view of an embodiment of the present invention, and FIGS. 4 and 5 are Sectional views taken along line AA' and line BB' in FIG. 3, respectively. In the figure, 21, 25, 26 are permanent magnets, 23, 2
4 is a soft magnetic plate, and 27 and 28 are yokes.
Claims (1)
久磁石を間にして、この第１の永久磁石の両側に
磁極の向きを同じにして第２及び第３の永久磁石
を並設し、しかもこれら第１，第２及び第３の永
久磁石の磁極端面を揃え、さらに前記第１の永久
磁石の磁極端面を囲みつつ前記第２及び第３の永
久磁石の磁極端面を磁気的に短絡させる環状のヨ
ークを前記第２及び第３の永久磁石の磁極端に取
りつけて成り、前記第１の永久磁石の上下主面上
に発生する磁束が均一となるようにしたことを特
徴とする磁気回路装置。1 A rectangular first permanent magnet magnetized in the length direction is placed in between, and second and third permanent magnets are arranged in parallel on both sides of the first permanent magnet with the magnetic poles facing the same direction. Moreover, the magnetic pole end faces of the first, second, and third permanent magnets are aligned, and the magnetic pole end faces of the second and third permanent magnets are magnetically aligned while surrounding the magnetic pole end face of the first permanent magnet. An annular yoke for short-circuiting is attached to the pole tips of the second and third permanent magnets, so that the magnetic flux generated on the upper and lower main surfaces of the first permanent magnet is uniform. Magnetic circuit device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10266284A JPS60247904A (en) | 1984-05-23 | 1984-05-23 | Magnetic circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10266284A JPS60247904A (en) | 1984-05-23 | 1984-05-23 | Magnetic circuit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60247904A JPS60247904A (en) | 1985-12-07 |
| JPH0252842B2 true JPH0252842B2 (en) | 1990-11-14 |
Family
ID=14333442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10266284A Granted JPS60247904A (en) | 1984-05-23 | 1984-05-23 | Magnetic circuit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60247904A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU180112U1 (en) * | 2017-04-20 | 2018-06-04 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Поволжский государственный технологический университет" | Magnetron with increased utilization of the target material |
-
1984
- 1984-05-23 JP JP10266284A patent/JPS60247904A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60247904A (en) | 1985-12-07 |
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